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1. 发明申请

WO2008089328A1 MICROPHONE WITH PRESSURE RELIEF 审中-公开
标题翻译：带压力释放的麦克风
公开(公告)号：WO2008089328A1
公开(公告)日：2008-07-24
申请号：PCT/US2008/051310
申请日：2008-01-17
申请人： ANALOG DEVICES, INC. , ZHANG, Xin , JUDY, Michael, W. , HARNEY, Kieran, P. , WEIGOLD, Jason, W.
发明人： ZHANG, Xin , JUDY, Michael, W. , HARNEY, Kieran, P. , WEIGOLD, Jason, W.
IPC分类号： H04R19/00
CPC分类号： H04R19/005 , B81B3/0027 , B81B2201/0257 , H04R7/20 , H04R2307/207
摘要： A microphone has a movable diaphragm having a rest position, a stationary portion, and a set of springs movably coupling the diaphragm and the stationary portion. The diaphragm and stationary portion are spaced a first distance when the diaphragm is in the rest position. When not in the rest position, however, the diaphragm and stationary portion are capable of being spaced a second distance, which is greater than the first distance. Despite the change in distance, the diaphragm still is capable of returning the space from the second distance to the first distance when the diaphragm returns to the rest position.
摘要翻译：麦克风具有可移动膜片，该可移动膜片具有静止位置，静止部分和一组可移动地联接膜片和静止部分的弹簧。当隔膜处于静止位置时，隔膜和静止部分隔开第一距离。然而，当不处于静止位置时，隔膜和静止部分能够间隔第二距离，其大于第一距离。尽管距离发生变化，当隔膜返回到静止位置时，隔膜仍然能够将空间从第二距离返回到第一距离。

2. 发明申请

WO2010027600A3 MEMS SENSOR WITH MOVABLE Z-AXIS SENSING ELEMENT 审中-公开
公开(公告)号：WO2010027600A3
公开(公告)日：2010-03-11
申请号：PCT/US2009/052964
申请日：2009-08-06
申请人： ANALOG DEVICES, INC. , ZHANG, Xin , JUDY, Michael, W.
发明人： ZHANG, Xin , JUDY, Michael, W.
IPC分类号： G01P15/08
摘要： A MEMS sensor includes a substrate and a MEMS structure coupled to the substrate. The MEMS structure has a mass movable with respect to the substrate. The MEMS sensor also includes a reference structure positioned radially outward from the MEMS structure. The reference structure is used to provide a reference to offset any environmental changes that may affect the MEMS sensor in order to increase the accuracy of its measurement.

3. 发明申请

WO2011059868A1 MICROPHONE WITH BACKPLATE HAVING SPECIALLY SHAPED THROUGH-HOLES 审中-公开
标题翻译：具有背景的麦克风具有特殊形状的穿孔
公开(公告)号：WO2011059868A1
公开(公告)日：2011-05-19
申请号：PCT/US2010/055404
申请日：2010-11-04
申请人： ANALOG DEVICES, INC. , ZHANG, Xin
发明人： ZHANG, Xin
IPC分类号： H04R19/04 , H04R31/00
CPC分类号： H04R19/04 , H04R1/222 , H04R7/20 , H04R19/005 , H04R31/00 , H04R2201/34 , H04R2400/11 , H04R2499/11
摘要： A MEMS microphone has 1) a backplate with a backplate interior surface and a plurality of through-holes, and 2) a diaphragm spaced from the backplate. The diaphragm is movably coupled with the backplate to form a variable capacitor. At least two of the through-holes have an inner dimensional shape (on the backplate interior surface) with a plurality of convex portions and a plurality of concave portions.
摘要翻译： MEMS麦克风具有1）具有背板内表面和多个通孔的背板，以及2）与背板隔开的隔膜。隔膜与背板可移动地联接以形成可变电容器。至少两个通孔具有内部尺寸形状（在背板内表面上），具有多个凸部和多个凹部。

4. 发明申请

WO2008086530A2 MEMS SENSOR WITH CAP ELECTRODE 审中-公开
标题翻译：具有电极电极的MEMS传感器
公开(公告)号：WO2008086530A2
公开(公告)日：2008-07-17
申请号：PCT/US2008/050924
申请日：2008-01-11
申请人： ANALOG DEVICES, INC. , MARTIN, John, R. , ZHANG, Xin
发明人： MARTIN, John, R. , ZHANG, Xin
IPC分类号： B81B7/00
CPC分类号： B81C1/00269 , B81B7/0077 , B81B2203/053 , B81C99/0045 , Y10T29/49002
摘要： A MEMS sensor includes a substrate having a MEMS structure movably attached to the substrate, a cap attached to the substrate and encapsulating the MEMS structure, and an electrode formed on the cap that senses movement of the MEMS structure.
摘要翻译： MEMS传感器包括具有可移动地附接到衬底的MEMS结构的衬底，附接到衬底并封装MEMS结构的帽，以及形成在帽上的电极，其感测MEMS结构的移动

5. 发明申请

WO2008003051A2 STRESS MITIGATION IN PACKAGED MICROCHIPS 审中-公开
标题翻译：包装微生物中的应力减缓
公开(公告)号：WO2008003051A2
公开(公告)日：2008-01-03
申请号：PCT/US2007/072381
申请日：2007-06-28
申请人： ANALOG DEVICES, INC. , ZHANG, Xin , JUDY, Michael , CHAU, Kevin, H.L. , KUAN, Nelson , SPOONER, Timothy , PAYDENKAR, Chetan , FARRELL, Peter
发明人： ZHANG, Xin , JUDY, Michael , CHAU, Kevin, H.L. , KUAN, Nelson , SPOONER, Timothy , PAYDENKAR, Chetan , FARRELL, Peter
IPC分类号： H01L23/31 , H01L23/495
CPC分类号： H01L23/3107 , H01L23/3142 , H01L23/49503 , H01L23/4951 , H01L24/48 , H01L24/49 , H01L2224/48091 , H01L2224/48247 , H01L2224/48471 , H01L2224/49171 , H01L2924/00014 , H01L2924/10253 , H01L2924/14 , H01L2924/1433 , H01L2924/1461 , H01L2924/15747 , H01L2924/181 , H01L2924/19041 , H01L2924/00 , H01L2924/00012 , H01L2224/45099 , H01L2224/45015 , H01L2924/207
摘要： A packaged microchip has a lead frame with a die directly contacting at least a single, contiguous portion of the lead frame. The portion of the lead frame has a top surface forming a concavity and contacting the die. The packaged microchip also has mold material substantially encapsulating part of the top surface of the portion of the lead frame.
摘要翻译：封装的微芯片具有引线框架，其中芯片直接接触引线框架的至少一个连续部分。引线框架的一部分具有形成凹部并与模具接触的顶表面。封装的微芯片还具有基本上封装引线框架部分顶表面的一部分的模制材料。

6. 发明申请

WO2006116017A3 MICROMACHINED MICROPHONE AND MULTISENSOR AND METHOD FOR PRODUCING SAME 审中-公开
公开(公告)号：WO2006116017A3
公开(公告)日：2006-11-02
申请号：PCT/US2006/014982
申请日：2006-04-21
申请人： ANALOG DEVICES, INC. , MARTIN, John R. , BROSNIHAN, Timothy J. , CORE, Craig , NUNAN, Thomas , WEIGOLD, Jason , ZHANG, Xin
发明人： MARTIN, John R. , BROSNIHAN, Timothy J. , CORE, Craig , NUNAN, Thomas , WEIGOLD, Jason , ZHANG, Xin
IPC分类号： H04R19/00
摘要： A micromachined microphone is formed from a silicon or silicon-on- insulator (SOI) wafer. A fixed sensing electrode for the microphone is formed from a top silicon layer of the wafer. Various polysilicon microphone structures are formed above a front side of the top silicon layer by depositing at least one oxide layer, forming the structures, and then removing a portion of the oxide underlying the structures from a back side of the top silicon layer through trenches formed through the top silicon layer. The trenches allow sound waves to reach the diaphragm from the back side of the top silicon layer. In an SOI wafer, a cavity is formed through a bottom silicon layer and an intermediate oxide layer to expose the trenches for both removing the oxide and allowing the sound waves to reach the diaphragm. An inertial sensor may be formed on the same wafer, with various inertial sensor structures formed at substantially the same time and using substantially the same processes as corresponding microphone structures.

7. 发明申请

WO2022133312A1 ACCELEROMETER WITH TRANSLATIONAL MOTION OF MASSES 审中-公开
公开(公告)号：WO2022133312A1
公开(公告)日：2022-06-23
申请号：PCT/US2021/064207
申请日：2021-12-17
申请人： ANALOG DEVICES, INC.
发明人： JIA, Kemiao , ZHANG, Xin , JUDY, Michael
IPC分类号： G01P15/125 , G01P15/08
摘要： A microelectromechanic al systems (MEMS) accelerometer is provided, comprising a substrate disposed in a plane defined by a first axis and a second axis perpendicular to the first axis; a first proof mass and a second proof mass coupled to the substrate and configured to translate in opposite directions of each other along a third axis perpendicular to the first and second axes; and at least one lever coupling the first proof mass to the second proof mass, wherein, the MEMS accelerometer is configured to detect acceleration along the third axis via detection of translation of the first and second proof masses along the third axis; and the MEMS accelerometer exhibits symmetry about the first and second axes.

8. 发明申请

WO2020264278A1 MULTIPLE ANCHOR HIGH FREQUENCY ACCELEROMETER 审中-公开
公开(公告)号：WO2020264278A1
公开(公告)日：2020-12-30
申请号：PCT/US2020/039799
申请日：2020-06-26
申请人： ANALOG DEVICES, INC.
发明人： VOHRA, Gaurav , ZHANG, Xin , JUDY, Michael
IPC分类号： G01P15/125 , B81B3/00 , H01L29/84
摘要： Single-axis teeter-totter accelerometers having a plurality of anchors are disclosed. The plurality of anchors may be arranged about a rotation axis of the teeter-totter proof mass. Each of the plurality of anchors may be coupled to the proof mass by two torsional springs each extending along the rotation axis. The plurality of anchors allows an increased number of torsional springs to be coupled to the proof mass and thus greater torsional stiffness for the proof mass may be achieved. Due to the higher torsional stiffness, the disclosed single-axis teeter- totter accelerometers may be deployed in high-frequency environments where such increased torsional stiffness is required, for example, around 20 kHz and above.

9. 发明申请

WO2020055983A1 INCREASED SENSITIVITY Z-AXIS ACCELEROMETER 审中-公开
公开(公告)号：WO2020055983A1
公开(公告)日：2020-03-19
申请号：PCT/US2019/050587
申请日：2019-09-11
申请人： ANALOG DEVICES, INC.
发明人： ZHANG, Xin , VOHRA, Gaurav , JUDY, Michael
IPC分类号： G01P15/08 , G01P15/125 , B81B5/00
摘要： Z-axis teeter-totter accelerometers with embedded movable structures are disclosed. The teeter-totter accelerometer may include an embedded mass which pivots or translates out-of-plane from the teeter-totter beam. The pivoting or translating embedded mass may be positioned to increase the sensitivity of the z-axis accelerometer by providing greater z-axis displacement than the teeter-totter beam itself exhibits.

10. 发明申请

WO2017070015A1 MULTIPLE-AXIS RESONANT ACCELEROMETERS 审中-公开
标题翻译：多轴共振加速度计
公开(公告)号：WO2017070015A1
公开(公告)日：2017-04-27
申请号：PCT/US2016/057017
申请日：2016-10-14
申请人： ANALOG DEVICES, INC.
发明人： ZHANG, Xin , JUDY, Michael W. , MOTIEE, Mehrnaz
IPC分类号： G01C19/5719 , G01C19/00
CPC分类号： G01P15/097 , G01P15/18
摘要： Multiple-axis resonant accelerometers are based on detection of resonance frequency changes of one or more electrostatically-driven resonator masses due to electrostatic gap changes under acceleration. Specifically, one or more resonator masses are configured to resonate simultaneously in different directions associated with different axes of sensitivity (e.g., X, Y, and/or Z axes). The motion of each resonator mass is monitored through one or more electrostatically-coupled sense electrodes. An acceleration along a particular axis of sensitivity causes a small change in the electrostatic gap(s) between the corresponding resonator mass(es) and the sense electrode(s) associated with that axis of sensitivity, and this electrostatic gap change manifests as a small change in the resonance frequency of the resonator from which an accelerometer output signal can be produced.
摘要翻译：多轴共振加速度计基于检测由于加速度下的静电间隙变化而引起的一个或多个静电驱动的共振器质量的共振频率变化。具体而言，一个或多个谐振器质量块被配置成在与不同灵敏度轴（例如，X，Y和/或Z轴）相关联的不同方向上同时谐振。每个谐振器质量的运动通过一个或多个静电耦合的感测电极来监测。沿着特定的灵敏度轴的加速度引起相应的谐振器质量块和与该灵敏度轴相关联的感测电极之间的静电间隙的小的变化，并且该静电间隙变化表现为小的改变谐振器的谐振频率，从中可以产生加速度计输出信号。

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