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1. 发明申请

WO2007134056A3 SPRAY JET CLEANING APPARATUS AND METHOD 审中-公开
标题翻译：喷射喷射清洁装置和方法
公开(公告)号：WO2007134056A3
公开(公告)日：2009-04-09
申请号：PCT/US2007068478
申请日：2007-05-08
申请人： AKRION TECHNOLOGIES INC , FRANKLIN COLE , FAN YAN , ROUILLARD MARK
发明人： FRANKLIN COLE , FAN YAN , ROUILLARD MARK
IPC分类号： C03C23/00 , B08B7/00 , C23G1/00 , C23G1/02
CPC分类号： H01L21/67051 , B05B7/0483 , B08B3/02
摘要： A spray cleaning device having an atomizing unit with at least one gas passage and at least one cleaning fluid passage converging Into a atomizing area. The gas flowing though the gas passage and the cleaning fluid flowing through the cleaning fluid passages combine to form a mixture at the atomizing area. The accelerating unit has an acceleration passage for spraying the mixture onto a substrate surface. The gas passages are preferably angled with respect to the cleaning acceleration passage.
摘要翻译：一种喷雾清洁装置，具有具有至少一个气体通道的雾化单元和汇聚到雾化区域中的至少一个清洁流体通道。流过气体通道的气体和流过清洗流体通道的清洗流体在雾化区域结合形成混合物。加速单元具有用于将混合物喷射到基板表面上的加速通道。气体通道优选地相对于清洁加速通道成角度。

2. 发明申请

WO2008022350A2 SYSTEM AND METHOD FOR PROCESSING A SUBSTRATE UTILIZING A GAS STREAM FOR PARTICLE REMOVAL 审中-公开
标题翻译：用于处理使用气体流进行颗粒物去除的基板的系统和方法
公开(公告)号：WO2008022350A2
公开(公告)日：2008-02-21
申请号：PCT/US2007076324
申请日：2007-08-20
申请人： AKRION TECHNOLOGIES INC , FRANKLIN COLE , ROUILLARD MARK , FAN YAN
发明人： FRANKLIN COLE , ROUILLARD MARK , FAN YAN
IPC分类号： B08B3/10 , B08B3/12
CPC分类号： H01L21/67051 , H01L21/02057
摘要： A system and method of processing a substrate. The method and system applies a liquid to a surface of the substrate so as to form a film of the liquid on the surface of the substrate, wherein a boundary layer exists at the interface of the surface and the film of the liquid. The cleaning system then applies a force that penetrates the boundary layer so as to create a localized area on the surface of the substrate that is substantially free of the liquid. The application of the force in combination with the liquid removes particles from the surface of the substrate.
摘要翻译：一种处理衬底的系统和方法。该方法和系统将液体施加到基板的表面，以在基板的表面上形成液体的膜，其中边界层存在于液体的表面和膜的界面处。清洁系统然后施加穿透边界层的力，以便在基本上不含液体的基底表面上产生局部区域。与液体组合施加的力从基板表面去除颗粒。

3. 发明申请

WO2008008921A3 TRANDUCER ASSEMBLY INCORPORATING A TRANSMITTER HAVING THROUGH HOLES, AND METHOD OF CLEANING 审中-公开
标题翻译：装有通过孔的发射器的TRANDUCER组件和清洁方法
公开(公告)号：WO2008008921A3
公开(公告)日：2008-07-17
申请号：PCT/US2007073402
申请日：2007-07-12
申请人： AKRION TECHNOLOGIES INC , FRANKLIN COLE
发明人： FRANKLIN COLE
IPC分类号： B08B3/04 , B08B3/10 , B08B3/12 , G01V1/38
CPC分类号： B08B3/12
摘要： An apparatus, system and method for processing a substrate utilizing sonic energy In one aspect, the invention utilizes a transmitter (104) having through holes (16) to dampen sonic energy that may damage the substrate In other aspects, the through holes of the transmitter (104) can be adapted to introduce a liquid solution having bubbles of a controlled size into the meniscus that couples the transmitter (104) to the surface of a substrate to be cleaned to further dampen the sonic energy IN one embodiment, the invention is a system for processing a substrate comprising a rotary support (108) for supporting a substrate in a substantially horizontal orientation, a transducer (140) assembly comprising a transmitter (104) and a transducer (140) adapted to generate sonic energy, the transducer (140) acoustically coupled to the transmitter (104) a plurality of internal passageways (16) extending through the transmitter from holes (16) in a first outer surface of the transmitter to holes (16) in a second outer surface of the transmitter (104), and the transducer (140) assembly positioned so that so that a portion of the vibration transmitter (104) is adjacent to and spaced from a surface of a substrate on the rotary support (16) so that when a liquid is applied to the surface of the substrate, a film of the liquid couples the portion of the transmitter (104) to the surface of the substrate
摘要翻译：利用声能处理衬底的装置，系统和方法在一个方面，本发明利用具有通孔（16）的发射器（104）来抑制可能损坏衬底的声能。在其他方面，发射器的通孔（104）可以适于将具有受控尺寸的气泡的液体溶液引入弯液面，所述弯月面将发射器（104）耦合到待清洁的基底的表面，以进一步抑制声能。在一个实施例中，本发明是用于处理基板的系统，包括用于以基本水平的方向支撑基板的旋转支撑件（108），包括适于产生声能的发射器（104）和换能器（140）的换能器（140）组件，所述换能器）与所述发射器（104）声学耦合，多个内部通道（16）从所述发射器的第一外表面中的孔（16）延伸穿过所述发射器到孔（16）），并且所述换能器（140）组件定位成使得所述振动发射器（104）的一部分与所述旋转支撑件上的基板的表面相邻并间隔开（ 16），使得当液体施加到基板的表面时，液体的膜将发射器（104）的部分耦合到基板的表面

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