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1. 发明申请

WO2006031991A3 SYSTEM AND METHOD OF POWERING A SONIC ENERGY SOURCE AND USE OF THE SAME TO PROCESS SUBSTRATES 审中-公开
标题翻译：提供SONIC能量源的系统和方法及其使用方法来处理基板
公开(公告)号：WO2006031991A3
公开(公告)日：2007-10-04
申请号：PCT/US2005033023
申请日：2005-09-15
申请人： AKRION INC , KORBLER JOHN , KASHKOUSH ISMAIL , VOLKERT JOHN , PETERS MICHAEL
发明人： KORBLER JOHN , KASHKOUSH ISMAIL , VOLKERT JOHN , PETERS MICHAEL
IPC分类号： B08B3/12 , B08B7/04
CPC分类号： H01L21/67051 , B08B3/12
摘要： A system and method of supplying power to a sonic energy source that minimizes damage to substrate devices during processing while increasing processing efficiency and/or effectiveness. The system and method utilize the concept of ramping the amplitude and/or varying the frequency of the electrical signal used to drive the sonic energy source, thereby resulting in corresponding ramping and/or variations in the amplitude and frequency of the resulting sonic energy being applied to the substrate. A method of processing a substrate with sonic energy comprising: a) supporting at least one substrate in a process chamber; b) generating a base electrical signal; c) transmitting the base electrical signal to an amplifier, the amplifier converting the base electrical signal into an output electrical signal having a peak amplitude; d) transmitting the output electrical signal to a transducer, the transducer converting the output electrical signal into corresponding sonic energy; e) applying the sonic energy to the at least on substrate supported in the process chamber; and f) ramping the peak amplitude of the output electrical signal.
摘要翻译：一种向声能量源供电的系统和方法，其在处理过程中使衬底装置的损害最小化，同时提高处理效率和/或有效性。该系统和方法利用斜率振幅和/或改变用于驱动声能量的电信号的频率的概念，从而导致所应用的声能的振幅和频率的相应斜坡和/或变化到基底。一种用声能处理衬底的方法，包括：a）在处理室中支撑至少一个衬底; b）产生基本电信号; c）将基本电信号发送到放大器，放大器将基本电信号转换成具有峰值振幅的输出电信号; d）将输出电信号传输到换能器，换能器将输出电信号转换成相应的声能; e）将声能施加到所述处理室中支撑的所述至少一个衬底上; 以及f）斜率输出电信号的峰值幅度。

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