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    • 1. 发明申请
    • METHOD FOR COOLING A FLUID SUCH AS HELIUM FOR SUPPLYING A FLUID CONSUMER AND CORRESPONDING EQUIPMENT
    • 用于冷却液体如用于供应流体消耗品和相关设备的氦气的方法
    • WO2009024705A4
    • 2009-07-02
    • PCT/FR2008051415
    • 2008-07-28
    • AIR LIQUIDEBRIEND PIERRE
    • BRIEND PIERRE
    • F25B9/00F25B9/06F25J1/00
    • F25B9/00F25B9/06F25B2400/16F25B2700/04F25J1/005F25J1/0052F25J1/0065F25J2270/16F25J2270/912
    • The invention relates to a method for cooling a fluid such as helium for supplying a fluid consumer, the fluid flowing in a cyclic manner successively through a compression stage (4), a fluid pre-cooling and/or cooling stage (5, 6), and an interface (1) for supplying the fluid to the consumer and collecting the fluid from the consumer. A first portion of the fluid from the pre-cooling and/or cooling stage is directed towards the interface (1), a second portion of the fluid can be directed to the pre-cooling and/or cooling stage (5, 6) based on whether the thermal load required by the consumer is low or high, and a third portion of the fluid is cooled and directed towards the accumulator (26) adapted for alternatively storing said fluid or, based on whether the thermal load required by the consumer is low or high, for delivering an amount of fluid already stored in order to cool down the first portion of the fluid directed towards the interface (1).
    • 本发明涉及一种用于冷却流体的方法,例如用于供应流体消耗器的氦气,流体以循环方式依次流过压缩级(4),流体预冷和/或冷却级(5,6) ,以及用于将流体供应给消费者并从消费者收集流体的界面(1)。 来自预冷却和/或冷却阶段的流体的第一部分被引导到界面(1),流体的第二部分可以被引导到基于预冷和/或冷却阶段(5,6) 关于消费者所需的热负荷是低还是高,并且流体的第三部分被冷却并引导到适于交替存储所述流体的蓄能器(26),或者基于消费者所需的热负荷是否为 低或高,用于输送已经存储的量的液体,以冷却朝向界面(1)的流体的第一部分。
    • 3. 发明申请
    • METHOD FOR COOLING A FLUID SUCH AS HELIUM FOR SUPPLYING A FLUID CONSUMER AND CORRESPONDING EQUIPMENT
    • 冷却流体如氦气以供应流体消费者和相应设备的方法
    • WO2009024705A3
    • 2009-05-14
    • PCT/FR2008051415
    • 2008-07-28
    • AIR LIQUIDEBRIEND PIERRE
    • BRIEND PIERRE
    • F25B9/00F25B9/06F25J1/00
    • F25B9/00F25B9/06F25B2400/16F25B2700/04F25J1/005F25J1/0052F25J1/0065F25J2270/16F25J2270/912
    • The invention relates to a method for cooling a fluid such as helium for supplying a fluid consumer, the fluid flowing in a cyclic manner successively through a compression stage (4), a fluid pre-cooling and/or cooling stage (5, 6), and an interface (1) for supplying the fluid to the consumer and collecting the fluid from the consumer. A first portion of the fluid from the pre-cooling and/or cooling stage is directed towards the interface (1), a second portion of the fluid can be directed to the pre-cooling and/or cooling stage (5, 6) based on whether the thermal load required by the consumer is low or high, and a third portion of the fluid is cooled and directed towards the accumulator (26) adapted for alternatively storing said fluid or, based on whether the thermal load required by the consumer is low or high, for delivering an amount of fluid already stored in order to cool down the first portion of the fluid directed towards the interface (1).
    • 本发明涉及一种用于冷却诸如氦之类的流体以供应流体消耗品的方法,所述流体以循环方式连续地流过压缩级(4),流体预冷和/或冷却级(5,6) 以及用于将流体供应给消费者并从消费者收集流体的接口(1)。 来自预冷却和/或冷却阶段的流体的第一部分被导向界面(1),流体的第二部分可被导向基于预冷却和/或冷却阶段(5,6) 关于消费者所需的热负荷是低还是高,并且第三部分流体被冷却并且朝向适于交替地存储所述流体的蓄积器(26),或者基于消费者所需的热负荷是 低或高,用于输送已经储存的一定量的流体,以冷却指向界面(1)的流体的第一部分。
    • 5. 发明申请
    • METHOD FOR RECYCLING SILANE (SIH<SB>4</SB>)
    • 回收硅烷的方法(SIH 4
    • WO2009112730A2
    • 2009-09-17
    • PCT/FR2009050262
    • 2009-02-18
    • AIR LIQUIDEBRIEND PIERREALBAN BRUNOCHEVREL HENRIJAHAN DENIS
    • BRIEND PIERREALBAN BRUNOCHEVREL HENRIJAHAN DENIS
    • C01B33/029
    • C23C16/45593C01B33/043C01B33/046C23C16/24C23C16/4412
    • The invention relates to a method for recycling silane that comprises the following consecutive steps: a) injecting a mixture of pure silane/pure hydrogen (SiH4/H2) in a reaction chamber for making silicon-containing thin layers; b) extracting from the mixture the excess of silane not used during step a) / hydrogen (SiH4/H2) via a pump using a supply gas; c) discharging from said pump, at a pressure close to the atmospheric pressure, a mixture containing at least silane (SiH4), hydrogen (H2) and an amount different from zero of said supply gas; d) separating the silane (SiH4) from the hydrogen/supply gas mixture resulting from the mixture from step c), the silane thus obtained containing less than 100 ppm of supply gas, preferably less than 10 ppm of supply gas and more preferably less than 1 ppm of supply gas; characterised in that at least 50%, preferably 70%, and more preferably 80% of the silane (SiH4) from step b) is reused after step d) for a new step a).
    • 本发明涉及一种回收硅烷的方法,包括以下连续步骤:a)在用于制造含硅薄层的反应室中注入纯硅烷/纯氢(SiH4 / H2)的混合物; b)通过使用供给气体的泵,从步骤a)/氢(SiH 4 / H 2)中从混合物中提取未使用的过量的硅烷; c)在接近大气压的压力下从所述泵排出至少包含硅烷(SiH 4),氢(H 2)和与所述供应气体不同于零的量的混合物; d)从由步骤c)的混合物得到的氢/供应气体混合物中分离硅烷(SiH 4),所得到的硅烷含有少于100ppm的供应气体,优选小于10ppm的供应气体,更优选小于 1 ppm供气; 其特征在于,在步骤d)之后,再次使用来自步骤b)的至少50%,优选70%,更优选80%的硅烷(SiH 4)用于新的步骤a)。