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    • 8. 发明申请
    • METHOD FOR RECYCLING SILANE (SIH<SB>4</SB>)
    • 回收硅烷的方法(SIH 4
    • WO2009112730A2
    • 2009-09-17
    • PCT/FR2009050262
    • 2009-02-18
    • AIR LIQUIDEBRIEND PIERREALBAN BRUNOCHEVREL HENRIJAHAN DENIS
    • BRIEND PIERREALBAN BRUNOCHEVREL HENRIJAHAN DENIS
    • C01B33/029
    • C23C16/45593C01B33/043C01B33/046C23C16/24C23C16/4412
    • The invention relates to a method for recycling silane that comprises the following consecutive steps: a) injecting a mixture of pure silane/pure hydrogen (SiH4/H2) in a reaction chamber for making silicon-containing thin layers; b) extracting from the mixture the excess of silane not used during step a) / hydrogen (SiH4/H2) via a pump using a supply gas; c) discharging from said pump, at a pressure close to the atmospheric pressure, a mixture containing at least silane (SiH4), hydrogen (H2) and an amount different from zero of said supply gas; d) separating the silane (SiH4) from the hydrogen/supply gas mixture resulting from the mixture from step c), the silane thus obtained containing less than 100 ppm of supply gas, preferably less than 10 ppm of supply gas and more preferably less than 1 ppm of supply gas; characterised in that at least 50%, preferably 70%, and more preferably 80% of the silane (SiH4) from step b) is reused after step d) for a new step a).
    • 本发明涉及一种回收硅烷的方法,包括以下连续步骤:a)在用于制造含硅薄层的反应室中注入纯硅烷/纯氢(SiH4 / H2)的混合物; b)通过使用供给气体的泵,从步骤a)/氢(SiH 4 / H 2)中从混合物中提取未使用的过量的硅烷; c)在接近大气压的压力下从所述泵排出至少包含硅烷(SiH 4),氢(H 2)和与所述供应气体不同于零的量的混合物; d)从由步骤c)的混合物得到的氢/供应气体混合物中分离硅烷(SiH 4),所得到的硅烷含有少于100ppm的供应气体,优选小于10ppm的供应气体,更优选小于 1 ppm供气; 其特征在于,在步骤d)之后,再次使用来自步骤b)的至少50%,优选70%,更优选80%的硅烷(SiH 4)用于新的步骤a)。