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1. 发明申请

WO2008041211A3 DEVICE AND METHOD FOR REMOVING LIQUID FROM A SURFACE OF A DISC-LIKE ARTICLE 审中-公开
标题翻译：从类似物品的表面去除液体的装置和方法
公开(公告)号：WO2008041211A3
公开(公告)日：2008-08-21
申请号：PCT/IB2007055357
申请日：2007-10-16
申请人： SEZ AG , KRAUS HARALD , WITTERSHAGEN AXEL
发明人： KRAUS HARALD , WITTERSHAGEN AXEL
IPC分类号： H01L21/00
CPC分类号： H01L21/67034 , H01L21/67028 , H01L21/67051
摘要： Herein disclosed is a method for removing liquid from a surface of a disc-like article comprising, rotating the disc-like article about an axis perpendicular to the disc-like article's main surface, supplying liquid onto the disc-like article when rotated, wherein the liquid is supplied from a supply port, which is moved across the substrate towards the edge of the disc-like article, supplying a first gas flow through a first gas supply port onto the disc-like article to an area, wherein the area has a centre having a distance to the centre of the rotational movement of not more than 20 mm, wherein the area, to which the first gas is supplied, is covered with a liquid layer when the first gas is supplied, and thereby opening the liquid layer at a discrete area, and supplying a second gas flow through a second gas supply port onto the disc-like article when rotated, wherein the second gas flow is supplied from a second gas supply port, which is moved across the substrate towards the edge of the substrate, wherein the distance of the second gas supply port to the centre is lower than the distance of the liquid supply port to the centre while the second gas flow and the liquid are supplied. Furthermore a device for carrying out the method is disclosed.
摘要翻译：本文公开了一种从圆盘状物品的表面除去液体的方法，其特征在于，使所述圆盘状物品围绕与所述盘状物的主面垂直的轴线旋转，在旋转时将液体供给到所述盘状物品上，液体从供给口供给，该供给口朝向盘状物品的边缘移动，供给通过第一气体供给口的第一气体流入盘状物品到该区域，具有距离旋转中心的距离不大于20mm的中心，其中当供应第一气体时，供应第一气体的区域被液体层覆盖，从而打开液体层并且在旋转时将第二气体流通过第二气体供给口供应到盘状制品上，其中第二气体流从第二气体供应口供应，第二气体供应口通过基板朝向边缘移动 e，其中第二气体供给口到中心的距离低于液体供应口到中心的距离，而第二气体流和液体被供应。此外，公开了一种用于执行该方法的装置。

2. 发明申请

WO2008041211A2 DEVICE AND METHOD FOR REMOVING LIQUID FROM A SURFACE OF A DISC-LIKE ARTICLE 审中-公开
标题翻译：用于从盘状物品的表面去除液体的装置和方法
公开(公告)号：WO2008041211A2
公开(公告)日：2008-04-10
申请号：PCT/IB2007/055357
申请日：2007-10-16
申请人： SEZ AG , KRAUS, Harald , WITTERSHAGEN, Axel
发明人： KRAUS, Harald , WITTERSHAGEN, Axel
CPC分类号： H01L21/67034 , H01L21/67028 , H01L21/67051
摘要： Herein disclosed is a method for removing liquid from a surface of a disc-like article comprising, rotating the disc-like article about an axis perpendicular to the disc-like article's main surface, supplying liquid onto the disc-like article when rotated, wherein the liquid is supplied from a supply port, which is moved across the substrate towards the edge of the disc-like article, supplying a first gas flow through a first gas supply port onto the disc-like article to an area, wherein the area has a centre having a distance to the centre of the rotational movement of not more than 20 mm, wherein the area, to which the first gas is supplied, is covered with a liquid layer when the first gas is supplied, and thereby opening the liquid layer at a discrete area, and supplying a second gas flow through a second gas supply port onto the disc-like article when rotated, wherein the second gas flow is supplied from a second gas supply port, which is moved across the substrate towards the edge of the substrate, wherein the distance of the second gas supply port to the centre is lower than the distance of the liquid supply port to the centre while the second gas flow and the liquid are supplied. Furthermore a device for carrying out the method is disclosed.
摘要翻译：这里公开了一种用于从盘状物品的表面除去液体的方法，包括使盘状物品围绕垂直于盘状物品的主表面的轴线旋转，将液体供应到其中所述液体从供应口供应，所述供应口跨过所述衬底朝向所述盘状物品的边缘移动，通过第一气体供应口向所述盘状物品供应第一气流其中所述区域具有距所述旋转运动的中心的距离不大于20mm的中心，其中当所述第一气体是液体时，所述第一气体被供应到的区域被液体层覆盖从而在离散区域打开液体层，并且当旋转时通过第二气体供给口将第二气流供给到盘状物品上，其中第二气流从第二气体供给口供给，该第二气体供给口是移动穿过衬底t 在第二气体流量和液体被供给的同时，第二气体供给口到中心的距离小于液体供给口到中心的距离。此外公开了一种执行该方法的装置。

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