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1. 发明申请

WO2009065757A1 DEVICE AND PROCESS FOR WET TREATING A PERIPHERAL AREA OF A WAFER-SHAPED ARTICLE 审中-公开
标题翻译：湿法处理波浪形文字的外围区域的设备和方法
公开(公告)号：WO2009065757A1
公开(公告)日：2009-05-28
申请号：PCT/EP2008/065371
申请日：2008-11-12
申请人： SEZ AG , FRANK, Dieter , PARZEFALL, Jürgen , SCHWARZFURTNER, Alexander
发明人： FRANK, Dieter , PARZEFALL, Jürgen , SCHWARZFURTNER, Alexander
IPC分类号： H01L21/00
CPC分类号： H01L21/67051 , H01L21/6708
摘要： Disclosed is a device (1) for wet treating a peripheral area of a wafer-shaped article W. The device comprises holding means (20, 50) for holding and rotating the wafer-shaped article at its edge, a first liquid treatment unit (30) for supplying liquid towards the peripheral area, and a second liquid treatment unit (60) for supplying liquid towards the peripheral area. The holding means comprise rollers (23, 53) for driving the wafer-shaped article at its edge. The first liquid treatment unit comprises a first liquid carrier for providing a first liquid to wet a first section of the peripheral area, a first liquid supply nozzle for supplying liquid to the first liquid carrier, and a first liquid discharging channel for removing liquid from the first liquid carrier. The second liquid treatment unit comprises, a second liquid carrier for providing a second liquid to wet a second section of the peripheral area, a second liquid supply nozzle for supplying liquid to the second liquid carrier, a second liquid discharging channel for removing liquid from the second liquid carrier, and a second gas treatment section with a gas supply nozzle for supplying gas towards the peripheral area, which has been treated with the second liquid for removing most of the second liquid from the peripheral area, and with a gas discharge channel for discharging gas and removed liquid. Furthermore an associated method is disclosed.
摘要翻译：公开了一种用于湿式处理晶片状物品W的周边区域的装置（1）。该装置包括用于在其边缘保持和旋转晶片状物品的保持装置（20,50），第一液体处理单元 30），用于向周边区域供应液体;以及第二液体处理单元（60），用于向周边区域供应液体。保持装置包括用于在其边缘处驱动晶片状物品的辊（23,53）。第一液体处理单元包括用于提供第一液体以润湿周边区域的第一部分的第一液体载体，用于向第一液体载体供应液体的第一液体供给喷嘴和用于从第一液体载体中除去液体的第一液体排出通道第一液载体。第二液体处理单元包括用于提供第二液体以润湿周边区域的第二部分的第二液体载体，用于向第二液体载体供应液体的第二液体供应喷嘴，用于从第二液体载体中除去液体的第二液体排出通道第二液体载体和第二气体处理部，其具有用于向周边区域供应气体的气体供给喷嘴，所述气体供给喷嘴已经用用于从周边区域除去大部分第二液体的第二液体处理，并且具有气体排出通道排出气体并除去液体。此外，公开了一种相关联的方法。

2. 发明申请

WO2006027332A1 METHOD FOR SELECTIVE ETCHING 审中-公开
标题翻译：选择性蚀刻的方法
公开(公告)号：WO2006027332A1
公开(公告)日：2006-03-16
申请号：PCT/EP2005/054291
申请日：2005-09-01
申请人： SEZ AG , WAGNER, Gerald
发明人： WAGNER, Gerald
IPC分类号： H01L21/306 , C09K13/08
CPC分类号： H01L21/30604 , C09K13/08
摘要： Disclosed is a method of selective etching a first material on a substrate with a high selectivity towards a second material by flowing a liquid etchant across a substrate surface at a flow sufficient fast to generate a minimum mean velocity v parallel to the substrate's surface, wherein said first material is selected from a group comprising materials with semiconducting properties based on at least two different chemical elements.
摘要翻译：公开了一种通过以足以快速产生平行于衬底表面的最小平均速度v的流动使液体蚀刻剂流过衬底表面，以对第二材料具有高选择性来选择性蚀刻衬底上的第一材料的方法，其中所述第一材料选自包含基于至少两种不同化学元素的具有半导体性质的材料的组。

3. 发明申请

WO2005078783A1 METHOD FOR SELECTIVE ETCHING 审中-公开
标题翻译：选择性蚀刻的方法
公开(公告)号：WO2005078783A1
公开(公告)日：2005-08-25
申请号：PCT/EP2005/050510
申请日：2005-02-07
申请人： SEZ AG , INTERUNIVERSITAIR MICRO-ELEKTRONICA CENTRUM VZW , KRAUS, Harald , CLAES, Martine
发明人： KRAUS, Harald , CLAES, Martine
IPC分类号： H01L21/311
CPC分类号： H01L21/31111 , H01L29/66477
摘要： Disclosed is a method of selective etching a first material on a substrate with a high selectivity towards a second material by flowing a liquid etchant across a substrate surface at a flow sufficient fast to generate a mininun mean velocity v parallel to the substrate's surface.
摘要翻译：公开了一种通过以足以快速产生平行于衬底表面的微小平均速度v的流动使液体蚀刻剂流过衬底表面，以高选择性对第二材料选择性蚀刻衬底上的第一材料的方法。

4. 发明申请

WO2004110657A3 UNIFORM CAVITATION FOR PARTICLE REMOVAL 审中-公开
标题翻译：用于颗粒去除的均匀孔
公开(公告)号：WO2004110657A3
公开(公告)日：2005-05-12
申请号：PCT/EP2004051020
申请日：2004-06-03
申请人： SEZ AG , FERRELL GARY W , SCHIPPER JOHN F , RATRA JAGJIT S
发明人： FERRELL GARY W , SCHIPPER JOHN F , RATRA JAGJIT S
IPC分类号： B08B3/12 , H01L21/00
CPC分类号： H01L21/67057 , B08B3/12
摘要： Systems and methods for promoting a substantially uniform cavitation field. With system (100) including a diaphragm (109) dividing a container (103), a second energy pulse corresponding to a first energy pulse arising from collapse of a cavity C is produced and is used to determine whether to adjust a corresponding transducer 121-k. In system (16), a cavity creating unit (11), including an assembly of transducers 15-i, is moveable from a test liquid to a particle removal (PR) liquid after transducer testing. In another system, a sensor plate (170) having an array of sensors 171-j provides a virtual wafer. A substantially uniform field of cavitation may be maintained by a cavity enhancement liquid, or adjustment of transducer energy. Mechanisms of holding an object produce substantially uniform cavitation. Opposed transducers in a container having monotonically decreasing and/or increasing cavitation density produce substantially uniform cavitation density.
摘要翻译：用于促进基本均匀的空化场的系统和方法。对于包括分隔容器（103）的隔膜（109）的系统（100），产生对应于由空腔C的塌陷引起的第一能量脉冲的第二能量脉冲，并用于确定是否调整相应的换能器121- ķ。在系统（16）中，包括换能器15-i的组件的空腔产生单元（11）在换能器测试之后可从测试液体移动到颗粒去除（PR）液体。在另一系统中，具有传感器171-j阵列的传感器板（170）提供虚拟晶片。可以通过空腔增强液体或换能器能量的调节来维持基本均匀的空化场。保持物体的机理产生基本均匀的气蚀。具有单调减小和/或增加的空化密度的容器中的对置换能器产生基本均匀的空化密度。

5. 发明申请

WO2004110657A2 UNIFORM CAVITATION FOR PARTICLE REMOVAL 审中-公开
标题翻译：用于颗粒去除的均匀孔
公开(公告)号：WO2004110657A2
公开(公告)日：2004-12-23
申请号：PCT/EP2004/051020
申请日：2004-06-03
申请人： SEZ AG , FERRELL, Gary W. , SCHIPPER, John F. , RATRA, Jagjit S.
发明人： FERRELL, Gary W. , SCHIPPER, John F. , RATRA, Jagjit S.
IPC分类号： B08B3/12
CPC分类号： H01L21/67057 , B08B3/12
摘要： Systems and methods for promoting a substantially uniform cavitation field. With system (100) including a diaphragm (109) dividing a container (103), a second energy pulse corresponding to a first energy pulse arising from collapse of a cavity C is produced and is used to determine whether to adjust a corresponding transducer 121-k. In system (16), a cavity creating unit (11), including an assembly of transducers 15-i, is moveable from a test liquid to a particle removal (PR) liquid after transducer testing. In another system, a sensor plate (170) having an array of sensors 171-j provides a virtual wafer. A substantially uniform field of cavitation may be maintained by a cavity enhancement liquid, or adjustment of transducer energy. Mechanisms of holding an object produce substantially uniform cavitation. Opposed transducers in a container having monotonically decreasing and/or increasing cavitation density produce substantially uniform cavitation density.
摘要翻译：用于促进基本均匀的空化场的系统和方法。对于包括分隔容器（103）的隔膜（109）的系统（100），产生对应于由空腔C的塌陷引起的第一能量脉冲的第二能量脉冲，并用于确定是否调整相应的换能器121- ķ。在系统（16）中，包括换能器15-i的组件的空腔产生单元（11）在换能器测试之后可从测试液体移动到颗粒去除（PR）液体。在另一系统中，具有传感器171-j阵列的传感器板（170）提供虚拟晶片。可以通过空腔增强液体或换能器能量的调节来维持基本均匀的空化场。保持物体的机理产生基本均匀的气蚀。具有单调减小和/或增加的空化密度的容器中的对置换能器产生基本均匀的空化密度。

6. 发明申请

WO2009027194A1 APPARATUS FOR WET TREATMENT OF PLATE-LIKE ARTICLES 审中-公开
标题翻译：用于治疗类似文章的设备
公开(公告)号：WO2009027194A1
公开(公告)日：2009-03-05
申请号：PCT/EP2008/060375
申请日：2008-08-07
申请人： SEZ AG , GIGACHER, Markus , BRUGGER, Michael
发明人： GIGACHER, Markus , BRUGGER, Michael
IPC分类号： H01L21/00 , H01L21/683
CPC分类号： H01L21/67051 , H01L21/6838
摘要： Disclosed is an apparatus for wet treatment of a plate-like article, which comprises: - a spin chuck for holding and rotating the plate-like article comprising means for holding the plate-like article at the plate-like article's edge and a gas supply means for directing gas towards the side of the plate-like article, which faces the spin chuck, wherein the gas supply means comprises a gas nozzle rotating with the spin chuck, for providing a gas cushion between the plate-like article and the spin chuck; - a fluid supply means for directing fluid onto the side of the plate-like article, which is facing the spin chuck, through a non-rotatable fluid nozzle.
摘要翻译：公开了一种用于湿式处理板状物品的设备，其包括： - 用于保持和旋转板状物品的旋转卡盘，包括用于将板状物品保持在板状物品边缘的装置和气体供应用于将气体引向朝向旋转卡盘的板状物品的侧面的装置，其中气体供应装置包括与旋转卡盘一起旋转的气体喷嘴，用于在板状物品和旋转卡盘之间提供气垫 ; - 流体供应装置，用于通过不可旋转的流体喷嘴将流体引导到面向旋转卡盘的板状物品的一侧。

7. 发明申请

WO2008138725A1 APPARATUS AND METHOD FOR ULTRASONIC WET TREATMENT OF PLATE-LIKE ARTICLES 审中-公开
标题翻译：超声波处理板状物品的装置及方法
公开(公告)号：WO2008138725A1
公开(公告)日：2008-11-20
申请号：PCT/EP2008/054974
申请日：2008-04-24
申请人： SEZ AG , OBWEGER, Rainer , LIPPERT, Alexander , SAX, Harry
发明人： OBWEGER, Rainer , LIPPERT, Alexander , SAX, Harry
IPC分类号： H01L21/00 , H01L21/683
CPC分类号： H01L21/67051 , H01L21/67057 , H01L21/67253 , H01L21/67259
摘要： Disclosed is a method and a respective apparatus for ultrasonic wet treatment of a plate-like article, which comprises: bringing a solid element, which is connected to a transducer in close proximity to a surface of a plate-like article so that a gap is formed between the solid element and the plate-like article, the gap having a distance d2 between 0.1 mm and 5 mm, dispensing liquid for filling the gap between the solid element and the plate-like article, and detecting ultrasonic waves and/or controlling the distance d2, by measuring the distance d2, comparing the measured distance with a desired distance d0 and adjusting the distance accordingly.
摘要翻译：公开了一种用于板状制品的超声湿润处理的方法和相应的装置，其包括：将固体元件连接到靠近板状制品的表面的换能器，使得间隙为形成在固体元件和板状物品之间，间隙d2为0.1mm〜5mm，分配用于填充固体元件和板状物品之间的间隙的液体，并且检测超声波和/或控制距离d2，通过测量距离d2，将测量距离与期望距离d0进行比较，并相应地调整距离。

8. 发明申请

WO2008090019A1 METHOD FOR CLEANING A SURFACE 审中-公开
标题翻译：清洁表面的方法
公开(公告)号：WO2008090019A1
公开(公告)日：2008-07-31
申请号：PCT/EP2008/050180
申请日：2008-01-09
申请人： SEZ AG , SELLMER, Reinhard
发明人： SELLMER, Reinhard
IPC分类号： B08B3/02 , H01L21/00
CPC分类号： B08B3/02 , B08B3/022 , B08B3/024 , H01L21/67051
摘要： Disclosed is a method for cleaning a surface of a plate-like article. The method comprises the steps of: treating the surface with free flow cleaning, wherein liquid is dispensed through a dispense nozzle onto the surface in a continuous liquid flow, and treating the surface with spray cleaning, wherein liquid is directed through a spray nozzle towards the surface in form of droplets. The surface is treated with a spray cleaning step before the free flow cleaning step and a spray cleaning step after the free flow cleaning step.
摘要翻译：公开了一种清洗板状物品的表面的方法。该方法包括以下步骤：用自由流动清洁处理表面，其中液体通过分配喷嘴在连续的液体流中分配到表面上，并用喷雾清洁处理表面，其中液体通过喷嘴朝向表面形式的液滴。在自由流动清洁步骤之前用喷雾清洁步骤处理表面，并且在自由流动清洁步骤之后进行喷雾清洁步骤。

9. 发明申请

WO2008071517A1 DEVICE AND METHOD FOR WET TREATING PLATE-LIKE-ARTICLES 审中-公开
标题翻译：用于湿处理板状物品的装置和方法
公开(公告)号：WO2008071517A1
公开(公告)日：2008-06-19
申请号：PCT/EP2007/062489
申请日：2007-11-19
申请人： SEZ AG , BRUGGER, Michael , SCHWARZFURTNER, Alexander
发明人： BRUGGER, Michael , SCHWARZFURTNER, Alexander
IPC分类号： H01L21/00 , H01L21/687 , H01L21/683 , G03F7/16
CPC分类号： H01L21/68735 , G03F7/162 , H01L21/67023 , H01L21/6704 , H01L21/67051 , H01L21/67063 , H01L21/67075 , H01L21/6708 , H01L21/6715
摘要： Disclosed is a device for wet treatment of plate-like articles comprising, a chuck for holding a single plate-like article comprising an upwardly facing surface for receiving liquid running off a plate-like article when being treated with liquid, wherein the chuck is outwardly bordered by a circumferential annular lip, wherein the chuck has an outer diameter greater than the greatest diameter of the plate-like article to be treated, and a rotatable part with an upwardly facing ring-shaped surface for receiving liquid running off the circumferential lip of the chuck, the rotatable part is rotatable with respect to the chuck, the ring-shaped surface is coaxially arranged with respect to the circumferential annular lip, the inner diameter of the ring-shaped surface is smaller than the outer diameter of the chuck, and the distance d between the lip and the upwardly facing ring-shaped surface is in a range from 0.1 mm to 5 mm. Further disclosed is an associated method.
摘要翻译：公开了一种用于湿式处理板状制品的装置，包括：用于保持单个板状制品的卡盘，所述卡盘用于当用液体处理时包括向上表面用于接收从板状物品流出的液体，其中卡盘向外由周向环形凸缘界定，其中卡盘的外径大于待处理的板状制品的最大直径，以及具有朝上的环形表面的可旋转部分，用于接收从外周唇缘流出的液体卡盘，可旋转部分可相对于卡盘旋转，环形表面相对于周向环形唇缘同轴布置，环形表面的内径小于卡盘的外径，并且唇缘和向上的环形表面之间的距离d在0.1mm至5mm的范围内。进一步公开的是相关联的方法。

10. 发明申请

WO2007099021A1 DEVICE AND METHOD FOR LIQUID TREATING DISC-LIKE ARTICLES 审中-公开
标题翻译：用于液体处理类似物品的装置和方法
公开(公告)号：WO2007099021A1
公开(公告)日：2007-09-07
申请号：PCT/EP2007/051174
申请日：2007-02-07
申请人： SEZ AG , PASSEGGER, Thomas
发明人： PASSEGGER, Thomas
IPC分类号： H01L21/00
CPC分类号： H01L21/67034 , H01L21/67028
摘要： Herein disclosed is a device and a method for liquid treatment of a disc-like article comprising rotating a disc-like article, dispensing liquid onto the disc-like article when rotated, collecting liquid, which is flung off the disc-like article when rotated, providing a plate arranged parallel to the disc-like article and facing the disc-like article when rotated, and directing gas parallel to the plate across the plate.
摘要翻译：本文公开了一种用于液体处理盘状物品的装置和方法，包括旋转盘状物品，旋转时将液体分配到盘状物品上，收集液体，当旋转时将其从盘状物品上甩掉提供平行于盘状制品布置并在旋转时面向盘状物品的板，并将平行于板的气体引导穿过板。

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