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    • 1. 发明申请
    • SUPPORT FOR A COMPONENT OF AN OPTICAL DEVICE
    • 支持光学设备的组件
    • WO2008119386A1
    • 2008-10-09
    • PCT/EP2007/053126
    • 2007-03-30
    • Carl Zeiss SMT AGBISCHOFF, ThomasFEUCHT, JoachimWIELAND, Jochen
    • BISCHOFF, ThomasFEUCHT, JoachimWIELAND, Jochen
    • G02B7/00G03F7/20
    • G03F7/7015G02B7/025G03F7/70141G03F7/70258G03F7/70825
    • There is provided an arrangement for an optical device comprising a component of said optical device and a support structure supporting said component. The support structure comprises at least one locking device (113), the at least one locking device being connected to the component and comprising a first fixation (113-1) device and an associated second fixation device (113-2). The first fixation device and the second fixation device are adapted to be, in a movable state, movable with respect to each other along a first degree of freedom and a second degree of freedom into a final position. The first fixation device and the second fixation device are further adapted to be, in a locked state, fixed in the final position by at least one locking means contacting the first fixation device and the second fixation device. In the movable state, the first fixation device and the second fixation device are movable, up to the final position, in a manner free from a mutual pre-stress resulting from a restoring force exerted by at least a part of one of the first fixation device and the second fixation device.
    • 提供了一种用于包括所述光学装置的部件和支撑所述部件的支撑结构的光学装置的装置。 所述支撑结构包括至少一个锁定装置(113),所述至少一个锁定装置连接到所述部件并且包括第一固定装置(113-1)和相关联的第二固定装置(113-2)。 第一固定装置和第二固定装置适于处于可移动状态,其可以相对于彼此沿着第一自由度和第二自由度移动到最终位置。 第一固定装置和第二固定装置进一步适于处于锁定状态,通过接触第一固定装置和第二固定装置的至少一个锁定装置固定在最终位置。 在可动状态下,第一固定装置和第二固定装置可以以不受由第一固定件中的一个的至少一部分施加的恢复力产生的相互预应力的方式移动到最终位置 装置和第二固定装置。