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    • 5. 发明申请
    • ON SILICON INTERCONNECT CAPACITANCE EXTRACTION
    • 硅互连电容提取
    • WO2006067733A1
    • 2006-06-29
    • PCT/IB2005/054320
    • 2005-12-19
    • KONINKLIJKE PHILIPS ELECTRONICS N.V.THEENDAKARA, PraveenPELGROM, MarcelWIELING, Jean, G.VEENDRICK, Hendricus, J., M.
    • THEENDAKARA, PraveenPELGROM, MarcelWIELING, Jean, G.VEENDRICK, Hendricus, J., M.
    • G01R27/26G01R31/30
    • G01R31/2853G01R27/2605
    • The present invention relates to a on-chip circuit for on silicon interconnect capacitance (Cx) extraction that is self compensated for process variations in the integrated transistors. The circuit (10) comprises signal generation means (20) for generating a periodical pulse signal connected to first and to second signal delaying means (31, 32) for respective delaying said pulse signal, wherein said second signal delaying means (32) are configured to have a delay affected by said interconnect capacitance (Cx); a logical XOR gate (35) for connecting respective first and said second delay signals of said respective first and second delay means (31, 32), said logical XOR gate (35) being connected to signal integrating means (40); and said signal integrating means (40) being connected to analog to digital converting means (50). Whilst the error in conventional uncompensated systems, like delay line only, the error can be up to 30%, in the circuit according to the invention, the error due to process variations in the front-end is about 2%. Further, an output is provided in a digital format and thus, can be measured quickly with simple external hardware. Furthermore, the pulse signal frequency can be used as a monitor to measure process variations in the front-end. Moreover, since the circuit (10) is remarkably accurate and very easy to measure, it is the best choice as a process monitor for every chip fabricated in the future.
    • 本发明涉及用于硅互连电容(Cx)提取的片上电路,其被自身补偿以用于集成晶体管中的工艺变化。 电路(10)包括信号产生装置(20),用于产生连接到第一和第二信号延迟装置(31,32)的周期性脉冲信号,用于各自延迟所述脉冲信号,其中所述第二信号延迟装置(32)被配置 具有由所述互连电容(Cx)影响的延迟; 用于连接所述各个第一和第二延迟装置(31,32)的相应第一和第二延迟信号的逻辑异或门(35),所述逻辑异或门(35)连接到信号积分装置(40); 并且所述信号积分装置(40)连接到模数转换装置(50)。 虽然传统的无补偿系统中的误差,如延迟线,误差可高达30%,但在根据本发明的电路中,由于前端处理变化引起的误差约为2%。 此外,以数字格式提供输出,因此可以用简单的外部硬件快速测量。 此外,脉冲信号频率可以用作监视器来测量前端的过程变化。 此外,由于电路(10)非常精确且非常容易测量,因此作为未来制造的每个芯片的过程监视器是最佳选择。
    • 7. 发明申请
    • CONTROLLABLE DELAY CIRCUIT FOR DELAYING AN ELECTRIC SIGNAL
    • 用于延迟电信号的可控延迟电路
    • WO2002099970A1
    • 2002-12-12
    • PCT/IB2002/002039
    • 2002-06-04
    • KONINKLIJKE PHILIPS ELECTRONICS N.V.VAN DIJK, Victor, E., S.MEIJER, Rinze, I., M., P.VEENDRICK, Hendricus, J., M.
    • VAN DIJK, Victor, E., S.MEIJER, Rinze, I., M., P.VEENDRICK, Hendricus, J., M.
    • H03K5/13
    • H03K5/131H03K5/15013
    • The invention relates to a controllable delay circuit (2) for delaying an electrical input signal (4) wherein the controllable delay circuit (2) is arranged for receiving an input signal (4) and at least one control signal (6), wherein, in use, the delay circuit (2) delays the input signal (4) by a delay for generating an output signal (8), wherein the delay is a function of the at least one control signal (6), wherein the delay circuit (2) comprises a first module (10) for generating a base signal (11) and at least one support signal (12) on the basis of the input signal (4) and the at least one control signal (6), wherein, in use, the phase and/or the amplitude of the at least one support signal (12) is controllable with respect to the phase and /or the amplitude of the base-signal (11) by means of the at least one control signal (6), wherein the delay circuit (2) also comprises a second module (14) connected to the first module (10), which second module (14) comprises a signal-conductor (16) and at least one support conductor (18), wherein the signal conductor (16) and the at least one support conductor extend (18), at least over a part of the conductors, essentially parallel to one another in one another's vicinity, wherein, in use, the first module (10) supplies the base signal (11) to a first end of the signal conductor (16) for generating an output-signal (8) at a second end of the signal conductor (16), and wherein, in use, the first module (10) supplies the at least one support signal (12) to the at least one support conductor (18).
    • 本发明涉及用于延迟电输入信号(4)的可控延迟电路(2),其中可控延迟电路(2)被布置用于接收输入信号(4)和至少一个控制信号(6),其中, 在使用中,延迟电路(2)延迟输入信号(4)以产生输出信号(8),其中延迟是至少一个控制信号(6)的函数,其中延迟电路 2)包括用于基于输入信号(4)和至少一个控制信号(6)产生基本信号(11)和至少一个支持信号(12)的第一模块(10),其中,在 使用时,所述至少一个支持信号(12)的相位和/或振幅可通过所述至少一个控制信号(6)相对于所述基本信号(11)的相位和/或振幅来控制 ),其中所述延迟电路(2)还包括连接到所述第一模块(10)的第二模块(14),所述第二模块(14)包括信号导管 (16)和至少一个支撑导体(18),其中所述信号导体(16)和所述至少一个支撑导体延伸(18)至少在所述导体的一部分上,彼此基本上彼此平行 其中,在使用中,所述第一模块(10)将所述基本信号(11)提供给所述信号导体(16)的第一端,用于在所述信号导体(16)的第二端产生输出信号(8) ),并且其中在使用中,所述第一模块(10)将所述至少一个支撑信号(12)提供给所述至少一个支撑导体(18)。