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    • 2. 发明申请
    • AN ELECTRICAL ELEMENT COMPRISING A MULTILAYER THIN FILM CERAMIC MEMBER, AN ELECTRICAL COMPONENT COMPRISING THE SAME, AND USES THEREOF
    • WO2019215436A1
    • 2019-11-14
    • PCT/GB2019/051255
    • 2019-05-07
    • XAAR TECHNOLOGY LIMITEDMARDILOVICH, PeterKO, Song WonTROLIER-MCKINSTRY, SusanFRAGKIADAKIS, CharalamposZHU, Wanlin
    • MARDILOVICH, PeterKO, Song WonTROLIER-MCKINSTRY, SusanFRAGKIADAKIS, CharalamposZHU, Wanlin
    • H01L41/187
    • The present invention relates to an electrical element comprising a multilayer thin film ceramic member which is a dielectric exhibiting piezoelectric/electrostrictive properties which make it suitable for use in microelectromechanical systems. In one aspect, the present invention provides an electrical element for use in microelectromechanical systems comprising: i) a thin film ceramic member formed of a plurality of layers of ceramic material having a major proportion of a perovskite (ABX 3 ) phase, said thin film ceramic member having a first side and an opposing second side spaced apart in a thickness direction; ii) first and second electrodes disposed adjacent to the thin film ceramic member, wherein, relative to each other, one of the first or second electrodes is a higher potential electrode and the other one of the first and second electrodes is a lower potential electrode, such that a potential difference may be established between the first and second electrodes and through the thin film ceramic member during operation; wherein the thin film ceramic member comprises: a first layer of ceramic material doped with: I) one or more transition metal ions capable of Jahn-Teller distortion of the perovskite crystal structure of the ceramic material and/or II) one or more non-transition metal ions which have a lower oxidation state and/or one or more transition metal ions which preferentially undergo reduction, compared to the B-site cation of the perovskite crystal structure of the ceramic material; and a second layer of ceramic material not doped with any of the one or more metal ions as defined for the first layer of ceramic material; and wherein said first layer of ceramic material is located, over the thickness of the thin film ceramic member, so as to be: a) in contact with both of the first and second electrodes, wherein the first and second electrodes are both disposed adjacent to one of the first or second sides of the thin film ceramic member; or b) in contact with the one of the first or second electrodes which is the lower potential electrode, wherein first and second electrodes are interposed by the thin film ceramic member.