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1. 发明申请

WO2007146279A3 LOW VOLTAGE MICROCAVITY PLASMA DEVICE AND ADDRESSABLE ARRAYS 审中-公开
公开(公告)号：WO2007146279A3
公开(公告)日：2007-12-21
申请号：PCT/US2007/013765
申请日：2007-06-12
申请人： THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS , EDEN, J., Gary , PARK, Sung-Jin , TCHERTCHIAN, Paul, A. , SUNG, Seung, Hoon
发明人： EDEN, J., Gary , PARK, Sung-Jin , TCHERTCHIAN, Paul, A. , SUNG, Seung, Hoon
IPC分类号： H01J17/49 , H01J61/09
摘要： Microcavity plasma devices and arrays of microcavity plasma devices are provided that have a reduced excitation voltage. A trigger electrode (28, 28a, 28b, 35a, 35b) disposed proximate to a microcavity (12) reduces the excitation voltage required between first and second electrodes (16, 18) to ignite a plasma in the microcavity when gas(es) or vapor(s) (or combinations thereof) are contained within the microcavity. The invention also provides symmetrical microplasma devices and arrays of microcavity plasma devices for which current waveforms are the same for each half-cycle of the voltage driving waveform. Additionally, the invention also provides devices that have standoff portions and voids that can reduce cross talk. The devices are preferably also used with a trigger electrode.

2. 发明申请

WO2009055807A1 MICROCHANNEL LASER HAVING MICROPLASMA GAIN MEDIA 审中-公开
标题翻译：具有微波增益介质的MICROCHANNEL激光
公开(公告)号：WO2009055807A1
公开(公告)日：2009-04-30
申请号：PCT/US2008/081357
申请日：2008-10-27
申请人： THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS , PARK, Sung-jin , EDEN, Gary, J. , CHEN, Paoyei , TCHERTCHIAN, Paul, A. , SPINKA, Thomas, M.
发明人： PARK, Sung-jin , EDEN, Gary, J. , CHEN, Paoyei , TCHERTCHIAN, Paul, A. , SPINKA, Thomas, M.
IPC分类号： H01J43/00
CPC分类号： H01S3/05 , H01S3/03 , H01S3/063 , H01S3/09 , H01S3/0971
摘要： The invention provides microchannel lasers having a microplasma gain medium. Lasers of the invention can be formed in semiconductor materials, and can also be formed in polymer materials. In a microlaser of the invention, high density plasmas are produced in microchannels. The microplasma acts as a gain medium with the electrodes sustaining the plasma in the microchannel. Reflectors are used with the microchannel for obtaining optical feedback to obtain lasing in the microplasma gain medium in devices of the invention for a wide range of atomic and molecular species. Several atomic and molecular gain media will produce sufficiently high gain coefficients that reflectors (mirrors) are not necessary. Microlasers of the invention are based on microplasma generation in channels of various geometries. Preferred embodiment microlaser designs can be fabricated in semiconductor materials, such as Si wafers, by standard photolithographic techniques, or in polymers by replica molding.
摘要翻译：本发明提供了具有微质增益介质的微通道激光器。本发明的激光器可以形成在半导体材料中，也可以形成在聚合物材料中。在本发明的微型激光器中，在微通道中产生高密度等离子体。微量体作为增益介质，其中电极在微通道中维持等离子体。反射器与微通道一起使用以获得光学反馈，以在广泛的原子和分子物种的本发明装置中的微量级增益介质中获得激光。几个原子和分子增益介质将产生足够高的增益系数，反射器（反射镜）不是必需的。本发明的微型扫描器基于各种几何形状的通道中的微量生成。优选实施例微激光器设计可以通过标准光刻技术在半导体材料（例如Si晶片）中或通过复制成型制成聚合物。

3. 发明申请

WO2007146279A2 LOW VOLTAGE MICROCAVITY PLASMA DEVICE AND ADDRESSABLE ARRAYS 审中-公开
标题翻译：低电压微波等离子体装置和可寻址阵列
公开(公告)号：WO2007146279A2
公开(公告)日：2007-12-21
申请号：PCT/US2007013765
申请日：2007-06-12
申请人： UNIV ILLINOIS , EDEN J GARY , PARK SUNG-JIN , TCHERTCHIAN PAUL A , SUNG SEUNG HOON
发明人： EDEN J GARY , PARK SUNG-JIN , TCHERTCHIAN PAUL A , SUNG SEUNG HOON
IPC分类号： F24V30/00
CPC分类号： H01J11/12
摘要： Microcavity plasma devices and arrays of microcavity plasma devices are provided that have a reduced excitation voltage. A trigger electrode (28, 28a, 28b, 35a, 35b) disposed proximate to a microcavity (12) reduces the excitation voltage required between first and second electrodes (16, 18) to ignite a plasma in the microcavity when gas(es) or vapor(s) (or combinations thereof) are contained within the microcavity. The invention also provides symmetrical microplasma devices and arrays of microcavity plasma devices for which current waveforms are the same for each half-cycle of the voltage driving waveform. Additionally, the invention also provides devices that have standoff portions and voids that can reduce cross talk. The devices are preferably also used with a trigger electrode.
摘要翻译：提供微腔等离子体器件和微腔等离子体器件的阵列，其具有降低的激发电压。靠近微腔（12）设置的触发电极（28,28a，28b，35a，35b）降低了第一和第二电极（16,18）之间所需的激发电压，以便在气体（或）或蒸气（或其组合）包含在微腔内。本发明还提供对称的微等离子体装置和微腔等离子体装置的阵列，其电流波形在电压驱动波形的每个半周期是相同的。此外，本发明还提供了具有能够减少串扰的间隔部分和空隙的装置。这些装置优选地也与触发电极一起使用。

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