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    • 1. 发明申请
    • CROSS FLOW METALIZING OF COMPACT DISCS
    • 紧凑盘的跨流金属化
    • WO1996018755A1
    • 1996-06-20
    • PCT/US1995016109
    • 1995-12-13
    • TAPEMATIC S.P.A.SCHWARTZ, VladimirBIERWAGEN, Klaus
    • TAPEMATIC S.P.A.
    • C23C14/34
    • C23C14/568C23C14/56
    • A cross flow system for metalizing compact discs, capable of being interposed in-line in the production of the compact discs after premastering, mastering, electroforming, and molding includes a vacuum chamber having diametrically opposed vacuum locks (98, 106) and multiple metallization sources (80, 82) in the form of magnetrons, with a preferred cross flow including the introduction of a disc to be metalized through one lock (98, 106) and the exit of the metalized disc through the diametrically opposite lock (98, 106). The double lock (98, 106) diametrically opposed cross flow system eliminates the problems of throughput limitations, high rate deposition, substrate pitting, and software complexity due to indexing which makes prior systems both costly and inefficient. The system also permits processing of more than one substrate or compact disc title such that multiple titled compact discs can be processed simultaneously.
    • 用于金属化光盘的交叉流动系统,其能够在预处理,母盘制作,电铸和模制之后在制品中嵌入生产中,包括真空室,其具有直径相对的真空锁(98,106)和多个金属源 (80,82)以磁控管的形式,优选的横流包括通过一个锁(98,106)引入待金属化的盘,并通过直径相对的锁(98,106)引入金属化盘的出口, 。 双锁(98,106)直径相对的交叉流系统消除了由于索引导致的吞吐量限制,高速率沉积,基板点蚀和软件复杂性的问题,这使得现有系统成本高且效率低。 该系统还允许处理多于一个的基板或光盘标题,使得可以同时处理多个标题的光盘。