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1. 发明申请

WO1998013851A1 ION SOURCE FOR GENERATING IONS OF A GAS OR VAPOUR 审中-公开
标题翻译：用于产生气体或蒸气的离子的离子源
公开(公告)号：WO1998013851A1
公开(公告)日：1998-04-02
申请号：PCT/HU1996000054
申请日：1996-09-27
申请人： BARNA, Arpád , SZIGETHY, Dezso"e;
IPC分类号： H01J27/06
CPC分类号： H01J27/04 , H01J2237/08 , H01J2237/3114
摘要： An ion source for generating ions of a gas or vapour, especially for thinning solid state samples, comprising a housing (28), means for introducing (31) said gas or vapour into said housing (28), an anode (3) positioned within said housing (28), said anode (3) having a rotationally symmetrical cavity (21) being open at both sides along the axis (30) of the source, first and second electrooptical mirror means (1, 2; 5, 4) disposed along said axis (30) and defining therebetween a space within which said anode (3) is positioned, said first and second electrooptical mirror means (1, 2; 5, 4) creating an electrostatic field so as to cause electrons to oscillate between them, wherein at least one of said first and second electrooptical mirror means (1, 2; 5, 4) being apertured for exit therethrough of a fraction of ions generated in said space. The ion source further comprises means for generating electrons (12) disposed at one of said sides of said cavity (21) and positioned outside said space, and means for causing said generated electrons to move into said cavity (21).
摘要翻译：用于产生气体或蒸汽离子的离子源，特别是用于稀释固体样品的离子源，包括壳体（28），用于将所述气体或蒸汽引入（31）到所述壳体（28）中的装置，阳极（3）所述壳体（28），所述阳极（3）具有旋转对称的空腔（21），沿着所述源极的轴线（30）在两侧敞开，所述第一和第二电光镜装置（1,2; 5,4）沿着所述轴线（30）并且在其间限定所述阳极（3）所在的空间，所述第一和第二电光镜装置（1,2; 5,4）产生静电场，以使电子在它们之间振荡，其中所述第一和第二电光镜装置（1,2; 5,4）中的至少一个用于在所述空间中产生的一部分离子穿过其中。离子源还包括用于产生设置在所述空腔（21）的所述侧面之一并且位于所述空间外部的电子（12）的装置，以及用于使所述产生的电子移动到所述空腔（21）中的装置。

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