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    • 1. 发明申请
    • THIN FILM DEVICE HAVING COATING FILM, LIQUID CRYSTAL PANEL, ELECTRONIC APPARATUS AND METHOD OF MANUFACTURING THE THIN FILM DEVICE
    • 具有涂膜,薄膜晶体管,电子设备的薄膜装置和制造薄膜装置的方法
    • WO1997043689A1
    • 1997-11-20
    • PCT/JP1997001618
    • 1997-05-14
    • SEIKO EPSON CORPORATIONYUDASAKA, IchioSHIMODA, TatsuyaKANBE, SadaoMIYAZAWA, Wakao
    • SEIKO EPSON CORPORATION
    • G02F01/136
    • G02F1/136227H01L27/12H01L27/1285H01L27/1292H01L29/66757H01L29/66765Y10T428/1064Y10T428/31663
    • Liquid is applied and subjected to a heat treatment to form one thin film among an insulating thin film, a silicon thin film and a conductive thin film constituting a TFT. A substrate is spin-coated with the liquid which contains a thin film component and is supplied from the coating liquid storing part (105) of a spin-coater (102). The substrate to which the coating liquid is applied is subjected to a heat treatment by a heat treatment unit (103) to form a coating film on the substrate. If, further, the coating film is subjected to laser annealing, etc., one of the film qualities, crystallinity, denseness and adhesion is improved. If the coating liquid or resist is applied by an ink-jet method, the utilization efficiency of coating liquid can be improved and, further, a patterned coating film can be formed. A thin film device which is low in cost and has a high throughput can be obtained. By manufacturing TFTs with a manufacturing apparatus having the high utilization efficiency of the coating liquid, the initial investment and the cost of a liquid crystal display are significantly reduced.
    • 施加液体并进行热处理以在构成TFT的绝缘薄膜,硅薄膜和导电薄膜中形成一个薄膜。 用包含薄膜成分的液体旋涂基材,并从旋转涂布机(102)的涂液储存部(105)供给基材。 涂布涂布液的基板通过热处理单元(103)进行热处理,以在基板上形成涂膜。 此外,如果涂膜经受激光退火等,则膜质量,结晶度,致密性和粘附性之一得到改善。 如果通过喷墨法涂布涂布液或抗蚀剂,则可以提高涂布液的利用效率,并且还可以形成图案化的涂膜。 可以获得成本低且吞吐量高的薄膜器件。 通过制造具有涂布液利用率高的制造装置的TFT,液晶显示器的初始投入和成本显着降低。
    • 5. 发明申请
    • SUPERCONDUCTIVE ELEMENT
    • 超级元素
    • WO1993010565A1
    • 1993-05-27
    • PCT/JP1992001484
    • 1992-11-13
    • SEIKO EPSON CORPORATIONKAMIKAWA, TaketomiNATORI, EijiIWASHITA, SetsuyaSHIMODA, Tatsuya
    • SEIKO EPSON CORPORATION
    • H01L39/22
    • H01L39/146H01L39/16
    • A superconductive element provided with a first and a second superconductive electrode, and a connector which is made of a superconductive material and which is for connecting the first and second superconductive electrodes. The superconductive element is a two-terminal or a three-terminal superconductive element using the connector which is in a weaker superconductive state than that of the first and second superconductive electrodes or is in a normal conductive state close to the superconductive state. As a means for bringing the connector to the foregoing state, utilized are the differences of the connector and the first and second superconductive electrodes in critical current, in critical temperature, in pair potential, or in carrier density. Thus the restrictions on pattern rules are small and its manufacturing is easy. In cases of a three-terminal superconductive element, its switching characteristic can be improved too.
    • 设置有第一和第二超导电极的超导元件和由超导材料制成并且用于连接第一和第二超导电极的连接器。 超导元件是使用连接器的二端子或三端子超导元件,其处于比第一和第二超导电极的超导状态更弱的超导状态,或处于接近超导状态的正常导通状态。 作为使连接器达到上述状态的手段,利用了临界电流,临界温度,成对电位或载流子密度中的连接器和第一和第二超导电极的差异。 因此,对图案规则的限制很小,制造容易。 在三端子超导元件的情况下,也可以提高其开关特性。
    • 8. 发明申请
    • MULTIPLE-WAVELENGTH LIGHT EMITTING DEVICE
    • 多波长发光装置
    • WO0115246A3
    • 2001-09-20
    • PCT/GB0003121
    • 2000-08-14
    • SEIKO EPSON CORPCAMBRIDGE DISPLAY TECHSHIMODA TATSUYAKOYAMA TOMOKOKANEKO TAKEOBURROUGHES JEREMY HENRY
    • SHIMODA TATSUYAKOYAMA TOMOKOKANEKO TAKEOBURROUGHES JEREMY HENRY
    • G02B5/20G02B5/26G02B5/28H01L51/50H01L51/52H05B33/02H05B33/12H05B33/24H05B33/26H01L51/20H01L33/00H05B33/22
    • H01L51/5036H01L27/3211H01L51/5265
    • An efficient multiple-wavelength light emitting device is provided. This multiple-wavelength light emitting device comprises a light emitting layer (4) for emitting light containing wavelength components to be output, a negative electrode (5) that is positioned at the back surface of the light emitting layer and that transmits at least a portion of the light, reflecting layers (7R, 7G, and 7B), positioned at the back surface of the negative electrode, for reflecting, of the light emitted through the negative electrode to the back surface, light having specific wavelengths, which reflecting layers are stacked up in order perpendicularly to the light axis, in correspondence with the wavelengths of the light to be reflected, thus configuring a reflecting layer group (7). In the direction perpendicular to the light axis, divisions are made in any of at least two or more light emission regions which reflect light of different wavelengths. In each light emission region, the distance between the reflecting surface of the reflecting layer (7) on the semi-transparent side and the reflecting surface in the semi-reflecting layer (2) is adjusted in this configuration so that it becomes a resonating optical path length for the light that is emitted in the light emission region.
    • 提供了一种有效的多波长发光器件。 该多波长发光器件包括用于发射包含要输出的波长成分的光的发光层(4),位于发光层的背面的负极(5),并且透射至少一部分 位于负极的背面的光反射层(7R,7G和7B),用于将通过负极发射的光反射到具有特定波长的光,该反射层为 按照与被反射的光的波长对应的方式垂直于光轴叠加,从而构成反射层组(7)。 在垂直于光轴的方向上,在反射不同波长的光的至少两个或更多个发光区域中的任何一个中进行分割。 在每个发光区域中,在半透明侧的反射层(7)的反射面与半反射层(2)的反射面之间的距离被调整为这样的结构,使其成为谐振光学 在发光区域中发射的光的路径长度。