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    • 10. 发明申请
    • IMPROVED ADHESION OF MEMBRANES ON NITRIDE LAYER IN ELECTROCHEMICAL SENSORS BY ATTACHMENT TO UNDERLYING OXIDE LAYER
    • 通过连接到氧化物层,改善电化学传感器中氮化物膜上的膜的粘附
    • WO2007053750A1
    • 2007-05-10
    • PCT/US2006/042809
    • 2006-11-01
    • SENSICORE, INC.MARTIN, Glenn, B.DIPIAZZA, Frank
    • MARTIN, Glenn, B.DIPIAZZA, Frank
    • G01N27/333
    • G01N27/333
    • An electrochemical sensor is provided that exhibits improved adhesion of the membrane to the nitride layer used as an insulating layer in silicon- or silicon-oxide-based electrochemical sensing devices. The sensing devices include a substrate, an oxide disposed on the substrate, a nitride disposed on the oxide, an electrically conductive structure disposed on the oxide layer, and an electrode disposed on the oxide layer and electrically coupled to the electrically conductive structure. At least one opening is formed in the nitride layer to form at least one adhesion trench that exposes a surface region of an oxide layer underlying the nitride layer. The membrane covers the electrode, and contacts the oxide surface regions exposed by the adhesion trenches. The contact between the membrane and the oxide surface region provides for improved adhesion of the membrane to the electrochemical sensing device.
    • 提供了一种电化学传感器,其在基于硅或氧化硅的电化学感测装置中表现出改善的粘附到用作绝缘层的氮化物层的膜。 感测装置包括衬底,设置在衬底上的氧化物,设置在氧化物上的氮化物,设置在氧化物层上的导电结构,以及设置在氧化物层上并电耦合到导电结构的电极。 在氮化物层中形成至少一个开口以形成暴露氮化物层下面的氧化物层的表面区域的至少一个粘合沟槽。 膜覆盖电极,并接触由粘附沟槽暴露的氧化物表面区域。 膜和氧化物表面区域之间的接触提供了改进的膜与电化学感测装置的粘合性。