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1. 发明申请

WO2016113707A1 A DEVICE INTRINSICALLY DESIGNED TO RESONATE, SUITABLE FOR RF POWER TRANSFER AS WELL AS GROUP INCLUDING SUCH DEVICE AND USABLE FOR THE PRODUCTION OF PLASMA 审中-公开
标题翻译：专用于专门设计用于RF功率传输的设备，包括这样的设备，并且可用于生产等离子体
公开(公告)号：WO2016113707A1
公开(公告)日：2016-07-21
申请号：PCT/IB2016/050199
申请日：2016-01-15
申请人： SELMO, Antonio Franco , PAVARIN, Daniele , TREZZOLANI, Fabio , MANENTE, Marco
发明人： SELMO, Antonio Franco
IPC分类号： H01J37/32
CPC分类号： H01J37/3211 , H01J37/32174 , H01J37/32183
摘要： The present invention regards a device intrinsically designed to resonate (2), suitable for RF power transfer, particularly usable for the production of plasma and electrically connectable downstream of a radio frequency power supply (3) with fixed or variable frequency, comprising at least one inductive element (Lp), which can be powered, during use, by such at least one power supply (3); at least one capacitive element (Cp) electrically connected at the terminals of such at least one inductive element (Lp); such at least one device (2) having a resonance angular frequency equal to: ωο = 1/ √ LpCp The capacitive element (Cp) and the inductive element (Lp) have values such that, at resonance state, they provide an equivalent impedance, measured at the terminals of such device (2), substantially of resistive type and much greater than the value of the parasitic impedance upstream of such terminals of such device (2), such that the effect of such parasitic impedance is, during use, substantially negligible.
摘要翻译：本发明涉及一种固有地设计为谐振（2）适于射频功率传输的装置，特别是可用于制造具有固定频率或可变频率的射频电源（3）的等离子体和可电连接的下游，该装置包括至少一个电感元件（Lp），其在使用期间由所述至少一个电源（3）供电; 在所述至少一个感应元件（Lp）的端子处电连接的至少一个电容元件（Cp）; 这样的至少一个具有等于ωo= 1 / LpCp的谐振角频率的装置（2）。电容元件（Cp）和电感元件（Lp）具有这样的值，使得在共振状态下，它们提供等效阻抗，在这种装置（2）的端子处测量，基本上是电阻型并且远大于这种装置（2）的这种端子上游的寄生阻抗的值，使得这种寄生阻抗的作用在使用期间基本上微不足道。

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