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1. 发明申请

WO2010085743A3 PROTECTED RESONATOR 审中-公开
公开(公告)号：WO2010085743A3
公开(公告)日：2010-07-29
申请号：PCT/US2010/021975
申请日：2010-01-25
申请人： CYMATICS LABORATORIES CORPORATION , SINHA, Rajarishi , CARLEY, L., Richard , CHOMAS, Louis , SAFAR, Hugo
发明人： SINHA, Rajarishi , CARLEY, L., Richard , CHOMAS, Louis , SAFAR, Hugo
IPC分类号： H03H9/15
摘要： A bulk acoustic wave resonator structure (52) that isolates the core resonator (42) from both environmental effects and aging effects. The structure has a piezoelectric layer (16) at least partially disposed between two electrodes (14, 18). The structure is protected against contamination, package leaks, and changes to the piezoelectric material (16) due to external effects while still providing inertial resistance. The structure has one or more protective elements that limit aging effects to at or below a specified threshold. The resonator behavior is stabilized across the entire bandwidth of the resonance, not just at the series resonance. Examples of protective elements include a collar (44) of material around the core resonator so that perimeter and edge-related environmental and aging phenomena are kept away from the core resonator, a Bragg reflector (34, 48) formed above or below the piezoelectric layer and a cap (60) formed over the piezoelectric layer.

2. 发明申请

WO2009079017A1 INTEGRATED ACOUSTIC BANDGAP DEVICES FOR ENERGY CONFINEMENT AND METHODS OF FABRICATING SAME 审中-公开
标题翻译：用于能量约束的集成声学带状装置及其制造方法
公开(公告)号：WO2009079017A1
公开(公告)日：2009-06-25
申请号：PCT/US2008/013921
申请日：2008-12-17
申请人： RENAISSANCE WIRELESS CORP. , SINHA, Rajarishi , GAMMEL, Peter, Ledel , MASTRAPASQUA, Marco , SAFAR, Hugo
发明人： SINHA, Rajarishi , GAMMEL, Peter, Ledel , MASTRAPASQUA, Marco , SAFAR, Hugo
IPC分类号： H03H9/05 , H03H9/17
CPC分类号： H01L27/02 , H03H9/0557 , H03H9/175 , H03H9/564 , H03H9/589
摘要： The present invention is directed to monolithic integrated circuits (300) incorporating an oscillator element (302) that is particularly suited for use in timing applications. The oscillator element (302) includes a resonator element (308) having a piezoelectric material (312) disposed between a pair of electrodes (314a, 314b). The oscillator element also includes an acoustic confinement structure (310) that may be disposed on either side of the resonator element (308). The acoustic confinement element (310) includes alternating sets of low (322) and high (320) acoustic impedance materials. A temperature compensation layer (316) may be disposed between the piezoelectric material (312) and at least one of the electrodes (314a, 314b). The oscillator element (302) is monolithically integrated with an integrated circuit element (300) through an interconnection (306). The oscillator element (302) and the integrated circuit element (300) may be fabricated sequentially or concurrently.
摘要翻译：本发明涉及包含特别适用于定时应用的振荡器元件（302）的单片集成电路（300）。振荡器元件（302）包括具有设置在一对电极（314a，314b）之间的压电材料（312）的谐振元件（308）。振荡器元件还包括可以设置在谐振器元件（308）的任一侧的声学限制结构（310）。声限制元件（310）包括低（322）和高（320）声阻抗材料的交替组合。温度补偿层（316）可以设置在压电材料（312）和至少一个电极（314a，314b）之间。振荡器元件（302）通过互连（306）与集成电路元件（300）单片集成。振荡器元件（302）和集成电路元件（300）可以顺序或同时地制造。

3. 发明申请

WO2010085743A2 PROTECTED RESONATOR 审中-公开
标题翻译：保护谐振器
公开(公告)号：WO2010085743A2
公开(公告)日：2010-07-29
申请号：PCT/US2010021975
申请日：2010-01-25
申请人： CYMATICS LAB CORP , SINHA RAJARISHI , CARLEY L RICHARD , CHOMAS LOUIS , SAFAR HUGO
发明人： SINHA RAJARISHI , CARLEY L RICHARD , CHOMAS LOUIS , SAFAR HUGO
IPC分类号： H03H9/15
CPC分类号： H01L41/0533 , H03H9/02086 , H03H9/02102 , H03H9/02133 , H03H9/02149 , H03H9/0557 , H03H9/1007 , H03H9/105 , H03H9/175
摘要： A bulk acoustic wave resonator structure (52) that isolates the core resonator (42) from both environmental effects and aging effects. The structure has a piezoelectric layer (16) at least partially disposed between two electrodes (14, 18). The structure is protected against contamination, package leaks, and changes to the piezoelectric material (16) due to external effects while still providing inertial resistance. The structure has one or more protective elements that limit aging effects to at or below a specified threshold. The resonator behavior is stabilized across the entire bandwidth of the resonance, not just at the series resonance. Examples of protective elements include a collar (44) of material around the core resonator so that perimeter and edge-related environmental and aging phenomena are kept away from the core resonator, a Bragg reflector (34, 48) formed above or below the piezoelectric layer and a cap (60) formed over the piezoelectric layer.
摘要翻译：一种将核心谐振器（42）与环境效应和老化效应隔离的体声波谐振器结构（52）。该结构具有至少部分地设置在两个电极（14,18）之间的压电层（16）。该结构被保护以防止污染，封装泄漏以及由于外部效应而在压力材料（16）的同时仍然提供惯性阻力的变化。该结构具有一个或多个将老化效应限制在等于或低于特定阈值的保护元件。谐振器的行为在谐振的整个带宽上是稳定的，而不仅仅是串联谐振。保护元件的示例包括围绕芯谐振器的材料的环（44），使得周边和边缘相关的环境和老化现象远离芯谐振器，形成在压电层上方或下方的布拉格反射器（34,48）以及形成在所述压电层上的盖（60）。

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