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    • 2. 发明申请
    • MEASURING AIR QUALITY USING A MICRO-OPTICAL MECHANICAL GAS SENSOR
    • 使用微光机械气体传感器测量空气质量
    • WO2008118440A1
    • 2008-10-02
    • PCT/US2008/003916
    • 2008-03-26
    • KING, Robert, A.RUDA, Harry, E.FERNANDES, Carlos
    • RUDA, Harry, E.FERNANDES, Carlos
    • G01N33/00
    • G01N21/67F24F11/30F24F2110/50G01N1/2273G01N33/0004G01N2021/0346H05H1/0037
    • A system and method for measuring air quality using a micro-optical mechanical gas sensor is disclosed. The system includes an emission source that includes a conduit gap for receiving a gas; a plurality of electrodes for applying an electric field to at least a portion of the conduit gap, the application of the electric field creating a plasma in the conduit gap; and a detector that detects an emission from the plasma. The method includes the steps of (1) placing a chip containing an emission source and a detector in a gas flow; (2) applying an electric field to at least a portion of a conduit gap within the emission source, the electric field creating a plasma; (3) detecting an emission from the plasma; and (4) processing data related to the detected emission to determine at least one constituent of the gas flow.
    • 公开了一种使用微光学机械气体传感器测量空气质量的系统和方法。 该系统包括排放源,其包括用于接收气体的导管间隙; 用于向导管间隙的至少一部分施加电场的多个电极,施加在导管间隙中产生等离子体的电场; 以及检测来自等离子体的发射的检测器。 该方法包括以下步骤:(1)将含有发射源和检测器的芯片放置在气流中; (2)向发射源内的导管间隙的至少一部分施加电场,产生等离子体的电场; (3)检测等离子体的发射; 和(4)处理与检测到的发射有关的数据,以确定气流的至少一个成分。