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    • 1. 发明申请
    • SENSOR DEVICE WITH BACKSIDE CONTACTS
    • 带背面接触的传感器装置
    • WO2007034240A3
    • 2007-11-29
    • PCT/GB2006050295
    • 2006-09-19
    • BAE SYSTEMS PLCWARSOP CLYDEPRESS ANDREW JULIANHUCKER MARTYN JOHN
    • WARSOP CLYDEPRESS ANDREW JULIANHUCKER MARTYN JOHN
    • G01P5/12G01F1/684
    • G01F1/6845G01P5/12G01P13/025
    • A sensor device for sensing air flow speed at the exterior of an aircraft, comprising a substrate having an upper side on which is mounted a diaphragm over an aperture or recess in the substrate, the diaphragm being thermally and electrically insulative, and mounting on its upper surface a heating element comprising a layer of resistive material, and wherein electrical connections to the heating element are buried in the diaphragm and/or the substrate, and provide electrical terminals at the lower side of the substrate. The heating element is exposed to the environment, but the remaining electrical parts of the device are not exposed. Portions of a conductive substrate may be cut or etched away to define a conductive pillar. Signals may be transmitted through the conductive pillar from one surface carrying the sensor element to the other surface carrying contact pads.
    • 一种用于感测飞行器外部的空气流速的传感器装置,包括:具有上侧的基板,在基板上的孔或凹部上方安装有隔膜,所述隔膜具有热和电绝缘性,并且安装在其上部 表面包括电阻材料层的加热元件,并且其中与所述加热元件的电连接被掩埋在所述隔膜和/或所述基板中,并在所述基板的下侧提供电端子。 加热元件暴露在环境中,但是该设备的其余电气部件不暴露。 可以切割或蚀刻导电基底的一部分以限定导电柱。 信号可以通过导电柱从承载传感器元件的一个表面传输到另一个承载接触垫的表面。