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1. 发明申请

WO2015034492A1 METHODS AND STRUCTURES TO PREVENT SIDEWALL DEFECTS DURING SELECTIVE EPITAXY 审中-公开
标题翻译：在选择性外延期间防止边墙缺陷的方法和结构
公开(公告)号：WO2015034492A1
公开(公告)日：2015-03-12
申请号：PCT/US2013/058084
申请日：2013-09-04
申请人： INTEL CORPORATION , MUKHERJEE, Niloy , GOEL, Niti , GARDNER, Sanaz K. , PATHI, Pragyansri , METZ, Matthew V. , DASGUPTA, Sansaptak , SUNG, Seung Hoon , POWERS, James M. , DEWEY, Gilbert , CHU-KUNG, Benjamin , KAVALIEROS, Jack T. , CHAU, Robert S.
发明人： MUKHERJEE, Niloy , GOEL, Niti , GARDNER, Sanaz K. , PATHI, Pragyansri , METZ, Matthew V. , DASGUPTA, Sansaptak , SUNG, Seung Hoon , POWERS, James M. , DEWEY, Gilbert , CHU-KUNG, Benjamin , KAVALIEROS, Jack T. , CHAU, Robert S.
IPC分类号： H01L21/20
CPC分类号： H01L21/02694 , H01L21/02381 , H01L21/02516 , H01L21/02532 , H01L21/02538 , H01L21/02609 , H01L21/02636 , H01L21/02639 , H01L21/76224 , H01L21/823814 , H01L21/823821 , H01L21/823878 , H01L21/8258 , H01L27/0924 , H01L29/045 , H01L29/0653 , H01L29/0847 , H01L29/165 , H01L29/267 , H01L29/7848
摘要： Trenches (and processes for forming the trenches) are provided that reduce or prevent crystaline defects in selective epitaxial growth of type III-V or Germanium (Ge) material (e.g., a "buffer" material) from a top surface of a substrate material. The defects may result from collision of selective epitaxial sidewall growth with oxide trench sidewalls. Such trenches include (1) a trench having sloped sidewalls at an angle of between 40 degrees and 70 degrees (e.g., such as 55degrees) with respect to a substrate surface; and/or (2) a combined trench having an upper trench over and surrounding the opening of a lower trench (e.g., the lower trench may have the sloped sidewalls, short vertical walls, or tall vertical walls). These trenches reduce or prevent defects in the epitaxial sidewall growth where the growth touches or grows against vertical sidewalls of a trench it is grown in.
摘要翻译：提供沟槽（以及用于形成沟槽的工艺），其从衬底材料的顶表面减少或防止III-V族或锗（Ge）材料（例如，“缓冲材料”）的选择性外延生长中的晶体缺陷。缺陷可能由选择性外延侧壁生长与氧化物沟槽侧壁的碰撞引起。这种沟槽包括（1）具有相对于衬底表面40度至70度（例如，55度）之间的倾斜侧壁的沟槽; 和/或（2）具有在下沟槽的开口上方并且围绕下沟槽（例如，下沟槽可以具有倾斜侧壁，短垂直壁或高垂直壁）的上沟槽的组合沟槽。这些沟槽减少或防止外延侧壁生长中的缺陷，其中生长与其生长的沟槽的垂直侧壁接触或生长。

2. 发明申请

WO2007089398A3 BRIDGE ASSEMBLED FROM OCEAN-MOBILE PONTOON MODULES 审中-公开
公开(公告)号：WO2007089398A3
公开(公告)日：2007-08-09
申请号：PCT/US2007/000486
申请日：2007-01-09
申请人： POWERS, James, M.
发明人： POWERS, James, M.
IPC分类号： E01D15/14
摘要： A bridge for long, deep water crossings is supported between spans by narrow, transverse, semi- submersible pontoons. The pontoons are oriented to present minimal cross section to tidal currents under the bridge. The pontoons are pivotally attached to the bridge allowing them to be turned a few degrees right or left as tidal currents change. During fabrication, a module of bridge deck/roadway can be assembled for transport upon each pontoon deck. After remote fabrication two or more complete bridge modules can be linked pontoon-to-pontoon into a seaworthy vessel that can be towed to the erection site. At site the roadway modules are rotated transverse to the pontoon, elevated to final position and joined to other modules, completing the bridge.

3. 发明申请

WO2007089398A9 BRIDGE ASSEMBLED FROM OCEAN-MOBILE PONTOON MODULES 审中-公开
标题翻译：从海洋移动PONTOON模块组装的桥梁
公开(公告)号：WO2007089398A9
公开(公告)日：2008-09-12
申请号：PCT/US2007000486
申请日：2007-01-09
申请人： POWERS JAMES M
发明人： POWERS JAMES M
IPC分类号： E01D15/14
CPC分类号： E01D15/14 , E01D21/08
摘要： A bridge for long, deep water crossings is supported between spans by narrow, transverse, semi- submersible pontoons. The pontoons are oriented to present minimal cross section to tidal currents under the bridge. The pontoons are pivotally attached to the bridge allowing them to be turned a few degrees right or left as tidal currents change. During fabrication, a module of bridge deck/roadway can be assembled for transport upon each pontoon deck. After remote fabrication two or more complete bridge modules can be linked pontoon-to-pontoon into a seaworthy vessel that can be towed to the erection site. At site the roadway modules are rotated transverse to the pontoon, elevated to final position and joined to other modules, completing the bridge.
摘要翻译：长跨深水交叉的桥梁由狭窄的横向半潜式浮筒支撑在跨距之间。浮桥面向桥面下的潮汐流的最小横截面。浮桥可枢转地连接到桥上，允许它们随潮汐流变化而向右或向左转动几度。在制造期间，可以组装一个桥面/道路的模块，以便在每个浮桥甲板上运输。在远程制造之后，两个或更多个完整的桥模块可以将浮桥到浮筒连接到可以拖到竖立位置的适航船。在现场，道路模块横向于浮筒旋转，升至最终位置，并连接到其他模块，完成桥梁。

4. 发明申请

WO2013101001A1 METHODS OF FORMING HETERO-LAYERS WITH REDUCED SURFACE ROUGHNESS AND BULK DEFECT DENSITY ON NON-NATIVE SURFACES AND THE STRUCTURES FORMED THEREBY 审中-公开
标题翻译：形成具有减少的表面粗糙度和非局部表面上的体积密度的异质层的方法及其形成的结构
公开(公告)号：WO2013101001A1
公开(公告)日：2013-07-04
申请号：PCT/US2011/067661
申请日：2011-12-28
申请人： INTEL CORPORATION , MUKHERJEE, Niloy , METZ, Matthew V. , POWERS, James M. , LE, Van H. , CHU-KING, Benjamin , LEMAY, Mark R. , RADOSAVLJEVIC, Marko , GOEL, Niti , CHOW, Loren , TOLCHINSKY, Peter G. , KAVALIEROS, Jack T. , CHAU, Robert S.
发明人： MUKHERJEE, Niloy , METZ, Matthew V. , POWERS, James M. , LE, Van H. , CHU-KING, Benjamin , LEMAY, Mark R. , RADOSAVLJEVIC, Marko , GOEL, Niti , CHOW, Loren , TOLCHINSKY, Peter G. , KAVALIEROS, Jack T. , CHAU, Robert S.
IPC分类号： H01L21/20 , H01L29/778
CPC分类号： H01L29/06 , H01L21/0237 , H01L21/0245 , H01L21/02455 , H01L21/02494 , H01L21/02502 , H01L21/02505 , H01L21/0251 , H01L21/02513 , H01L21/02532 , H01L21/02538 , H01L21/02587 , H01L21/0259 , H01L21/02617 , H01L21/02636 , H01L21/02658 , H01L21/02664
摘要： Methods of forming hetero-layers with reduced surface roughness and bulk defect density on non-native surfaces and the devices formed thereby are described. In one embodiment, the method includes providing a substrate having a top surface with a lattice constant and depositing a first layer on the top surface of the substrate. The first layer has a top surface with a lattice constant that is different from the first lattice constant of the top surface of the substrate. The first layer is annealed and polished to form a polished surface. A second layer is then deposited above the polished surface.
摘要翻译：描述了在非天然表面上形成具有降低的表面粗糙度和体缺陷密度的异质层以及由此形成的器件的方法。在一个实施例中，该方法包括提供具有晶格常数的顶表面并在衬底的顶表面上沉积第一层的衬底。第一层具有不同于衬底顶表面的第一晶格常数的晶格常数的顶表面。第一层被退火和抛光以形成抛光表面。然后在抛光表面上方沉积第二层。

5. 发明申请

WO2007089398A2 BRIDGE ASSEMBLED FROM OCEAN-MOBILE PONTOON MODULES 审中-公开
标题翻译：从海洋移动PONTOON模块组装的桥梁
公开(公告)号：WO2007089398A2
公开(公告)日：2007-08-09
申请号：PCT/US2007000486
申请日：2007-01-09
申请人： POWERS JAMES M
发明人： POWERS JAMES M
IPC分类号： E01D15/08
CPC分类号： E01D15/14 , E01D21/08
摘要： A bridge for long, deep water crossings is supported between spans by narrow, transverse, semi- submersible pontoons. The pontoons are oriented to present minimal cross section to tidal currents under the bridge. The pontoons are pivotally attached to the bridge allowing them to be turned a few degrees right or left as tidal currents change. During fabrication, a module of bridge deck/roadway can be assembled for transport upon each pontoon deck. After remote fabrication two or more complete bridge modules can be linked pontoon-to-pontoon into a seaworthy vessel that can be towed to the erection site. At site the roadway modules are rotated transverse to the pontoon, elevated to final position and joined to other modules, completing the bridge.
摘要翻译：长跨深水交叉的桥梁由狭窄的横向半潜式浮筒支撑在跨距之间。浮桥面向桥面下的潮汐流的最小横截面。浮桥可枢转地连接到桥上，允许它们随潮汐流变化而向右或向左转动几度。在制造期间，可以组装一个桥面/道路的模块，以便在每个浮桥甲板上运输。在远程制造之后，两个或更多个完整的桥模块可以将浮桥到浮筒连接到可以拖到竖立位置的适航船。在现场，道路模块横向于浮筒旋转，升至最终位置，并连接到其他模块，完成桥梁。

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