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1. 发明申请

WO2006086637A1 APPARATUS AND METHOD FOR HARD-DOCK A TESTER TO A TILTABLE IMAGER 审中-公开
标题翻译：用于将测试仪硬化到可倾斜成像仪的装置和方法
公开(公告)号：WO2006086637A1
公开(公告)日：2006-08-17
申请号：PCT/US2006/004743
申请日：2006-02-10
申请人： CREDENCE SYSTEMS CORPORATION , FRANK, Jonathan , PORTUNE, Rick
发明人： FRANK, Jonathan , PORTUNE, Rick
IPC分类号： G01R31/311 , G01R31/28
CPC分类号： G01R31/311 , G01N21/9501 , G01R31/2887
摘要： An apparatus and method are disclosed for hard-docking of a tester head to a DUT, while permitting the angular alignment of a specimen to be inspected to the optical axis of an optical testing tool. In one example, a system for orthogonal alignment of a specimen to an optical axis of a collection optics is provided. The system comprises a self-leveling tabletop; a specimen holder coupled to the tabletop and held at a fix orientation; collection optics coupled to the tabletop; a plunger coupled to the tabletop and operable to maintain the leveling orientation of the tabletop; a control valve sensing the leveling orientation of the tabletop and coupled to the plunger to control the operation of the plunger; and an aligner coupled to the tabletop and operable to change the alignment of the optical axis of the collection optics with respect to the specimen without changing the fixed orientation of the specimen holder.
摘要翻译：公开了一种用于将测试器头硬接合到DUT的装置和方法，同时允许检查样本的角度对准到光学测试工具的光轴。在一个示例中，提供了用于样本与收集光学器件的光轴正交对准的系统。该系统包括自流平台式; 联接到桌面并保持在固定方向的样本保持器; 收集光学耦合到桌面; 联接到桌面并可操作以保持桌面的调平方向的柱塞; 感测台面的调平方向并联接到柱塞以控制柱塞的操作的控制阀; 以及对准器，其联接到桌面并且可操作以相对于样本改变收集光学器件的光轴的对准，而不改变样本保持器的固定取向。

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