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1. 发明申请

WO2005123281A3 SYSTEM AND METHOD FOR CARRYING OUT LIQUID AND SUBSEQUENT DRYING TREATMENTS ON ONE OR MORE WAFERS 审中-公开
标题翻译：在一个或多个波浪上携带液体和后续干燥处理的系统和方法
公开(公告)号：WO2005123281A3
公开(公告)日：2006-05-26
申请号：PCT/US2005018615
申请日：2005-05-25
申请人： FSI INT INC , BENSON ARNE C , OLSON ERIK D , SPAETH DOUGLAS S
发明人： BENSON ARNE C , OLSON ERIK D , SPAETH DOUGLAS S
IPC分类号： B08B3/02 , H01L21/00 , H01L21/306
CPC分类号： H01L21/02052 , B08B3/02 , H01L21/67028 , H01L21/67051 , Y10S134/902
摘要： Systems for processing microelectronic substrates in a process chamber that incorporate improved technology for transitioning from a wet process to a dry process (especially transitioning from rinsing to drying). At least a portion of residual liquid remaining in fluid supply lines (52c, 52d) after a wet treatment is removed via a pathway (62, 64, 66) that avoids purging directly onto the substrates. Related methods are also included in the present invention.
摘要翻译：用于在处理室中处理微电子衬底的系统，其包含用于从湿法转变为干法（特别是从漂洗到干燥的过渡）的改进技术。在湿处理之后残留在流体供应管线（52c，52d）中的剩余液体的至少一部分经由通路（62,64,66）除去，其避免直接吹扫到基板上。相关方法也包括在本发明中。

2. 发明申请

WO2013074299A1 FLUORINATED COATINGS WITH LUBRICIOUS ADDITIVE 审中-公开
标题翻译：带润滑剂的氟化涂料
公开(公告)号：WO2013074299A1
公开(公告)日：2013-05-23
申请号：PCT/US2012/063182
申请日：2012-11-02
申请人： 3M INNOVATIVE PROPERTIES COMPANY , FLYNN, Richard M. , OLSON, Erik D. , BECHTOLD, Kevin J. , BENCH, Michael W.
发明人： FLYNN, Richard M. , OLSON, Erik D. , BECHTOLD, Kevin J. , BENCH, Michael W.
IPC分类号： C09D183/08 , C09D183/12
CPC分类号： C09D7/125 , B32B27/283 , C08G77/18 , C08G77/24 , C08G77/46 , C09D7/65 , C09D183/08 , C09D183/12 , C23C16/56 , Y02P20/582 , Y10T428/31663
摘要： Fluorinated coatings having a lubricious additive, articles with the fluorinated coatings, and methods of making articles with the fluorinated coatings are provided. More specifically, the fluorinated coatings are prepared from a curable coating composition that includes both a fluorinated silane and a fluorinated polyether oil. The curable coating composition is typically applied adjacent to a siliceous substrate and then cured. The resulting cured articles can have an outer surface that has a good tactile response, that is abrasion resistant, that is easy to clean, or a combination thereof.
摘要翻译：提供具有润滑添加剂的氟化涂层，具有氟化涂层的制品以及制备具有氟化涂层的制品的方法。更具体地，氟化涂层由包括氟化硅烷和氟化聚醚油的可固化涂料组合物制备。可固化涂料组合物通常在硅质基材附近施加，然后固化。所得到的固化制品可以具有良好的触觉反应的外表面，即易于清洁的耐磨性或其组合。

3. 发明申请

WO2012064646A1 HYDROPHOBIC FLUORINATED COATINGS 审中-公开
标题翻译：疏水性氟化涂料
公开(公告)号：WO2012064646A1
公开(公告)日：2012-05-18
申请号：PCT/US2011/059570
申请日：2011-11-07
申请人： 3M INNOVATIVE PROPERTIES COMPANY , RIDDLE, Justin A., , JING, Naiyong, , OLSON, Erik D., , MANSKE, Karl J., , FLYNN, Richard M., , IYER, Suresh S.,
发明人： RIDDLE, Justin A., , JING, Naiyong, , OLSON, Erik D., , MANSKE, Karl J., , FLYNN, Richard M., , IYER, Suresh S.,
IPC分类号： C08K9/06 , C09D4/00 , C01B33/149 , C01B33/159
CPC分类号： C09D5/00 , C08J7/06 , C09D4/00 , C09D5/002 , C09D7/61 , C09D7/63 , C09D183/08 , C23C16/44 , Y10T428/249974
摘要： Articles having hydrophobic fluorinated coatings are provided. More specifically, the articles include a substrate, a primer layer of acid-sintered silica nanoparticles, and a hydrophobic fluorinated layer. The hydrophobic fluorinated coatings can be used on a large variety of substrate and tend to be quite durable even when subjected to repeated rubbing and/or cleaning.
摘要翻译：提供具有疏水氟化涂层的制品。更具体地，制品包括基底，酸烧结二氧化硅纳米颗粒的底漆层和疏水性氟化层。疏水性氟化涂料可用于各种基材上，并且即使经受反复摩擦和/或清洁也趋于相当耐用。

4. 发明申请

WO2006130439A1 PROCESS FOR REMOVAL OF METALS AND ALLOYS FROM A SUBSTRATE 审中-公开
标题翻译：从基板上去除金属和合金的工艺
公开(公告)号：WO2006130439A1
公开(公告)日：2006-12-07
申请号：PCT/US2006/020331
申请日：2006-05-25
申请人： FSI INTERNATIONAL, INC. , HANESTAD, Ronald, J. , OLSON, Erik, D. , FUSSY, Michael
发明人： HANESTAD, Ronald, J. , OLSON, Erik, D. , FUSSY, Michael
IPC分类号： C23F1/30 , C23F1/10 , H01L21/3213
CPC分类号： H01L21/32134 , C23F1/10 , C23F1/30
摘要： A metal that can be dissolved in aqua regia or a metal alloy containing a metal that can be dissolved in aqua regia can be effectively removed from a substrate, and particularly a silicon wafer substrate by a method of application of a composition having a HC1(concentrated)/hydrogen peroxide(concentrated) volume ratio of about 1:1 to about 4:1 that is substantially free of added water. In another embodiment, a metal that can be dissolved in aqua regia or a metal alloy containing a metal that can be dissolved in aqua regia is removed from a substrate by a composition comprising HC1(concentrated)/hydrogen peroxide(concentrated)/water in a volume ratio of from about 2:0.5:4 to about 4:2:4. The composition, heated to a temperature of about 60° C. to about 100°C, is applied to a substrate having the metal or metal alloy thereon, which is preferably heated to a temperature of from about 50°C to about 100°C. The metal or metal alloy preferably is platinum metal or a metal alloy comprising platinum metal, and the substrate is a silicon wafer substrate.
摘要翻译：可以通过使用具有HC1（浓缩的）的组合物的方法从基材，特别是硅晶片基材中有效地除去能够溶解在王水中的金属或含有可溶于王水中的金属的金属合金）/过氧化氢（浓缩）体积比为约1：1至约4：1，基本上不含加水。在另一个实施方案中，可以通过包含HC1（浓缩）/过氧化氢（浓缩）/水的组合物从基底中除去可溶于王水中的金属或含有可溶于王水中的金属的金属合金体积比为约2:0.5:4至约4:2:4。将加热到约60℃至约100℃的温度的组合物施加到其上具有金属或金属合金的基材上，其优选加热至约50℃至约100℃ 。金属或金属合金优选为铂金属或包含铂金属的金属合金，基板为硅晶片基板。

5. 发明申请

WO2005123281A2 SYSTEM AND METHOD FOR CARRYING OUT LIQUID AND SUBSEQUENT DRYING TREATMENTS ON ONE OR MORE WAFERS 审中-公开
标题翻译：在一个或多个波浪上携带液体和后续干燥处理的系统和方法
公开(公告)号：WO2005123281A2
公开(公告)日：2005-12-29
申请号：PCT/US2005/018615
申请日：2005-05-25
申请人： FSI INTERNATIONAL, INC. , BENSON, Arne, C. , OLSON, Erik, D. , SPAETH, Douglas, S.
发明人： BENSON, Arne, C. , OLSON, Erik, D. , SPAETH, Douglas, S.
IPC分类号： B08B3/02
CPC分类号： H01L21/02052 , B08B3/02 , H01L21/67028 , H01L21/67051 , Y10S134/902
摘要： Systems for processing microelectronic substrates in a process chamber that incorporate improved technology for transitioning from a wet process to a dry process (especially transitioning from rinsing to drying). At least a portion of residual liquid remaining in fluid supply lines after a wet treatment is removed via a pathway that avoids purging directly onto the substrates. Related methods are also included in the present invention.
摘要翻译：用于在处理室中处理微电子衬底的系统，其包含用于从湿法转变为干法（特别是从漂洗到干燥的过渡）的改进技术。在湿处理之后残留在流体供应管线中的剩余液体的至少一部分通过避免直接吹扫到基底上的通道去除。相关方法也包括在本发明中。

6. 发明申请

WO2013126208A1 OLEOPHOBIC COATINGS 审中-公开
标题翻译：氧化涂料
公开(公告)号：WO2013126208A1
公开(公告)日：2013-08-29
申请号：PCT/US2013/024807
申请日：2013-02-06
申请人： 3M INNOVATIVE PROPERTIES COMPANY , OLSON, Erik D. , FLYNN, Richard M. , VITCAK, Daniel R. , MANSKE, Karl J. , BECHTOLD, Kevin J. , TAN, Lian S.
发明人： OLSON, Erik D. , FLYNN, Richard M. , VITCAK, Daniel R. , MANSKE, Karl J. , BECHTOLD, Kevin J. , TAN, Lian S.
IPC分类号： C09D127/20 , C09D7/12 , C03C17/32
CPC分类号： C09D171/00 , C03C17/32 , C08G77/24 , C08G77/46 , C09D183/08 , C09D183/12 , C09D201/10
摘要： A polymeric coating for a glass substrate includes a hexafluoropropylene oxide derived silane polymer. The hexafluoropropylene oxide derived silane polymer has a molecular weight of greater than about 5500, a thickness of between about 2 and about 15 nanometers and a coefficient of friction constant of less than about 0.35. A water contact angle of the polymeric hexafluoropropylene oxide derived silane coating decreases by less than about 27% after being subjected to 10000 abrasion cycles.
摘要翻译：用于玻璃基底的聚合物涂层包括衍生自六氟环氧丙烷的硅烷聚合物。六氟环氧丙烷衍生的硅烷聚合物的分子量大于约5500，厚度为约2至约15纳米，摩擦系数常数小于约0.35。聚合六氟环氧丙烷衍生的硅烷涂层的水接触角在经受10000次磨损循环后减少了约27％。

7. 发明申请

WO2012064649A1 OPTICAL DEVICE SURFACE TREATMENT PROCESS AND SMUDGE-RESISTANT ARTICLE PRODUCED THEREBY 审中-公开
标题翻译：光学设备表面处理工艺和抗菌品生产
公开(公告)号：WO2012064649A1
公开(公告)日：2012-05-18
申请号：PCT/US2011/059576
申请日：2011-11-07
申请人： 3M INNOVATIVE PROPERTIES COMPANY , IYER, Suresh S., , FLYNN, Richard M., , RAJAGOPAL, Raj , OLSON, Erik D., , MANSKE, Karl J., , DAVID, Moses M., , KELLY, Jean A.,
发明人： IYER, Suresh S., , FLYNN, Richard M., , RAJAGOPAL, Raj , OLSON, Erik D., , MANSKE, Karl J., , DAVID, Moses M., , KELLY, Jean A.,
IPC分类号： C09D183/08 , C09D183/14 , C09D4/00 , G02B1/00
CPC分类号： G06F3/041 , C08G77/24 , C08G77/48 , C08G77/50 , C08G77/54 , C09D4/00 , C09D183/14
摘要： A surface treatment process comprises (a) providing at least one optical device; (b) providing a curable surface treatment composition comprising (1) at least one fluorinated organosilane compound comprising (i) a monovalent segment selected from polyfluoroalkyl, polyfluoroether, polyfluoropolyether, and combinations thereof and (ii) a monovalent endgroup comprising at least one silyl moiety comprising at least one group selected from hydrolyzable groups, hydroxyl, and combinations thereof, and (2) at least one fluorinated organosilane compound comprising (i) a multivalent segment selected from polyfluoroalkane, polyfluoroether, polyfluoropolyether, and combinations thereof and (ii) at least two monovalent endgroups, each independently comprising at least one silyl moiety comprising at least one group selected from hydrolyzable groups, hydroxyl, and combinations thereof; (c) applying the curable surface treatment composition to the optical device; and (d) curing the applied, curable surface treatment composition.
摘要翻译：表面处理方法包括（a）提供至少一个光学装置; （b）提供可固化表面处理组合物，其包含（1）至少一种氟化有机硅烷化合物，其包含（i）选自多氟烷基，多氟醚，多氟聚醚及其组合的单价链段和（ii）包含至少一个甲硅烷基部分的单价末端基包括选自可水解基团，羟基及其组合中的至少一个基团，和（2）至少一种氟化有机硅烷化合物，其包含（i）选自多氟烷烃，多氟醚，多氟聚醚及其组合的多价链段和（ii）至少两个单价端基，各自独立地包含至少一个含有至少一个选自可水解基团，羟基及其组合的基团的甲硅烷基部分; （c）将可固化表面处理组合物施加到光学装置上; 和（d）固化所施加的可固化表面处理组合物。

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