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    • 2. 发明申请
    • METHOD AND APPARATUS FOR ORIENTING A SURFACE
    • WO2002079854A3
    • 2002-10-10
    • PCT/US2002/009940
    • 2002-03-29
    • GSI LUMONICS, INC.BROWN, David, C.STUKALIN, FelixNUSSBAUM, Michael, B.
    • BROWN, David, C.STUKALIN, FelixNUSSBAUM, Michael, B.
    • G02B26/08
    • The invention provides a method and apparatus for positioning a surface (30) in a desired orientation. There is provided a movable member (10) supported for movement by a fixed member (40) and the movable member has an optical element, e.g. a flat mirror (30) fixedly attached thereto. In one embodiment the mirror scans a radiation beam incident thereon along a single axis. In a second embodiment, the radiation beam is scanned in two mutually perpendicular axes. A magnetic element (50) having a north and a south magnetic pole is fixedly attached to the movable member (10). A magnetically permeable stator element (70), that is stationary with respect to the movable member (10) and the magnetic element (50), is placed in the field of the magnetic element (50) such that the stator element (70) and said magnetic element (50) mutually generate a magnetic traction force between them. A current coil (60) is wound around a portion of the stator element (70) and a current driver (400) is provided for driving a current in the current coil (60). The current induces an electromagnetic field in the stator element (70) and an electromagnetic force acts on the magnetic element (50) for controlling movement of the surface (30) with respect to the fixed element (40). A radiation beam source (502) may be directed onto the movable mirror surface (30) and scanned by the movement of the mirror to direct the radiation beam in a desired propagation direction.
    • 6. 发明申请
    • METHOD AND APPARATUS FOR ORIENTING A SURFACE
    • 面向面的方法和装置
    • WO2002079854A2
    • 2002-10-10
    • PCT/US2002/009940
    • 2002-03-29
    • GSI LUMONICS, INC.BROWN, David, C.STUKALIN, FelixNUSSBAUM, Michael, B.
    • BROWN, David, C.STUKALIN, FelixNUSSBAUM, Michael, B.
    • G02B26/08
    • G02B6/3572G02B6/3512G02B6/3556G02B6/359G02B7/1828G02B26/0816G02B26/105
    • The invention provides a method and apparatus for positioning a surface (30) in a desired orientation. There is provided a movable member (10) supported for movement by a fixed member (40) and the movable member has an optical element, e.g. a flat mirror (30) fixedly attached thereto. In one embodiment the mirror scans a radiation beam incident thereon along a single axis. In a second embodiment, the radiation beam is scanned in two mutually perpendicular axes. A magnetic element (50) having a north and a south magnetic pole is fixedly attached to the movable member (10). A magnetically permeable stator element (70), that is stationary with respect to the movable member (10) and the magnetic element (50), is placed in the field of the magnetic element (50) such that the stator element (70) and said magnetic element (50) mutually generate a magnetic traction force between them. A current coil (60) is wound around a portion of the stator element (70) and a current driver (400) is provided for driving a current in the current coil (60). The current induces an electromagnetic field in the stator element (70) and an electromagnetic force acts on the magnetic element (50) for controlling movement of the surface (30) with respect to the fixed element (40). A radiation beam source (502) may be directed onto the movable mirror surface (30) and scanned by the movement of the mirror to direct the radiation beam in a desired propagation direction.
    • 本发明提供了一种用于将表面(30)定位成所需取向的方法和装置。 设置有可移动构件(10),其被固定构件(40)支撑以移动,并且可移动构件具有例如光学元件。 固定在其上的平面镜(30)。 在一个实施例中,反射镜沿着单个轴扫描入射到其上的辐射束。 在第二实施例中,辐射束以两个相互垂直的轴线扫描。 具有北极和南磁极的磁性元件(50)固定在可动件(10)上。 相对于可动构件(10)和磁性元件(50)固定的导磁定子元件(70)被放置在磁性元件(50)的磁场中,使得定子元件(70)和 所述磁性元件(50)在它们之间相互产生磁力牵引力。 电流线圈(60)缠绕在定子元件(70)的一部分上,并且提供电流驱动器(400)以驱动电流线圈(60)中的电流。 电流在定子元件(70)中引起电磁场,并且电磁力作用在磁性元件(50)上,用于控制表面(30)相对于固定元件(40)的移动。 辐射束源(502)可以被引导到可动镜面(30)上,并且通过镜的移动被扫描以将辐射束引导到期望的传播方向。