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    • 1. 发明申请
    • MEMS DEVICE
    • MEMS器件
    • WO2013145735A1
    • 2013-10-03
    • PCT/JP2013/002075
    • 2013-03-27
    • KABUSHIKI KAISHA TOYOTA CHUO KENKYUSHOOZAKI, TakashiFUJITSUKA, NorioSHIMAOKA, KeiichiNONOMURA, Yutaka
    • OZAKI, TakashiFUJITSUKA, NorioSHIMAOKA, KeiichiNONOMURA, Yutaka
    • B81B3/00
    • B81B3/0048B81B3/007B81B2201/042B81B2203/0109
    • Provided is a technique capable of keeping a tilt angle constant even in a case where a warp in a direction along a tilting axis occurs on a tilting plate in a MEMS device which includes the tilting plate tilting with respect to a substrate. A MEMS device disclosed in the present description includes a substrate, a tilting plate arranged at an interval from the substrate, a support member fixed to the substrate, and a support beam having a first end connected to the support member and a second end connected to the tilting plate, and tiltably supporting the tilting plate around a tilting axis. In the MEMS device, one of the substrate and the tilting plate is formed with a protruding portion. In the MEMS device, at least a part of the protruding portion is included in a plane perpendicular to the tilting axis, and including a connecting portion of the tilting plate and the support beam. In the MEMS device, the at least a part of the protruding portion comes into contact with the other of the substrate and the tilting plate, when the tilting plate tilts.
    • 提供了一种即使在包括倾斜板相对于基板倾斜的MEMS装置中的倾斜板上发生沿着倾斜轴的方向的翘曲的情况下也能够保持倾斜角度恒定的技术。 在本说明书中公开的MEMS装置包括基板,与基板间隔设置的倾斜板,固定到基板的支撑构件和支撑梁,支撑梁的第一端连接到支撑构件,第二端连接到 倾斜板,并且倾斜地支撑倾斜板围绕倾斜轴线。 在MEMS装置中,基板和倾斜板中的一个形成有突出部。 在MEMS器件中,突出部分的至少一部分包括在垂直于倾斜轴的平面中,并且包括倾斜板和支撑梁的连接部分。 在MEMS装置中,当倾斜板倾斜时,突出部分的至少一部分与基板和倾斜板中的另一个接触。
    • 4. 发明申请
    • ANGULAR VELOCITY DETECTOR
    • 角速度检测器
    • WO1998007005A1
    • 1998-02-19
    • PCT/JP1997002756
    • 1997-08-07
    • TOYOTA JIDOSHA KABUSHIKI KAISHASUGITANI, NobuyoshiNONOMURA, Yutaka
    • TOYOTA JIDOSHA KABUSHIKI KAISHA
    • G01C19/56
    • G01C19/5607
    • This detector is provided with an oscillator base extending in X-direction on XY plane in XYZ three-dimensional coordinates space and fixed to an object material, the angular velocity of which is to be detected, an oscillator having a first oscillating member projecting from the oscillator base in +Y-direction and having a first natural frequency in X-direction and a second oscillating member projecting from the oscillator base in -Y-direction and having a second natural frequency in X-direction different from the first natural frequency, a means for driving either one of the first and second oscillating members in Z- or X-direction, a means for detecting the amplitude of oscillation orthogonally crossing both the direction in which the first and second oscillating members is driven by the driving means and Y-direction, and a means for computing an angular velocity with respect to a Y-direction axis on the basis of the magnitude of the amplitude detected by the amplitude detecting means. The shape and sizes of the first and second oscillating members are determined so that the oscillator base is not oscillated in Z-direction when the first or second oscillating members are excited by the driving means. Since this detector is thus formed, an angular velocity can be detected with a high accuracy.
    • 该检测器设置有在XY平面上的X方向上在XYZ三维坐标空间中延伸并固定到其要被检测的角速度的物体的振荡器基座,具有从第一振荡部件突出的第一振荡部件的振荡器 振荡器基底在+ Y方向上并且具有在X方向上的第一固有频率和从振荡器基座沿-Y方向突出并且具有与第一固有频率不同的X方向上的第二固有频率的第二振荡部件, 用于在Z方向或X方向上驱动第一和第二摆动构件中的任一个的装置,用于检测正交地交叉驱动装置驱动第一和第二摆动构件的方向的振动的振幅的装置, 方向,以及用于基于由振幅检测装置检测的振幅的大小计算相对于Y方向轴的角速度的装置 秒。 确定第一和第二振荡构件的形状和尺寸,使得当第一或第二振荡构件被驱动装置激励时,振荡器基座在Z方向上不振荡。 由于这样形成检测器,所以可以高精度地检测角速度。
    • 5. 发明申请
    • MOVING BODY POSTURE ANGLE DETECTING APPARATUS
    • 移动身体姿势检测装置
    • WO2007015134A3
    • 2007-08-23
    • PCT/IB2006002084
    • 2006-08-01
    • TOYOTA MOTOR CO LTDTOYOTA CHUO KENKYUSHO KKSUGIHARA HISAYOSHINONOMURA YUTAKAFUJIYOSHI MOTOHIRO
    • SUGIHARA HISAYOSHINONOMURA YUTAKAFUJIYOSHI MOTOHIRO
    • B25J9/16B25J19/02B62D57/02G01C15/00G05D1/08
    • B25J9/163G05B2219/37024G05B2219/37388G05B2219/40536G05B2219/41166G05B2219/42152
    • An angular velocity detected by an angular velocity sensor (10) is integrated by a small angle matrix calculator (12) and a matrix adding calculator (14), and then restored as a posture angle (angular velocity posture angle) by a matrix posture angle calculator (16). A posture matrix is calculated by a tilt angle calculator (22) and an acceleration matrix calculator (24) and an acceleration detected by an acceleration sensor (20) is restored as a posture angle (acceleration posture angle) by a matrix posture angle calculator (26). Low pass filters (18, 28) each extract a low range component, the difference between the two is calculated by a differencer (30), and only the drift amount is extracted. A subtracter (32) removes the drift amount from the angular velocity posture angle and the result is output from an output device (34). In addition, a posture angle matrix calculator (36) converts the result to a posture matrix, which it feeds back to the matrix adding calculator (14).
    • 由角速度传感器(10)检测到的角速度由小角度矩阵计算器(12)和矩阵相加计算器(14)积分,然后作为姿态角度(角速度姿态角度)恢复矩阵姿态角 计算器(16)。 通过倾斜角计算器(22)和加速度矩阵计算器(24)计算姿势矩阵,并且通过矩阵姿势角计算器(24)将由加速度传感器(20)检测到的加速度恢复为姿势角(加速姿势角) 26)。 低通滤波器(18,28)各自提取低范围分量,两者之差由差分器(30)计算,并且仅提取漂移量。 减法器(32)从角速度姿势角度消除漂移量,并从输出装置(34)输出结果。 另外,姿势角度矩阵计算器(36)将结果转换为姿势矩阵,并将其反馈给矩阵相加计算器(14)。
    • 7. 发明申请
    • MEMS DEVICE
    • MEMS器件
    • WO2013145735A4
    • 2014-01-09
    • PCT/JP2013002075
    • 2013-03-27
    • TOYOTA CHUO KENKYUSHO KKOZAKI TAKASHIFUJITSUKA NORIOSHIMAOKA KEIICHINONOMURA YUTAKA
    • OZAKI TAKASHIFUJITSUKA NORIOSHIMAOKA KEIICHINONOMURA YUTAKA
    • B81B3/00
    • B81B3/0048B81B3/007B81B2201/042B81B2203/0109
    • Provided is a technique capable of keeping a tilt angle constant even in a case where a warp in a direction along a tilting axis occurs on a tilting plate in a MEMS device which includes the tilting plate tilting with respect to a substrate. A MEMS device disclosed in the present description includes a substrate, a tilting plate arranged at an interval from the substrate, a support member fixed to the substrate, and a support beam having a first end connected to the support member and a second end connected to the tilting plate, and tiltably supporting the tilting plate around a tilting axis. In the MEMS device, one of the substrate and the tilting plate is formed with a protruding portion. In the MEMS device, at least a part of the protruding portion is included in a plane perpendicular to the tilting axis, and including a connecting portion of the tilting plate and the support beam. In the MEMS device, the at least a part of the protruding portion comes into contact with the other of the substrate and the tilting plate, when the tilting plate tilts.
    • 提供了一种技术,即使在包括倾斜板相对于基板倾斜的MEMS装置中的倾斜板上发生沿着倾斜轴的方向的翘曲的情况下也能够保持倾斜角度恒定。 在本说明书中公开的MEMS装置包括基板,与基板间隔设置的倾斜板,固定到基板的支撑构件和支撑梁,支撑梁的第一端连接到支撑构件,第二端连接到 倾斜板,并且可倾斜地支撑倾斜板围绕倾斜轴线。 在MEMS装置中,基板和倾斜板中的一个形成有突出部。 在MEMS装置中,突出部分的至少一部分包括在垂直于倾斜轴的平面中,并且包括倾斜板和支撑梁的连接部分。 在MEMS装置中,当倾斜板倾斜时,突出部分的至少一部分与基板和倾斜板中的另一个接触。
    • 9. 发明申请
    • ROBOT CONTROL SYSTEM
    • 机器人控制系统
    • WO2007015145A2
    • 2007-02-08
    • PCT/IB2006/002097
    • 2006-08-01
    • TOYOTA JIDOSHA KABUSHIKI KAISHAKABUSHIKI KAISHA TOYOTA CHUO KENKYUSHOSUGIHARA, HisayoshiNONOMURA, YutakaFUJIYOSHI, Motohiro
    • SUGIHARA, HisayoshiNONOMURA, YutakaFUJIYOSHI, Motohiro
    • B25J9/00
    • B25J9/16
    • Communication is performed between a sensor unit (10) aud a robot CPU (12) by using a serial data line (14). A variable length data format includes a transfer size section, a command section, a transfer pattern section, a measurement data section, and a CRC section; and, along with increasing and decreasing the number of types of data in the measurement data section, the type of this data is stipulated by a transfer pattern section. By reducing the number of types of the data, the length of the data is shortened, thus ensuring the communication speed. Furthermore , the measurement times of the sensor unit (10) are accurately managed by the robot CPU (12), by transmitting time stamp data from the robot CPU (12), and by transmitting time stamp + time count data from the sensor unit (10).
    • 通过使用串行数据线(14)在传感器单元(10)与机器人CPU(12)之间执行通信。 可变长度数据格式包括传送大小部分,命令部分,传送模式部分,测量数据部分和CRC部分; 并且随着测量数据部分中的数据类型的数量的增加和减少,该数据的类型由传送模式部分来规定。 通过减少数据类型的数量,数据的长度被缩短,从而确保了通信速度。 此外,机器人CPU(12)通过从机器人CPU(12)发送时间标记数据并通过从传感器单元(12)发送时间标记+时间计数数据来精确地管理传感器单元(10)的测量时间 10)。