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1. 发明申请

WO2013145735A4 MEMS DEVICE 审中-公开
标题翻译： MEMS器件
公开(公告)号：WO2013145735A4
公开(公告)日：2014-01-09
申请号：PCT/JP2013002075
申请日：2013-03-27
申请人： TOYOTA CHUO KENKYUSHO KK , OZAKI TAKASHI , FUJITSUKA NORIO , SHIMAOKA KEIICHI , NONOMURA YUTAKA
发明人： OZAKI TAKASHI , FUJITSUKA NORIO , SHIMAOKA KEIICHI , NONOMURA YUTAKA
IPC分类号： B81B3/00
CPC分类号： B81B3/0048 , B81B3/007 , B81B2201/042 , B81B2203/0109
摘要： Provided is a technique capable of keeping a tilt angle constant even in a case where a warp in a direction along a tilting axis occurs on a tilting plate in a MEMS device which includes the tilting plate tilting with respect to a substrate. A MEMS device disclosed in the present description includes a substrate, a tilting plate arranged at an interval from the substrate, a support member fixed to the substrate, and a support beam having a first end connected to the support member and a second end connected to the tilting plate, and tiltably supporting the tilting plate around a tilting axis. In the MEMS device, one of the substrate and the tilting plate is formed with a protruding portion. In the MEMS device, at least a part of the protruding portion is included in a plane perpendicular to the tilting axis, and including a connecting portion of the tilting plate and the support beam. In the MEMS device, the at least a part of the protruding portion comes into contact with the other of the substrate and the tilting plate, when the tilting plate tilts.
摘要翻译：提供了一种技术，即使在包括倾斜板相对于基板倾斜的MEMS装置中的倾斜板上发生沿着倾斜轴的方向的翘曲的情况下也能够保持倾斜角度恒定。在本说明书中公开的MEMS装置包括基板，与基板间隔设置的倾斜板，固定到基板的支撑构件和支撑梁，支撑梁的第一端连接到支撑构件，第二端连接到倾斜板，并且可倾斜地支撑倾斜板围绕倾斜轴线。在MEMS装置中，基板和倾斜板中的一个形成有突出部。在MEMS装置中，突出部分的至少一部分包括在垂直于倾斜轴的平面中，并且包括倾斜板和支撑梁的连接部分。在MEMS装置中，当倾斜板倾斜时，突出部分的至少一部分与基板和倾斜板中的另一个接触。

2. 发明申请

WO2013145735A1 MEMS DEVICE 审中-公开
标题翻译： MEMS器件
公开(公告)号：WO2013145735A1
公开(公告)日：2013-10-03
申请号：PCT/JP2013/002075
申请日：2013-03-27
申请人： KABUSHIKI KAISHA TOYOTA CHUO KENKYUSHO , OZAKI, Takashi , FUJITSUKA, Norio , SHIMAOKA, Keiichi , NONOMURA, Yutaka
发明人： OZAKI, Takashi , FUJITSUKA, Norio , SHIMAOKA, Keiichi , NONOMURA, Yutaka
IPC分类号： B81B3/00
CPC分类号： B81B3/0048 , B81B3/007 , B81B2201/042 , B81B2203/0109
摘要： Provided is a technique capable of keeping a tilt angle constant even in a case where a warp in a direction along a tilting axis occurs on a tilting plate in a MEMS device which includes the tilting plate tilting with respect to a substrate. A MEMS device disclosed in the present description includes a substrate, a tilting plate arranged at an interval from the substrate, a support member fixed to the substrate, and a support beam having a first end connected to the support member and a second end connected to the tilting plate, and tiltably supporting the tilting plate around a tilting axis. In the MEMS device, one of the substrate and the tilting plate is formed with a protruding portion. In the MEMS device, at least a part of the protruding portion is included in a plane perpendicular to the tilting axis, and including a connecting portion of the tilting plate and the support beam. In the MEMS device, the at least a part of the protruding portion comes into contact with the other of the substrate and the tilting plate, when the tilting plate tilts.
摘要翻译：提供了一种即使在包括倾斜板相对于基板倾斜的MEMS装置中的倾斜板上发生沿着倾斜轴的方向的翘曲的情况下也能够保持倾斜角度恒定的技术。在本说明书中公开的MEMS装置包括基板，与基板间隔设置的倾斜板，固定到基板的支撑构件和支撑梁，支撑梁的第一端连接到支撑构件，第二端连接到倾斜板，并且倾斜地支撑倾斜板围绕倾斜轴线。在MEMS装置中，基板和倾斜板中的一个形成有突出部。在MEMS器件中，突出部分的至少一部分包括在垂直于倾斜轴的平面中，并且包括倾斜板和支撑梁的连接部分。在MEMS装置中，当倾斜板倾斜时，突出部分的至少一部分与基板和倾斜板中的另一个接触。

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