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1. 发明申请

WO2008106499B1 RIGID RF TRANSMISSION LINE WITH EASY REMOVAL SECTION 审中-公开
标题翻译： RIGID射频发射线，轻松移除部分
公开(公告)号：WO2008106499B1
公开(公告)日：2008-12-11
申请号：PCT/US2008055100
申请日：2008-02-27
申请人： APPLIED MATERIALS INC , SORENSEN CARL A , WHITE JOHN M , NEILL KIM C
发明人： SORENSEN CARL A , WHITE JOHN M , NEILL KIM C
IPC分类号： H01P1/06
CPC分类号： H01P1/045 , H01J37/32082 , H01J37/32174
摘要： An RF feed for a processing apparatus is disclosed. Coupling an RF generator to an RF matching network by a rigid RF feed lessens the amount of power that is lost during transmission from the generator to the matching network. The rigid RF feed comprises an inverted J shaped section that decouples the generator from the matching network whenever servicing the chamber is necessary. The J shape section has two parallel portions coupled together by a perpendicular portion. The J shaped section may be removed as a one piece assembly by uncoupling the J shaped section at a location disposed near the top of the chamber and a location near the floor of the chamber. The connections between the J shaped section and the remainder of the RF feed face the same direction to ensure easy coupling and decoupling without twisting and/or bending any portion of the rigid RF feed.
摘要翻译：公开了一种用于处理装置的RF馈送。通过刚性RF馈送将RF发生器耦合到RF匹配网络可以减少在从发生器到匹配网络的传输过程中丢失的功率量。刚性射频馈送包括倒置的J形截面，每当需要维护腔室时，将发生器与匹配网络分离。 J形截面具有通过垂直部分联接在一起的两个平行部分。 J形截面可以作为一个单独的组件被移除，该J形截面在设置在室顶部附近的位置处以及靠近该室底部的位置脱离J形截面。 J形截面和RF进料的其余部分之间的连接面向相同的方向，以确保容易的耦合和解耦，而不会扭曲和/或弯曲刚性RF进给的任何部分。

2. 发明申请

WO2008106499A2 RIGID RF TRANSMISSION LINE WITH EASY REMOVAL SECTION 审中-公开
标题翻译：刚性RF传输线，易于拆卸
公开(公告)号：WO2008106499A2
公开(公告)日：2008-09-04
申请号：PCT/US2008/055100
申请日：2008-02-27
申请人： APPLIED MATERIALS, INC. , SORENSEN, Carl, A. , WHITE, John, M. , NEILL, Kim, C.
发明人： SORENSEN, Carl, A. , WHITE, John, M. , NEILL, Kim, C.
IPC分类号： H01J37/02
CPC分类号： H01P1/045 , H01J37/32082 , H01J37/32174
摘要： An RF feed for a processing apparatus is disclosed. Coupling an RF generator to an RF matching network by a rigid RF feed lessens the amount of power that is lost during transmission from the generator to the matching network. The rigid RF feed comprises an inverted J shaped section that decouples the generator from the matching network whenever servicing the chamber is necessary. The J shape section has two parallel portions coupled together by a perpendicular portion. The J shaped section may be removed as a one piece assembly by uncoupling the J shaped section at a location disposed near the top of the chamber and a location near the floor of the chamber. The connections between the J shaped section and the remainder of the RF feed face the same direction to ensure easy coupling and decoupling without twisting and/or bending any portion of the rigid RF feed.
摘要翻译：公开了一种用于处理设备的RF馈送。通过刚性射频馈送将射频发生器耦合到射频匹配网络会减少从发生器到匹配网络传输过程中损失的功率量。刚性射频馈电包括一个倒J形部分，无论何时需要维修腔室，都可将发生器与匹配网络分离。 J形部分具有通过垂直部分连接在一起的两个平行部分。 J形部分可通过在设置在腔室顶部附近的位置处的J形部分与腔室底部附近的位置处解开联接而被拆除为单件式组件。 J形部分和RF馈电的其余部分之间的连接面向相同的方向，以确保容易的耦合和去耦，而不会扭曲和/或弯曲刚性RF馈电的任何部分。

3. 发明申请

WO2008106499A3 RIGID RF TRANSMISSION LINE WITH EASY REMOVAL SECTION 审中-公开
标题翻译：刚性RF传输线，易于拆卸
公开(公告)号：WO2008106499A3
公开(公告)日：2008-10-30
申请号：PCT/US2008055100
申请日：2008-02-27
申请人： APPLIED MATERIALS INC , SORENSEN CARL A , WHITE JOHN M , NEILL KIM C
发明人： SORENSEN CARL A , WHITE JOHN M , NEILL KIM C
IPC分类号： H01P1/06
CPC分类号： H01P1/045 , H01J37/32082 , H01J37/32174
摘要： An RF feed for a processing apparatus is disclosed. Coupling an RF generator to an RF matching network by a rigid RF feed lessens the amount of power that is lost during transmission from the generator to the matching network. The rigid RF feed comprises an inverted J shaped section that decouples the generator from the matching network whenever servicing the chamber is necessary. The J shape section has two parallel portions coupled together by a perpendicular portion. The J shaped section may be removed as a one piece assembly by uncoupling the J shaped section at a location disposed near the top of the chamber and a location near the floor of the chamber. The connections between the J shaped section and the remainder of the RF feed face the same direction to ensure easy coupling and decoupling without twisting and/or bending any portion of the rigid RF feed.
摘要翻译：公开了一种用于处理设备的RF馈送。通过刚性射频馈送将射频发生器耦合到射频匹配网络会减少从发生器到匹配网络传输过程中损失的功率量。刚性射频馈电包括一个倒J形部分，无论何时需要维修腔室，都可将发生器与匹配网络分离。 J形部分具有通过垂直部分连接在一起的两个平行部分。 J形部分可通过在设置在腔室顶部附近的位置处的J形部分与腔室底部附近的位置处解开联接而被拆除为单件式组件。 J形部分和RF馈送的其余部分之间的连接面向相同的方向，以确保容易的耦合和解耦，而不会扭曲和/或弯曲刚性RF馈送的任何部分。

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