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1. 发明申请

WO02060045A3 HIGH FREQUENCY PULSE WIDTH MODULATION DRIVER PARTICULARLY USEFUL FOR ELECTROSTATICALLY ACTUATED MEMS ARRAY 审中-公开
标题翻译：高频脉冲宽度调制驱动器特别适用于静电激励MEMS阵列
公开(公告)号：WO02060045A3
公开(公告)日：2003-06-12
申请号：PCT/US0202265
申请日：2002-01-24
申请人： MOVAZ NETWORKS INC
发明人： GARVERICK STEVEN L , NAGY MICHAEL L
IPC分类号： B81B3/00 , G02B6/12 , G02B6/26 , G02B6/34 , G02B6/35 , G02B26/08 , H04Q11/00 , H02N1/00
CPC分类号： G02B6/357 , G02B6/266 , G02B6/3512 , G02B6/3518 , G02B6/3556 , G02B6/356 , G02B26/0841 , G02B2006/12104 , H04Q11/0005 , H04Q2011/0022 , H04Q2011/0024 , H04Q2011/003 , H04Q2011/0039 , H04Q2011/0049
摘要： Pulse-width modulation (PWM) drive circuitry particularly applicable to an array of electrostatic actuators formed in a micro electromechanical system (MEMS), such as used for optical switching. A control cell associated with each actuator includes a register (222) selectively stored with a desired pulse width. A clocked counter (220) distributes its outputs to all control cells. When the counter matches the register, a polarity signal corresponding to a drive clock is latched and controls the voltage applied to the electrostatic cell. In a bipolar drive, one actuator electrode is driven by a drive clock (CLK); the other, by the latch (228). The MEMS element may be a tiltable plate supported in its middle by a torsion beam. Complementary binary signals may drive two capacitors formed across the axis of the beam. The register and comparison logic for each cell may be formed by a content addressable memory.
摘要翻译：脉宽调制（PWM）驱动电路特别适用于微机电系统（MEMS）中形成的静电致动器阵列，例如用于光开关。与每个致动器相关联的控制单元包括以期望的脉冲宽度选择性地存储的寄存器（222）。计时计数器（220）将其输出分配给所有控制单元。当计数器与寄存器匹配时，锁存与驱动时钟对应的极性信号，并控制施加到静电电池的电压。在双极驱动器中，一个致动器电极由驱动时钟（CLK）驱动; 另一个，通过闩锁（228）。 MEMS元件可以是通过扭转梁在其中间支撑的可倾斜板。互补的二进制信号可以驱动跨过光束的轴形成的两个电容器。每个单元的寄存器和比较逻辑可以由内容可寻址存储器形成。

2. 发明申请

WO2002063596A3 MULTIPLEXED ANALOG CONTROL SYSTEM FOR ELECTROSTATIC ACTUATOR ARRAY 审中-公开
公开(公告)号：WO2002063596A3
公开(公告)日：2002-08-15
申请号：PCT/US2002/003420
申请日：2002-02-06
申请人： MOVAZ NETWORKS, INC.
发明人： GARVERICK, Steven, L. , GUO, Jun , RAJAN, Narayanan
IPC分类号： G02B26/08
摘要： A multiplexed analog control system for an micro electromechanical systems (MEMS) array (10) of electrostatic sctuators, such as tiltable mirrors (12) in an optical switch. Each sctuator includes a variable gap capacitor (58, 78) formed as part of the movable mechanical element. A hold capacitor (94) is connected to each actuator capacitor, and a selectable high-voltage inverter (96) connects tehm to provide a bipolar drive signal of 50% duty cycle. A single power digital controlled current source (92) is connected to all the drive circuits (62) to provide a high-power correction signal. Address decoders (80, 82) enable a selected one of the drive circuits to add or subtract the correction from the hold capacitor.

3. 发明申请

WO03042094A8 MULTI-CHIP MODULE INTEGRATING MEMS MIRROR ARRAY WITH ELECTRONICS 审中-公开
标题翻译：将MEMS镜像阵列与电子集成在一起的多芯片模块
公开(公告)号：WO03042094A8
公开(公告)日：2004-04-22
申请号：PCT/US0235890
申请日：2002-11-07
申请人： MOVAZ NETWORKS INC
发明人： BHATTARAI AMAL , RAJAN NARAYANAN
IPC分类号： B81B7/00 , B81B7/02 , B81B7/04 , G02B26/08
CPC分类号： G02B26/0841 , B81B7/04 , B81B2201/042 , B81C1/00238
摘要： An integrated module including an array of electrostatically actuated mirrors usable as an optical switch. An array of tiltable mirrors (70, 72) is formed as a micro electromechanical system (MEMS) in one substrate carrier (60). A ceramic multi-chip module (MCM) (62) is formed having multiple layers (80) of wiring and electrodes (94) at one surface forming one side part of the electrostatic capacitive actuators. The MEMS substrate is bonded to the carrier (62) with the carrier electrodes (94) in opposition to the mirrors (70, 72), which form counter electrodes. Advantageously, a handle layer of the MEMS substrate is not removed and the mirrors released until after the bonding with the MCM. Separate high-voltage integrated circuits (ICs) (66) driving the actuators and low-voltage ICs controlling the high-voltage ICs (66) are bonded on the side of the MCM (62) opposite the MEMS (60) with the MCM providing electrical interconnections (68).
摘要翻译：一个集成模块，包括一个可用作光开关的静电致动反射镜阵列。在一个衬底载体（60）中，可倾斜反射镜阵列（70,72）形成为微机电系统（MEMS）。陶瓷多芯片模块（MCM）（62）形成为在形成静电电容致动器的一个侧部的一个表面处具有布线和电极（94）的多个层（80）。 MEMS衬底通过载体电极（94）与载体（62）结合而与形成反电极的反射镜（70,72）相对。有利的是，MEMS衬底的手柄层不被去除并且镜子被释放直到与MCM结合之后。驱动致动器的独立高压集成电路（IC）（66）和控制高压IC（66）的低压IC在MCM（62）的与MEMS（60）相对的一侧上结合，其中MCM 电气互连（68）。

4. 发明申请

WO02063596A2 MULTIPLEXED ANALOG CONTROL SYSTEM FOR ELECTROSTATIC ACTUATOR ARRAY 审中-公开
标题翻译：用于静电激励器阵列的多路复用模拟控制系统
公开(公告)号：WO02063596A2
公开(公告)日：2002-08-15
申请号：PCT/US0203420
申请日：2002-02-06
申请人： MOVAZ NETWORKS INC
发明人： GARVERICK STEVEN L , GUO JUN , RAJAN NARAYANAN
IPC分类号： G02B6/12 , G02B6/35 , G02B26/08 , G09F9/37
CPC分类号： G02B26/0841 , G02B6/3512 , G02B6/357 , G02B6/358 , G02B6/3586 , G02B2006/12104
摘要： A multiplexed analog control system for an micro electromechanical systems (MEMS) array (10) of electrostatic sctuators, such as tiltable mirrors (12) in an optical switch. Each sctuator includes a variable gap capacitor (58, 78) formed as part of the movable mechanical element. A hold capacitor (94) is connected to each actuator capacitor, and a selectable high-voltage inverter (96) connects tehm to provide a bipolar drive signal of 50% duty cycle. A single power digital controlled current source (92) is connected to all the drive circuits (62) to provide a high-power correction signal. Address decoders (80, 82) enable a selected one of the drive circuits to add or subtract the correction from the hold capacitor.
摘要翻译：一种用于微机电系统（MEMS）阵列（10）的多路复用模拟控制系统，静电控制器（例如光开关中的可倾斜反射镜）。每个调节器包括形成为可移动机械元件的一部分的可变间隙电容器（58,78）。保持电容器（94）连接到每个致动器电容器，并且可选择的高压逆变器（96）连接tehm以提供50％占空比的双极驱动信号。单个功率数字控制电流源（92）连接到所有驱动电路（62）以提供高功率校正信号。地址解码器（80,82）使所选择的一个驱动电路能够从保持电容器中增加或减去校正。

5. 发明申请

WO0225358A3 VARIABLE TRANSMISSION MULTI-CHANNEL OPTICAL SWITCH 审中-公开
标题翻译：可变传输多通道光纤开关
公开(公告)号：WO0225358A3
公开(公告)日：2003-08-14
申请号：PCT/US0129529
申请日：2001-09-20
申请人： MOVAZ NETWORKS INC
发明人： SMITH DAVID A , GOLUB JOHN E , FARHAN FARIBORZ
IPC分类号： B81B3/00 , G02B6/12 , G02B6/26 , G02B6/34 , G02B6/35 , H04Q11/00 , G02B26/02 , G02B6/24 , H04J14/02
CPC分类号： H04Q11/0005 , G02B6/266 , G02B6/2931 , G02B6/29313 , G02B6/3512 , G02B6/3518 , G02B6/3556 , G02B6/356 , G02B6/357 , G02B6/359 , G02B6/3594 , G02B2006/12104 , H04Q2011/0016 , H04Q2011/0022 , H04Q2011/0024 , H04Q2011/003 , H04Q2011/0039 , H04Q2011/0043 , H04Q2011/0049 , H04Q2011/0052
摘要： A multi-wavelength or white-light optical switch including an array (204) of mirrors (260) tiltable about two axes, both to control the switching and to provide variable power transmission through the switch, both for optimization and for power equalization between wavelength channels in a multi-wavelength signal. The output power of a channel is monitored (210, 212, 218), thereby allowing feedback adjustment (220) of the transmitted power. The mirrors are preferably formed in a micro electromechanics system array to be tiltable in orthogonal directions (266, 272) and having electrostatically controlled tilting by two pairs of electrodes (274, 276) beneath the mirrors (270). Input power of the separate channels may also be monitored (242, 244, 218).
摘要翻译：一种多波长或白光光学开关，包括可围绕两个轴倾斜的反射镜阵列（204），用于控制切换并通过开关提供可变功率传输，用于优化和波长之间的功率均衡多波长信号中的通道。监视通道的输出功率（210,212,218），从而允许发送功率的反馈调整（220）。反射镜优选地形成在微机电系统阵列中，以在正交方向（266,272）上可倾斜并且具有通过反射镜（270）下面的两对电极（274,276）静电控制的倾斜。也可以监视单独通道的输入功率（242,244,218）。

6. 发明申请

WO2003042094A3 MULTI-CHIP MODULE INTEGRATING MEMS MIRROR ARRAY WITH ELECTRONICS 审中-公开
公开(公告)号：WO2003042094A3
公开(公告)日：2003-05-22
申请号：PCT/US2002/035890
申请日：2002-11-07
申请人： MOVAZ NETWORKS, INC.
发明人： BHATTARAI, Amal , RAJAN, Narayanan
IPC分类号： B81B7/04
摘要： An integrated module including an array of electrostatically actuated mirrors usable as an optical switch. An array of tiltable mirrors (70, 72) is formed as a micro electromechanical system (MEMS) in one substrate carrier (60). A ceramic multi-chip module (MCM) (62) is formed having multiple layers (80) of wiring and electrodes (94) at one surface forming one side part of the electrostatic capacitive actuators. The MEMS substrate is bonded to the carrier (62) with the carrier electrodes (94) in opposition to the mirrors (70, 72), which form counter electrodes. Advantageously, a handle layer of the MEMS substrate is not removed and the mirrors released until after the bonding with the MCM. Separate high-voltage integrated circuits (ICs) (66) driving the actuators and low-voltage ICs controlling the high-voltage ICs (66) are bonded on the side of the MCM (62) opposite the MEMS (60) with the MCM providing electrical interconnections (68).

7. 发明申请

WO02084372A2 RECONFIGURABLE FREE SPACE WAVELENGTH CROSS CONNECT 审中-公开
标题翻译：可重复自由空间波长交叉连接
公开(公告)号：WO02084372A2
公开(公告)日：2002-10-24
申请号：PCT/US0211396
申请日：2002-04-11
申请人： MOVAZ NETWORKS INC
发明人： GOLUB JOHN , SMITH DAVID A , PRESLEY HARRY , BAO ZHUOYU
IPC分类号： G02B6/26 , G02B6/34 , G02B6/35 , H04Q11/00 , G02B26/00
CPC分类号： G02B6/356 , G02B6/266 , G02B6/2931 , G02B6/29313 , G02B6/29395 , G02B6/3512 , G02B6/3518 , G02B6/3542 , G02B6/357 , G02B6/3582 , H04Q11/0005 , H04Q2011/0016 , H04Q2011/0022 , H04Q2011/0024 , H04Q2011/003 , H04Q2011/0049 , H04Q2011/0052
摘要： An optical cross connect (100), especially a wavelength cross connect, using free-space optics (106, 114, 116), a diffraction grating (108), and a micro electromechanical systems (MEMS) array (122) of movable mirrors (128). A concentrator (104) receives light from widely separated optical fibers (170) and brings the beams together into a more closely spaced linear array. Free-space optics process all the beams. Front-end optics (106) collimate the beams from the fibers and flatten their fields. The diffraction grating (108) spectrally separates each beam into sub-beams. A long-focus lens (114) focuses the sub-beams onto the 2-dimensional MEMS array (122). A fold mirror (124) reflectively couples two such mirrors, whereby the switched signals propagate back through the same optics and are spectrally recombined onto the fibers. Other embodiments include white-color cross connects, multiple MEMS arrays, and parallel optics. Power dividers (272) or wavelength interleavers can divide signals from the fibers, and multiple cross connects (276a, 276b) switch different wavelength groups.
摘要翻译：使用自由空间光学器件（106,114,116），衍射光栅（108）和可移动反射镜的微机电系统（MEMS）阵列（122）的光学交叉连接（100），特别是波长交叉连接 128）。集中器（104）接收来自广泛分离的光纤（170）的光，并将光束组合成更紧密间隔的线性阵列。自由空间光学处理所有的光束。前端光学器件（106）使来自纤维的光束准直，并平坦化其场。衍射光栅（108）将每个光束光谱分离成子光束。长焦点透镜（114）将子光束聚焦到二维MEMS阵列（122）上。折叠反射镜（124）反射耦合两个这样的反射镜，由此切换的信号通过相同的光学器件传播回来并且被光谱重新结合到光纤上。其他实施例包括白色交叉连接，多个MEMS阵列和并行光学器件。功率分配器（272）或波长交织器可以分离来自光纤的信号，并且多个交叉连接（276a，276b）切换不同的波长组。

8. 发明申请

WO2003042094A2 MULTI-CHIP MODULE INTEGRATING MEMS MIRROR ARRAY WITH ELECTRONICS 审中-公开
标题翻译：多芯片模块集成MEMS电子阵列与电子
公开(公告)号：WO2003042094A2
公开(公告)日：2003-05-22
申请号：PCT/US2002/035890
申请日：2002-11-07
申请人： MOVAZ NETWORKS, INC.
发明人： BHATTARAI, Amal , RAJAN, Narayanan
IPC分类号： B81B7/04
CPC分类号： G02B26/0841 , B81B7/04 , B81B2201/042 , B81C1/00238
摘要： An integrated module including an array of electrostatically actuated mirrors usable as an optical switch. An array of tiltable mirrors (70, 72) is formed as a micro electromechanical system (MEMS) in one substrate carrier (60). A ceramic multi-chip module (MCM) (62) is formed having multiple layers (80) of wiring and electrodes (94) at one surface forming one side part of the electrostatic capacitive actuators. The MEMS substrate is bonded to the carrier (62) with the carrier electrodes (94) in opposition to the mirrors (70, 72), which form counter electrodes. Advantageously, a handle layer of the MEMS substrate is not removed and the mirrors released until after the bonding with the MCM. Separate high-voltage integrated circuits (ICs) (66) driving the actuators and low-voltage ICs controlling the high-voltage ICs (66) are bonded on the side of the MCM (62) opposite the MEMS (60) with the MCM providing electrical interconnections (68).
摘要翻译：一种集成模块，包括可用作光学开关的静电致动反射镜阵列。在一个衬底载体（60）中形成可倾斜反射镜阵列（70,72）作为微机电系统（MEMS）。陶瓷多芯片模块（MCM）（62）形成为在形成静电电容式致动器的一个侧面的一个表面处具有多层（80）布线和电极（94）。 MEMS基板与载体（62）接合，载体电极（94）与形成对电极的反射镜（70,72）相对。有利地，MEMS衬底的手柄层不被去除，并且反射镜释放直到与MCM接合之后。驱动执行器的单独高压集成电路（66）和控制高电压IC（66）的低电压IC与MCM（60）的MCM（62）侧面接合，MCM提供电互连（68）。

9. 发明申请

WO2002084372A3 RECONFIGURABLE FREE SPACE WAVELENGTH CROSS CONNECT 审中-公开
公开(公告)号：WO2002084372A3
公开(公告)日：2002-10-24
申请号：PCT/US2002/011396
申请日：2002-04-11
申请人： MOVAZ NETWORKS, INC.
发明人： GOLUB, John , SMITH, David, A. , PRESLEY, Harry , BAO, Zhuoyu
IPC分类号： G02B6/43
摘要： An optical cross connect (100), especially a wavelength cross connect, using free-space optics (106, 114, 116), a diffraction grating (108), and a micro electromechanical systems (MEMS) array (122) of movable mirrors (128). A concentrator (104) receives light from widely separated optical fibers (170) and brings the beams together into a more closely spaced linear array. Free-space optics process all the beams. Front-end optics (106) collimate the beams from the fibers and flatten their fields. The diffraction grating (108) spectrally separates each beam into sub-beams. A long-focus lens (114) focuses the sub-beams onto the 2-dimensional MEMS array (122). A fold mirror (124) reflectively couples two such mirrors, whereby the switched signals propagate back through the same optics and are spectrally recombined onto the fibers. Other embodiments include white-color cross connects, multiple MEMS arrays, and parallel optics. Power dividers (272) or wavelength interleavers can divide signals from the fibers, and multiple cross connects (276a, 276b) switch different wavelength groups.

10. 发明申请

WO2002060045A2 HIGH FREQUENCY PULSE WIDTH MODULATION DRIVER PARTICULARLY USEFUL FOR ELECTROSTATICALLY ACTUATED MEMS ARRAY 审中-公开
标题翻译：高频脉冲宽度调制驱动器特别适用于静电激励MEMS阵列
公开(公告)号：WO2002060045A2
公开(公告)日：2002-08-01
申请号：PCT/US2002/002265
申请日：2002-01-24
申请人： MOVAZ NETWORKS, INC.
发明人： GARVERICK, Steven, L. , NAGY, Michael, L.
IPC分类号： H02N1/00
CPC分类号： G02B6/357 , G02B6/266 , G02B6/3512 , G02B6/3518 , G02B6/3556 , G02B6/356 , G02B26/0841 , G02B2006/12104 , H04Q11/0005 , H04Q2011/0022 , H04Q2011/0024 , H04Q2011/003 , H04Q2011/0039 , H04Q2011/0049
摘要： Pulse-width modulation (PWM) drive circuitry particularly applicable to an array of electrostatic actuators formed in a micro electromechanical system (MEMS), such as used for optical switching. A control cell associated with each actuator includes a register (222) selectively stored with a desired pulse width. A clocked counter (220) distributes its outputs to all control cells. When the counter matches the register, a polarity signal corresponding to a drive clock is latched and controls the voltage applied to the electrostatic cell. In a bipolar drive, one actuator electrode is driven by a drive clock (CLK); the other, by the latch (228). The MEMS element may be a tiltable plate supported in its middle by a torsion beam. Complementary binary signals may drive two capacitors formed across the axis of the beam. The register and comparison logic for each cell may be formed by a content addressable memory.
摘要翻译：脉宽调制（PWM）驱动电路特别适用于微机电系统（MEMS）中形成的静电致动器阵列，例如用于光开关。与每个致动器相关联的控制单元包括以期望的脉冲宽度选择性地存储的寄存器（222）。计时计数器（220）将其输出分配给所有控制单元。当计数器与寄存器匹配时，锁存与驱动时钟对应的极性信号，并控制施加到静电电池的电压。在双极驱动器中，一个致动器电极由驱动时钟（CLK）驱动; 另一个，通过闩锁（228）。 MEMS元件可以是通过扭转梁在其中间支撑的可倾斜板。互补的二进制信号可以驱动跨过光束的轴形成的两个电容器。每个单元的寄存器和比较逻辑可以由内容可寻址存储器形成。

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