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    • 2. 发明申请
    • PRESSURE SENSOR
    • 压力传感器
    • WO1997032190A1
    • 1997-09-04
    • PCT/NO1997000053
    • 1997-02-20
    • NYFOTEK A/SMERINGDAL, FrodeSEEBERG, Bjorn, Erik
    • NYFOTEK A/S
    • G01L09/06
    • G01L9/0002
    • Pressure sensor in particular for very high pressures, preferably adapted to act externally on a measuring element (1), said measuring element having a central cavity (3) and being composed of two parts (1A-B) which are sealingly joined in order to form the cavity, and comprising sensor means (11-14) for the mechanical stress condition of the measuring element when subjected to pressure. The two parts (1A-B) of the measuring element are manufactured in planar technology, preferably of silicium or quartz, and have a substantially larger length than lateral dimensions, with the cavity oriented in the longitudinal direction. Said sensor means (11-14) are in the form of piezo-resistive elements lying adjacent to an external (5) or an internal surface of the measuring element.
    • 压力传感器特别是用于非常高的压力,优选地适于在测量元件(1)上向外作用,所述测量元件具有中心空腔(3),并且由两部分(1A-B)组成,所述两个部分(1A-B)密封地接合,以便 形成空腔,并且包括当经受压力时测量元件的机械应力状态的传感器装置(11-14)。 测量元件的两个部分(1A-B)以平面技术制造,优选为硅或石英,并且具有比侧向尺寸大得多的长度,其中空腔沿纵向取向。 所述传感器装置(11-14)具有邻近测量元件的外部(5)或内部表面的压阻元件的形式。