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    • 5. 发明申请
    • COMPOSITE SPUTTER TARGET AND PHOSPHOR DEPOSITION METHOD
    • 复合溅射靶和磷沉积方法
    • WO2004055231A2
    • 2004-07-01
    • PCT/CA2003/001887
    • 2003-12-04
    • IFIRE TECHNOLOGY INC.KOSYACHKOV, Alexander
    • KOSYACHKOV, Alexander
    • C23C14/00
    • C09K11/7731C09K11/7729C23C14/0036C23C14/06C23C14/0623C23C14/34C23C14/3414C23C14/548
    • The invention is a novel sputter target and deposition method for multi-element thin film phosphors for thick film dielectric electroluminescent displays in which the deposited phosphors provide a high luminance and colors required for TV applications. The method comprises sputtering a single composite target in a low pressure sputtering atmosphere that comprises gases containing reactive species and non-reactive species. The composite target comprising a matrix phase and an inclusion phase, or two matrix phases, wherein one of the phases comprises one or more metallic elements that contribute to the composition of the phosphor and the other of the phases comprises the remaining elements that contribute to the composition of the phosphor. In the method the pressure of the reactive species within the sputtering atmosphere is varied to control the sputtering rate of the matrix and inclusion phases of the composite target to cause the ratio of the elements in the two phases to deposit in a desired ratio as a phosphor film on the substrate.
    • 本发明是用于厚膜电介质电致发光显示器的多元素薄膜荧光体的新型溅射靶和沉积方法,其中沉积的磷光体提供电视应用所需的高亮度和颜色。 该方法包括在包含含有反应性物质和非反应性物质的气体的低压溅射气氛中溅射单一复合靶。 所述复合靶包含基质相和夹杂相或两个基质相,其中所述相中的一个包括有助于所述磷光体组成的一种或多种金属元素,并且所述相中的另一种包含有助于所述荧光体的剩余元素 磷光体的组成。 在该方法中,改变溅射气氛中反应性物质的压力以控制复合靶材的基质和夹杂相的溅射速率,以使两相中的元素的比例以期望的比例沉积为荧光体 薄膜在基材上。
    • 7. 发明申请
    • COMPOSITE SPUTTER TARGET AND PHOSPHOR DEPOSITION METHOD
    • 复合材料溅射靶和磷沉积法
    • WO2004055231A3
    • 2004-11-18
    • PCT/CA0301887
    • 2003-12-04
    • IFIRE TECHNOLOGY INCKOSYACHKOV ALEXANDER
    • KOSYACHKOV ALEXANDER
    • C09K11/77C23C14/00C23C14/06C23C14/34C23C14/54C09K11/80C09K11/84H05B33/14
    • C09K11/7731C09K11/7729C23C14/0036C23C14/06C23C14/0623C23C14/34C23C14/3414C23C14/548
    • The invention is a novel sputter target and deposition method for multi-element thin film phosphors for thick film dielectric electroluminescent displays in which the deposited phosphors provide a high luminance and colors required for TV applications. The method comprises sputtering a single composite target in a low pressure sputtering atmosphere that comprises gases containing reactive species and non-reactive species. The composite target comprising a matrix phase and an inclusion phase, or two matrix phases, wherein one of the phases comprises one or more metallic elements that contribute to the composition of the phosphor and the other of the phases comprises the remaining elements that contribute to the composition of the phosphor. In the method the pressure of the reactive species within the sputtering atmosphere is varied to control the sputtering rate of the matrix and inclusion phases of the composite target to cause the ratio of the elements in the two phases to deposit in a desired ratio as a phosphor film on the substrate.
    • 本发明是一种用于厚膜电介质电致发光显示器的多元件薄膜荧光体的新型溅射靶和沉积方法,其中沉积的荧光体提供电视应用所需的高亮度和颜色。 该方法包括在包含含有反应性物质和非反应性物质的气体的低压溅射气氛中溅射单个复合靶。 所述复合靶包含基质相和夹杂物相或两种基质相,其中所述相中的一种包含一种或多种有助于磷光体组成的金属元素,而另一种相包含有助于 荧光粉的组成。 在该方法中,改变溅射气氛内的反应性物质的压力以控制复合靶的基质和夹杂物相的溅射速率,以使两相中的元素的比例以所需比率沉积为磷光体 基材上的薄膜。
    • 9. 发明申请
    • SINGLE SOURCE SPUTTERING OF THIOALUMINATE PHOSPHOR FILMS
    • 硫酸铝磷酸膜的单源溅射
    • WO2002097155A1
    • 2002-12-05
    • PCT/CA2002/000688
    • 2002-05-07
    • IFIRE TECHNOLOGY INC.KOSYACHKOV, Alexander
    • KOSYACHKOV, Alexander
    • C23C14/06
    • C09K11/7731C23C14/0057C23C14/0623
    • A method of deposition of a phosphor in a single-source sputtering process, in which the phosphor is selected from the group consisting of ternary, quaternary or higher thioaluminate, thiogallate and thioindate phosphors, and composites thereof, synthesized with cations selected from Groups IIA and IIB of the Periodic Table of Elements. The phosphor is of a pre-determined composition of elements. The method comprising sputtering in a hydrogen sulphide atmosphere from a single source composition so as to deposit a composition on a substrate. The composition of the targets of the single source has a relative increase in concentration of elements of the phosphor that have a lower atomic weight compared to other elements in said phosphor. The relative increase is controlled such that deposition of the pre-determined composition is effected on the substrate. Preferred phosphors are barium thioaluminate (BaAl 2 S 4 :Eu), and barium magnesium thioaluminates.
    • 一种在单源溅射工艺中沉积磷光体的方法,其中磷光体选自三元,四元或更高硫代铝酸盐,硫代镓酸盐和硫酸盐磷光体及其复合物,其与选自IIA族和 元素周期表IIB。 荧光体是元素的预定组成。 该方法包括在单一源组合物中在硫化氢气氛中溅射以将组合物沉积在基底上。 与所述荧光体中的其它元素相比,单源的靶的组成相对于具有较低原子量的荧光体元素的浓度相对增加。 控制相对增加使得预先确定的组合物的沉积在基材上进行。 优选的磷光体是硫铝酸钡(BaAl 2 S 4:Eu)和硫铝酸钡镁。