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1. 发明申请

WO2004088359A2 A DEVICE AND A METHOD FOR INTEGRATED MULTI-CHANNEL MEMS VARIABLE OPTICAL ATTENUATORS 审中-公开
标题翻译：集成多通道MEMS可变光学衰减器的装置和方法
公开(公告)号：WO2004088359A2
公开(公告)日：2004-10-14
申请号：PCT/IL2004000283
申请日：2004-03-29
申请人： BLUEBIRD OPTICAL MEMS LTD , OZ OPTICS LTD , JACOBSON CLAUDIO G , NEMIROVSKY AMIKAM , SEZERMAN OMUR , KALDOR SHMUEL , SIDOROV ELENA
发明人： JACOBSON CLAUDIO G , NEMIROVSKY AMIKAM , SEZERMAN OMUR , KALDOR SHMUEL , SIDOROV ELENA
IPC分类号： G02B6/26 , G02B6/35 , G02B
CPC分类号： G02B6/352 , G02B6/266 , G02B6/3514 , G02B6/353 , G02B6/3552 , G02B6/3566 , G02B6/357 , G02B6/3588 , G02B6/3594
摘要： A single or multi-channel MEMS (Micro Electro Mechanical Systems) variable optical attenuator employing a novel construction method. An optical fiber or waveguide is secured on a substrate, for example in a groove formed in the substrate, and is then cut to an appropriate depth (by dicing, etching, laser cutting or any other means) for ensuring alignment between the two fiber segments thus obtained, thus eliminating prior art misalignment problems. After securing and cutting of the fiber, a MEMS shutter is arranged for dynamically controlled positioning in the gap, to block any required amount of the power of an optical signal that propagates in the gap between the optical fiber segments. The amount of blocking is controlled using electrostatic actuation or by any other means, to provide the instantaneously required attenuation. An integrated power monitoring mechanism may be used to establish the shutter position (independently for each shutter in the case of multi-channel array) so that output power remains at a predetermined value.
摘要翻译：采用新颖施工方法的单通道或多通道MEMS（微机电系统）可变光衰减器。光纤或波导固定在基板上，例如在衬底中形成的凹槽中，然后被切割成适当的深度（通过切割，蚀刻，激光切割或任何其它方式），以确保两个光纤段之间的对准从而消除了现有技术的不对准问题。在光纤固定和切割之后，MEMS快门被布置用于间隙中的动态控制定位，以阻挡在光纤段之间的间隙中传播的光信号的任何所需量的功率。使用静电致动或任何其他方式来控制阻塞量，以提供即时需要的衰减。可以使用集成的功率监视机构来建立快门位置（在多通道阵列的情况下，针对每个快门独立地），使得输出功率保持在预定值。

2. 发明申请

WO2006077600A3 A MICRO-MACHINED MAGNETIC SWITCH 审中-公开
标题翻译：微机电磁开关
公开(公告)号：WO2006077600A3
公开(公告)日：2006-12-07
申请号：PCT/IL2006000095
申请日：2006-01-24
申请人： BLUEBIRD OPTICAL MEMS LTD , NEMIROVSKY AMIKAM , SIDOROV ELENA , KALDOR SHMUEL , JAKOBSON CLAUDIO , FELDMAN SHAI
发明人： NEMIROVSKY AMIKAM , SIDOROV ELENA , KALDOR SHMUEL , JAKOBSON CLAUDIO , FELDMAN SHAI
IPC分类号： H01H51/22 , H01H57/00
CPC分类号： H01H1/0036 , H01H2001/0005 , H01H2001/0052 , H01H2001/0078 , H01H2036/0093
摘要： A micro-machined magnetic switch that operates under a magnetic force to close. A single-pole single-touch (SPST) implementation as well as a single-pole double-touch (SPDT) are shown. The micro-machined switch is designed to allow for enhanced magnetic flux, for achieving higher magnetic switching force, while maintaining the flexibility of the moving beam of the switch. In particular the moving beam provides for separate spring like action on one magnetic flux path and an additional, relatively significant, magnetic flux on another path, such that both of the fluxes contribute to the switching force. In one embodiment of the disclosed invention an oversized ferromagnetic magnetic flux collector(144), which is monolithically produced with a flexible beam (142) and is made by deposition of a ferromagnetic material, is used to direct the magnetic flux, for the purpose of providing sufficient force to enable the moving beam's motion for the purpose of closing an electrical path.
摘要翻译：在磁力作用下关闭的微加工磁开关。显示单刀单触（SPST）实现以及单刀双触（SPDT）。微加工开关设计成允许增强的磁通量，以实现更高的磁开关力，同时保持开关的移动光束的灵活性。特别地，移动梁在一个磁通路上提供单独的弹簧状作用，并且在另一个路径上提供另外的相对重要的磁通，使得两个通量都有助于切换力。在所公开的发明的一个实施例中，使用由柔性梁（142）整体制造并通过沉积铁磁材料制成的过大的铁磁性磁通量收集器（144）用于引导磁通量，用于提供足够的力以使移动梁的运动是为了闭合电路径。

3. 发明申请

WO2006077600A2 A MICRO-MACHINED MAGNETIC SWITCH 审中-公开
标题翻译：微机电磁开关
公开(公告)号：WO2006077600A2
公开(公告)日：2006-07-27
申请号：PCT/IL2006/000095
申请日：2006-01-24
申请人： BLUEBIRD OPTICAL MEMS LTD. , NEMIROVSKY, Amikam , SIDOROV, Elena , KALDOR, Shmuel , JAKOBSON, Claudio , FELDMAN, Shai
发明人： NEMIROVSKY, Amikam , SIDOROV, Elena , KALDOR, Shmuel , JAKOBSON, Claudio , FELDMAN, Shai
IPC分类号： H05K7/20
CPC分类号： H01H1/0036 , H01H2001/0005 , H01H2001/0052 , H01H2001/0078 , H01H2036/0093
摘要： A micro-machined magnetic switch that operates under a magnetic force to close. A single-pole single-touch (SPST) implementation as well as a single-pole double-touch (SPDT) are shown. The micro-machined switch is designed to allow for enhanced magnetic flux, for achieving higher magnetic switching force, while maintaining the flexibility of the moving beam of the switch. In particular the moving beam provides for separate spring like action on one magnetic flux path and an additional, relatively significant, magnetic flux on another path, such that both of the fluxes contribute to the switching force. In one embodiment of the disclosed invention an oversized ferromagnetic magnetic flux collector, which is monolithically produced with a flexible beam and is made by deposition of a ferromagnetic material, is used to direct the magnetic flux, for the purpose of providing sufficient force to enable the moving beam's motion for the purpose of closing an electrical path.
摘要翻译：在磁力作用下关闭的微加工磁开关。显示单刀单触（SPST）实现以及单刀双触（SPDT）。微加工开关设计成允许增强的磁通量，以实现更高的磁开关力，同时保持开关的移动光束的灵活性。特别地，移动梁在一个磁通路上提供单独的弹簧状作用，并且在另一个路径上提供另外的相对重要的磁通，使得两个通量都有助于切换力。在所公开的发明的一个实施例中，为了提供足够的力量，为了引导磁通量，使用由柔性梁单片制造并通过沉积铁磁材料制成的过大的铁磁性磁通量收集器移动梁的运动是为了闭合电气路径。

4. 发明申请

WO2004088359A3 A DEVICE AND A METHOD FOR INTEGRATED MULTI-CHANNEL MEMS VARIABLE OPTICAL ATTENUATORS 审中-公开
公开(公告)号：WO2004088359A3
公开(公告)日：2004-10-14
申请号：PCT/IL2004/000283
申请日：2004-03-29
申请人： BLUEBIRD OPTICAL MEMS LTD. , OZ OPTICS LTD. , JACOBSON, Claudio G. , NEMIROVSKY, Amikam , SEZERMAN, Omur , KALDOR, Shmuel , SIDOROV, Elena
发明人： JACOBSON, Claudio G. , NEMIROVSKY, Amikam , SEZERMAN, Omur , KALDOR, Shmuel , SIDOROV, Elena
IPC分类号： G02B6/00
摘要： A single or multi-channel MEMS (Micro Electro Mechanical Systems) variable optical attenuator employing a novel construction method. An optical fiber (18) or waveguide is secured on a substrate (32), for example in a groove (36) formed in the substrate (32), and is then cut to an appropriate depth (by dicing, etching, laser cutting or any other means) for ensuring alignment between the two fiber segments (22, 24) thus obtained, thus eliminating prior art misalignment problems. After securing and cutting of the fiber (18), a MEMS shutter (26) is arranged for dynamically controlled positioning in the gap (28), to block any required amount of the power of an optical signal that propagates in the gap (28) between the optical fiber segments (22, 24). The amount of blocking is controlled using electrostatic actuation or by any other means, to provide the instantaneously required attenuation

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