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1. 发明申请

WO2011150321A1 PHOTON DETECTOR BASED ON SUPERCONDUCTING NANOWIRES 审中-公开
标题翻译：基于超导陶瓷的光电探测器
公开(公告)号：WO2011150321A1
公开(公告)日：2011-12-01
申请号：PCT/US2011/038314
申请日：2011-05-27
申请人： MASSACHUSETTS INSTITUTE OF TECHNOLOGY , BERGGREN, Karl, K. , HU, Xiaolong , MASCIARELLI, Daniele
发明人： BERGGREN, Karl, K. , HU, Xiaolong , MASCIARELLI, Daniele
IPC分类号： G01J1/42 , H01L39/24
CPC分类号： G01J1/42 , H01L39/10 , H01L39/2416
摘要： Systems, articles, and methods are provided related to nano wire-based detectors, which can be used for light detection in, for example, single-photon detectors. In one aspect, a variety of detectors are provided, for example one including an electrically superconductive nanowire or nanowires constructed and arranged to interact with photons to produce a detectable signal. In another aspect, fabrication methods are provided, including techniques to precisely reproduce patterns in subsequently formed layers of material using a relatively small number of fabrication steps. By precisely reproducing patterns in multiple material layers, one can form electrically insulating materials and electrically conductive materials in shapes such that incoming photons are redirected toward a nearby electrically superconductive materials (e.g., electrically superconductive nanowire(s)). For example, one or more resonance structures (e.g., comprising an electrically insulating material), which can trap electromagnetic radiation within its boundaries, can be positioned proximate the nanowire(s). The resonance structure can include, at its boundaries, electrically conductive material positioned proximate the electrically superconductive nanowire such that light that would otherwise be transmitted through the sensor is redirected toward the nanowire(s) and detected. In addition, electrically conductive material can be positioned proximate the electrically superconductive nanowire (e.g. at the aperture of the resonant structure), such that light is directed by scattering from this structure into the nanowire.
摘要翻译：提供了与纳米线基检测器相关的系统，制品和方法，其可以用于例如单光子检测器中的光检测。在一个方面，提供了各种检测器，例如包括电超导纳米线或纳米线构造和布置为与光子相互作用以产生可检测信号的检测器。在另一方面，提供了制造方法，包括使用相对较少数量的制造步骤精确再现随后形成的材料层中的图案的技术。通过精确地再现多个材料层中的图案，可以形成电绝缘材料和导电材料的形状，使得入射光子被重定向到附近的电超导材料（例如，电超导纳米线）。例如，可以将电磁辐射捕获在其边界内的一个或多个共振结构（例如，包括电绝缘材料）可以位于纳米线附近。共振结构在其边界处可以包括位于电超导纳米线附近的导电材料，使得否则将通过传感器传输的光被重定向到纳米线并被检测。此外，导电材料可以位于电超导纳米线附近（例如在谐振结构的孔处），使得光通过从该结构散射到纳米线中而被引导。

2. 发明申请

WO2012166686A2 ELECTRONIC, OPTICAL AND/OR MECHANICAL APPARATUS AND SYSTEMS AND METHODS FOR FABRICATING SAME 审中-公开
标题翻译：电子，光学和/或机械装置及其制造方法
公开(公告)号：WO2012166686A2
公开(公告)日：2012-12-06
申请号：PCT/US2012039779
申请日：2012-05-27
申请人： MC10 INC , GHAFFARI ROOZBEH , DE GRAFF BASSEL , ARORA WILLIAM , HU XIAOLONG , ELOLAMPI BRIAN
发明人： GHAFFARI ROOZBEH , DE GRAFF BASSEL , ARORA WILLIAM , HU XIAOLONG , ELOLAMPI BRIAN
IPC分类号： H01L21/28
CPC分类号： H05K1/0278 , H01L21/6835 , H01L23/13 , H01L23/4985 , H01L23/5389 , H01L25/0655 , H01L25/072 , H01L25/50 , H01L2221/68318 , H01L2221/6835 , H01L2221/68368 , H01L2221/68381 , H01L2224/24137 , H01L2224/73267 , H01L2224/92244 , H01L2924/1461 , H05K1/0326 , H05K1/0346 , H05K1/115 , H05K3/067 , H05K3/4644 , H05K2201/0141 , H05K2201/0145 , H05K2201/0154 , H01L2924/00
摘要： Flexible electronic structure and methods for fabricating flexible electronic structures are provided. An example method includes applying a first layer to a substrate, creating a plurality of vias through the first layer to the substrate, and applying a second polymer layer to the first layer such that the second polymer forms anchors contacting at least a portion of the substrate. At least one electronic device layer is disposed on a portion of the second polymer layer. At least one trench is formed through the second polymer layer to expose at least a portion of the first layer. At least a portion of the first layer is removed by exposing the structure to a selective etchant to providing a flexible electronic structure that is in contact with the substrate. The electronic structure can be released from the substrate.
摘要翻译：提供了柔性电子结构和制造柔性电子结构的方法。一个示例性方法包括将第一层施加到衬底，产生通过第一层到衬底的多个通孔，以及向第一层施加第二聚合物层，使得第二聚合物形成与衬底的至少一部分接触的锚固件。至少一个电子器件层设置在第二聚合物层的一部分上。通过第二聚合物层形成至少一个沟槽以暴露第一层的至少一部分。通过将结构暴露于选择性蚀刻剂以提供与衬底接触的柔性电子结构来去除第一层的至少一部分。电子结构可以从衬底释放。

3. 发明申请

WO2012166686A3 ELECTRONIC, OPTICAL AND/OR MECHANICAL APPARATUS AND SYSTEMS AND METHODS FOR FABRICATING SAME 审中-公开
公开(公告)号：WO2012166686A3
公开(公告)日：2012-12-06
申请号：PCT/US2012/039779
申请日：2012-05-27
申请人： MC10, INC. , GHAFFARI, Roozbeh , DE GRAFF, Bassel , ARORA, William , HU, Xiaolong , ELOLAMPI, Brian
发明人： GHAFFARI, Roozbeh , DE GRAFF, Bassel , ARORA, William , HU, Xiaolong , ELOLAMPI, Brian
IPC分类号： H05K1/00
摘要： Flexible electronic structure and methods for fabricating flexible electronic structures are provided. An example method includes applying a first layer to a substrate, creating a plurality of vias through the first layer to the substrate, and applying a second polymer layer to the first layer such that the second polymer forms anchors contacting at least a portion of the substrate. At least one electronic device layer is disposed on a portion of the second polymer layer. At least one trench is formed through the second polymer layer to expose at least a portion of the first layer. At least a portion of the first layer is removed by exposing the structure to a selective etchant to providing a flexible electronic structure that is in contact with the substrate. The electronic structure can be released from the substrate.

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