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    • 7. 发明申请
    • CMUTS WITH A HIGH-K DIELECTRIC
    • 具有高K电介质的CMUTS
    • WO2009016606A2
    • 2009-02-05
    • PCT/IB2008/053082
    • 2008-07-31
    • KONINKLIJKE PHILIPS ELECTRONICS, N.V.ROEST, Aarnoud LaurensREIMANN, KlausKLEE, MariekeVAN BEEK, Jozef Thomas MartinusFRASER, John Douglas
    • ROEST, Aarnoud LaurensREIMANN, KlausKLEE, MariekeVAN BEEK, Jozef Thomas MartinusFRASER, John Douglas
    • B06B1/16
    • B06B1/0292
    • A capacitive ultrasound transducer includes a first electrode, a second electrode, and a third electrode, the third electrode including a central region disposed in collapsibly spaced relation with the first electrode, and a peripheral region disposed outward of the central region and disposed in collapsibly spaced relation with the second electrode. The transducer further includes a layer of a high dielectric constant material disposed between the third electrode and the first electrode, and between the third electrode and the second electrode. The transducer may be operable in a collapsed mode wherein the peripheral region of the third electrode oscillates relative to the second electrode, and the central region of the third electrode is fully collapsed with respect to the first electrode such that the dielectric layer is sandwiched therebetween. Piezoelectric actuation, such as d31 and d33 mode piezoelectric actuation, may further be included. A medical imaging system includes an array of such capacitive ultrasound transducers disposed on a common substrate.
    • 电容式超声波换能器包括第一电极,第二电极和第三电极,所述第三电极包括与所述第一电极以可折叠间隔开的关系设置的中心区域,以及设置在所述中心区域外侧的周边区域, 与第二电极的关系。 换能器还包括设置在第三电极和第一电极之间以及第三电极和第二电极之间的高介电常数材料层。 换能器可以以折叠模式操作,其中第三电极的周边区域相对于第二电极振荡,并且第三电极的中心区域相对于第一电极完全折叠,使得介电层夹在其间。 可以进一步包括诸如d31和d33模式压电致动的压电致动。 医疗成像系统包括设置在公共基底上的这种电容式超声换能器阵列。
    • 8. 发明申请
    • COLLAPSED MODE OPERABLE CMUT INCLUDING CONTOURED SUBSTRATE
    • 收缩模式可操作,包括嵌入式基板
    • WO2009077961A3
    • 2010-09-02
    • PCT/IB2008055279
    • 2008-12-12
    • KONINKL PHILIPS ELECTRONICS NVPETRUZZELLO JOHNFRASER JOHN DOUGLASZHOU SHIWEIDUFORT BENOITLETAVIC THEODORE JAMES
    • PETRUZZELLO JOHNFRASER JOHN DOUGLASZHOU SHIWEIDUFORT BENOITLETAVIC THEODORE JAMES
    • B06B1/02
    • B06B1/0292
    • A capacitive ultrasound transducer capable of operation in collapsed mode either with a reduced bias voltage, or with no bias voltage, is provided. The transducer includes a substrate that is contoured so that a middle region of the flexible membrane is collapsed against the substrate in the absence of a bias voltage. A non-collapsible gap may exists between the substrate and peripheral regions of the flexible membrane. The contour of the substrate may be such as to strain the flexible membrane past the point of collapse, or to mechanically interfere with the flexible membrane. The substrate may include a further membrane disposed beneath the flexible membrane, the further membrane being contoured so that the flexible membrane is collapsed against it. The substrate may a support disposed beneath the further membrane to deflect a corresponding portion of the further membrane upward toward the flexible membrane. The support may be a post. The transducer may be operated in collapse mode with an improved efficiency (k2 eff) as compared to otherwise similar conventional transducers exhibiting comparably uncontoured substrates. A related medical imaging system is provided, which may include an array of such transducers disposed on a common substrate. A method of operating such a transducer is provided that includes operating the transducer in the collapse mode in the absence of a bias voltage.
    • 提供能够以折叠模式操作或者具有降低的偏置电压或没有偏置电压的电容式超声换能器。 换能器包括基底,该基底的轮廓使得柔性膜的中间区域在没有偏置电压的情况下相对于基底折叠。 在柔性膜的基底和周边区域之间可能存在不可收缩的间隙。 衬底的轮廓可以是使柔性膜经过塌陷点,或机械地干涉柔性膜。 衬底可以包括设置在柔性膜下方的另一膜,另外的膜被成形为使得柔性膜相对于其折叠。 衬底可以是设置在另外的膜下方的支撑件,以将另外的膜的相应部分向上朝向柔性膜偏转。 支持可能是一个帖子。 传感器可以在崩溃模式下操作,与具有相当的未构图基底的其它相似的传统换能器相比,效率(k 2 eff)提高。 提供了一种相关的医学成像系统,其可以包括设置在公共基底上的这种换能器阵列。 提供了一种操作这种换能器的方法,其包括在没有偏置电压的情况下以折叠模式操作换能器。
    • 10. 发明申请
    • CMUTS WITH A HIGH-K DIELECTRIC
    • 具有高K电介质的CMU
    • WO2009016606A3
    • 2009-08-06
    • PCT/IB2008053082
    • 2008-07-31
    • KONINKL PHILIPS ELECTRONICS NVROEST AARNOUD LAURENSREIMANN KLAUSKLEE MARIEKEVAN BEEK JOZEF THOMAS MARTINUSFRASER JOHN DOUGLAS
    • ROEST AARNOUD LAURENSREIMANN KLAUSKLEE MARIEKEVAN BEEK JOZEF THOMAS MARTINUSFRASER JOHN DOUGLAS
    • B06B1/02
    • B06B1/0292
    • A capacitive ultrasound transducer includes a first electrode, a second electrode, and a third electrode, the third electrode including a central region disposed in collapsibly spaced relation with the first electrode, and a peripheral region disposed outward of the central region and disposed in collapsibly spaced relation with the second electrode. The transducer further includes a layer of a high dielectric constant material disposed between the third electrode and the first electrode, and between the third electrode and the second electrode. The transducer may be operable in a collapsed mode wherein the peripheral region of the third electrode oscillates relative to the second electrode, and the central region of the third electrode is fully collapsed with respect to the first electrode such that the dielectric layer is sandwiched therebetween. Piezoelectric actuation, such as d31 and d33 mode piezoelectric actuation, may further be included. A medical imaging system includes an array of such capacitive ultrasound transducers disposed on a common substrate.
    • 电容式超声换能器包括第一电极,第二电极和第三电极,第三电极包括设置成与第一电极可收缩地间隔开的中央区域以及设置在中央区域外侧并以可收缩间隔布置的外围区域 与第二电极的关系。 换能器还包括设置在第三电极和第一电极之间以及第三电极和第二电极之间的高介电常数材料层。 换能器可以以塌陷模式操作,其中第三电极的外围区域相对于第二电极振荡,并且第三电极的中心区域相对于第一电极完全塌陷,使得介电层夹在它们之间。 还可以包括压电致动,例如d31和d33模式压电致动。 医学成像系统包括设置在公共衬底上的这种电容式超声换能器阵列。