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1. 发明申请

WO2003026363A1 DISCHARGE SOURCE WITH GAS CURTAIN FOR PROTECTING OPTICS FROM PARTICLES 审中-公开
标题翻译：放射源用于保护颗粒中的光学玻璃
公开(公告)号：WO2003026363A1
公开(公告)日：2003-03-27
申请号：PCT/US2002/024092
申请日：2002-07-29
申请人： EUV LIMITED LIABILITY CORPORATION , FORNACIARI, Neal, R. , KANOUFF, Michael, P.
发明人： FORNACIARI, Neal, R. , KANOUFF, Michael, P.
IPC分类号： H05G2/00
CPC分类号： H05G2/003 , B82Y10/00 , G03F7/70033 , G03F7/70908 , H05G2/005
摘要： A gas curtain device is employed to deflect debris that is generated by an extreme ultraviolet and soft x-ray radiation discharge source such as an electric discharge plasma source. The gas curtain device projects a stream of gas over the path of the radiation to deflect debris particles into a direction that is different from that of the path of the radiation. The gas curtain can be employed to prevent debris accumulation on the optics used in photolithography.
摘要翻译：气幕装置用于偏转由诸如放电等离子体源的极紫外和软X射线放射源产生的碎片。气幕装置在辐射路径上投射气流以将碎屑颗粒偏转成与辐射路径不同的方向。可以使用气幕来防止在光刻中使用的光学器件上的碎片积聚。优选地，气幕以超音速流动。

2. 发明申请

WO03026363A8 DISCHARGE SOURCE WITH GAS CURTAIN FOR PROTECTING OPTICS FROM PARTICLES 审中-公开
标题翻译：放射源用于保护颗粒中的光学玻璃
公开(公告)号：WO03026363A8
公开(公告)日：2004-02-19
申请号：PCT/US0224092
申请日：2002-07-29
申请人： EUV LLC , FORNACIARI NEAL R , KANOUFF MICHAEL P
发明人： FORNACIARI NEAL R , KANOUFF MICHAEL P
IPC分类号： G21K1/00 , G03F7/20 , G21K5/08 , H05G2/00 , H05H1/24
CPC分类号： H05G2/003 , B82Y10/00 , G03F7/70033 , G03F7/70908 , H05G2/005
摘要： A gas curtain device is employed to deflect debris that is generated by an extreme ultraviolet and soft x-ray radiation discharge source such as an electric discharge plasma source. The gas curtain device projects a stream of gas over the path of the radiation to deflect debris particles into a direction that is different from that of the path of the radiation. The gas curtain can be employed to prevent debris accumulation on the optics used in photolithography. Preferably, the gas curtain flows at supersonic speeds.
摘要翻译：气幕装置用于偏转由诸如放电等离子体源的极紫外和软X射线放射源产生的碎片。气幕装置在辐射路径上投射气流以将碎屑颗粒偏转成与辐射路径不同的方向。可以使用气幕来防止在光刻中使用的光学器件上的碎片积聚。优选地，气幕以超音速流动。

3. 发明申请

WO2002074022A1 ELECTRODE CONFIGURATION FOR EXTREME-UV ELECTRICAL DISCHARGE SOURCE 审中-公开
标题翻译：用于极光紫外线放电源的电极配置
公开(公告)号：WO2002074022A1
公开(公告)日：2002-09-19
申请号：PCT/US2001/050949
申请日：2001-12-12
申请人： EUV LIMITED LIABILITY CORPORATION , SPENCE, Paul, A. , FORNACIARI, Neal, R. , CHANG, Jim, Jihchyun
发明人： SPENCE, Paul, A. , FORNACIARI, Neal, R. , CHANG, Jim, Jihchyun
IPC分类号： H05G2/00
CPC分类号： H05G2/003
摘要： It has been demonstrated that debris generation within an electric capillary discharge source, for generating extreme ultraviolet and soft x-ray, is dependent on the magnitude and profile of the electric field that is established along the surfaces of the electrodes. An electrode shape that results in uniform electric field strength along its surface has been developed to minimize sputtering and debris generation. The electric discharge plasma source includes: (a) a body that defines a circular capillary bore that has a proximal end and a distal end; (b) a back electrode positioned around and adjacent to the distal end of the capillary bore wherein the back electrode has a channel that is in communication with the distal end and that is defined by a non-uniform inner surface which exhibits a first region which is convex, a second region which is concave, and a third region which is convex wherein the regions are viewed outwardly from the inner surface of the channel that is adjacent the distal end of the capillary bore so that the first region is closest to the distal end; (c) a front electrode positioned around and adjacent to the proximal end of the capillary bore wherein the front electrode has an opening that is communication with the proximal end and that is defined by a non-uniform inner surface which exhibits a first region which is convex, a second region which is substantially linear, and third region which is convex wherein the regions are viewed outwardly from the inner surface of the opening that is adjacent the proximal end of the capillary bore so that the first region is closest to the proximal end; and (d) a source of electric potential that is connected across the front and back electrodes.
摘要翻译：已经证明，用于产生极端紫外线和软X射线的电毛细管放电源内的碎屑产生取决于沿着电极表面建立的电场的大小和分布。已经开发出沿其表面导致均匀电场强度的电极形状，以最小化溅射和碎片产生。放电等离子体源包括：（a）限定具有近端和远端的圆形毛细孔的主体; （b）位于毛细管孔的远端周围并与其邻近的背电极，其中所述背电极具有与所述远端连通并且由不均匀内表面限定的通道，所述不均匀内表面具有第一区域，所述第一区域是凸的，第二区域是凹形的，以及第三区域，其中所述区域从所述通道的与所述毛细孔的远端相邻的所述通道的内表面向外看，使得所述第一区域最靠近所述远端结束; （c）位于毛细管孔的近端周围并邻近毛细管孔的近端的前电极，其中前电极具有与近端连通并且由不均匀内表面限定的开口，该不均匀内表面呈现第一区域，凸起的，基本上线性的第二区域和凸起的第三区域，其中从邻近毛细孔的近端的开口的内表面向外观察区域，使得第一区域最接近近端 ; 和（d）连接在前后电极两端的电位源。

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