会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 6. 发明申请
    • DISPLACEMENT DEVICE
    • 位移装置
    • WO2006075291A2
    • 2006-07-20
    • PCT/IB2006/050088
    • 2006-01-10
    • KONINKLIJKE PHILIPS ELECTRONICS N.V.COMPTER, Johan, C.FRISSEN, Petrus, C., M.VAN EIJK, Jan
    • COMPTER, Johan, C.FRISSEN, Petrus, C., M.VAN EIJK, Jan
    • G03F7/20
    • G03F7/70758Y10S414/135
    • Especially for use in the semiconductor industry, a displacement device (701) is disclosed comprising a first part comprising a carrier (714) on which a system of magnets (710) is arranged according to a pattern of row and columns extending parallel to the X- direction and the Y-direction, respectively. The magnets in each row and column are arranged according to a Halbach array, i.e. the magnetic orientation of successive magnets in each row and each column rotates 90° counter-clockwise. The second part comprises an electric coil system (712) with two types of electric coils, one type having an angular offset of +45°, and the other type having an offset of -45° with respect to the X-direction. The first part (714, 710) is movable over a range of centimeters or more with respect to the stationary second part (712). For high precision positioning of the first part, an interferometer system (731, 730) is provided.
    • 特别是用于半导体工业中,公开了一种位移装置(701),其包括第一部分,该第一部分包括载体(714),磁体系统(710)根据平行于X的行和列的图案排列在其上 - 方向和Y方向。 每行和列中的磁体根据Halbach阵列布置,即每行中的连续磁体的磁性取向,并且每一列逆时针旋转90°。 第二部分包括具有两种类型的电线圈的电线圈系统(712),一种类型的角偏移为+ 45°,另一种类型相对于X方向具有-45°的偏移。 第一部分(714,710)可相对于固定的第二部分(712)在一厘米或更多的范围内移动。 对于第一部分的高精度定位,提供了干涉仪系统(731,730)。
    • 9. 发明申请
    • DISPLACEMENT DEVICE
    • 位移装置
    • WO2006075291A3
    • 2007-04-12
    • PCT/IB2006050088
    • 2006-01-10
    • KONINKL PHILIPS ELECTRONICS NVCOMPTER JOHAN CFRISSEN PETRUS C MVAN EIJK JAN
    • COMPTER JOHAN CFRISSEN PETRUS C MVAN EIJK JAN
    • G03F7/20
    • G03F7/70758Y10S414/135
    • Especially for use in the semiconductor industry, a displacement device (701) is disclosed comprising a first part comprising a carrier (714) on which a system of magnets (710) is arranged according to a pattern of row and columns extending parallel to the X- direction and the Y-direction, respectively. The magnets in each row and column are arranged according to a Halbach array, i.e. the magnetic orientation of successive magnets in each row and each column rotates 90° counter-clockwise. The second part comprises an electric coil system (712) with two types of electric coils, one type having an angular offset of +45°, and the other type having an offset of -45° with respect to the X-direction. The first part (714, 710) is movable over a range of centimeters or more with respect to the stationary second part (712). For high precision positioning of the first part, an interferometer system (731, 730) is provided.
    • 特别是用于半导体工业中,公开了一种位移装置(701),其包括第一部分,该第一部分包括载体(714),磁体系统(710)根据平行于X的行和列的图案排列在其上 - 方向和Y方向。 每行和列中的磁体根据Halbach阵列布置,即每行中的连续磁体的磁性取向,并且每一列逆时针旋转90°。 第二部分包括具有两种类型的电线圈的电线圈系统(712),一种类型的角偏移为+ 45°,另一种类型相对于X方向具有-45°的偏移。 第一部分(714,710)可相对于固定的第二部分(712)在一厘米或更多的范围内移动。 对于第一部分的高精度定位,提供了干涉仪系统(731,730)。