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1. 发明申请

WO0057127A9 METHOD AND APPARATUS FOR WAFER METROLOGY 审中-公开
标题翻译：方法和设备的波形计量学
公开(公告)号：WO0057127A9
公开(公告)日：2002-03-28
申请号：PCT/US0007709
申请日：2000-03-22
申请人： SENSYS INSTR CORP , STANKE FRED E , WEBER GRABAU MICHAEL , RUTH DOUGLAS E , TONG EDRIC H , CAHILL JAMES M JR , CARLISLE CLINTON , BURKE ELLIOT , PHAM HUNG
发明人： STANKE FRED E , WEBER-GRABAU MICHAEL , RUTH DOUGLAS E , TONG EDRIC H , CAHILL JAMES M JR , CARLISLE CLINTON , BURKE ELLIOT , PHAM HUNG
IPC分类号： B24B49/12 , G01B11/06 , G01B11/24 , G01B11/30 , G01N21/21 , G01N21/95 , H01L21/66 , H01L21/67 , H01L21/683 , C23C16/52 , G01N21/88 , H01L21/304
CPC分类号： B24B49/12 , G01B11/0625 , G01B11/30 , G01N21/211 , G01N21/9501 , H01L21/67 , H01L22/12
摘要： This invention is an apparatus for imaging metrology, which in particular embodiments may be integrated with a processor station such that a metrology station is apart from but coupled to a process station. The metrology station is provided with a first imaging camera with a first field of view containing the measurement region. Alternate embodiments include a second imaging camera with a second field of view. Preferred embodiments comprise a broadband ultraviolet light source, although other embodiments may have a visible or near infrared light source of broad or narrow optical bandwidth. Embodiments including a broad bandwidth source typically include a spectrograph, or an imaging spectrograph. Particular embodiments may include curved, reflective optics or a measurement region wetted by a liquid. In a typical embodiment, the metrology station and the measurement region are configured to have 4 degrees of freedom of movement relative to each other.
摘要翻译：本发明是一种用于成像测量的装置，其在特定实施例中可以与处理器站集成，使得计量站离开处理站而不是耦合到处理站。计量站设置有具有包含测量区域的第一视野的第一成像照相机。替代实施例包括具有第二视野的第二成像相机。优选实施例包括宽带紫外光源，但是其他实施例可以具有宽或窄光带宽的可见光或近红外光源。包括宽带宽源的实施例通常包括光谱仪或成像光谱仪。具体实施例可以包括弯曲的，反射光学的或由液体润湿的测量区域。在典型的实施例中，计量站和测量区域被配置为具有相对于彼此的4个移动自由度。

2. 发明申请

WO2011068683A3 COMPACT NEAR EYE DISPLAY WITH SCANNED IMAGE GENERATION 审中-公开
标题翻译：紧凑的近眼显示器，带有扫描图像生成
公开(公告)号：WO2011068683A3
公开(公告)日：2011-09-15
申请号：PCT/US2010057023
申请日：2010-11-17
申请人： VUZIX CORP , BURKE ELLIOT
发明人： BURKE ELLIOT
IPC分类号： G02B27/22 , H04N13/00
CPC分类号： G02B27/0101 , G02B6/00 , G02B26/10 , G02B2027/015
摘要： A compact near eye display generates image segments for a first dimension of an intended image. Each of the image segments is transformed into angularly distinguished beamlets that converge through a first dimension pupil within an eyebox. A scanning optic angularly separates the angularly distinguished beamlets of different image segments for creating a second dimension pupil. The angularly distinguished and separated beamlets propagate along a waveguide in a form that minimizes the thickness of the display in front of a viewer's eye and limits the overall size of the optics required to support the projection of virtual images into the viewer's eye.
摘要翻译：紧凑型近眼显示器可生成预期图像第一维的图像分段。每个图像片段被转换成角度可辨的子束，其通过眼睛盒内的第一维瞳孔会聚。扫描光学器件角度地分离不同图像片段的角度可区分的子束以产生第二维光瞳。角度区分和分离的子束沿着波导传播，其形式使得观看者的眼睛前方的显示器的厚度最小化，并且限制了支持将虚拟图像投影到观看者的眼睛中所需的光学器件的总体尺寸。

3. 发明申请

WO2002075399A1 MODULAR FIBER OPTIC SWITCH CORE 审中-公开
标题翻译：模块化光纤开关芯
公开(公告)号：WO2002075399A1
公开(公告)日：2002-09-26
申请号：PCT/US2002/008341
申请日：2002-03-19
申请人： C SPEED CORPORATION , GUPTA, Pavan , SCOTT, Jeffrey , CUSHMAN, William , BURKE, Elliot , SHRODE, Theodore
发明人： GUPTA, Pavan , SCOTT, Jeffrey , CUSHMAN, William , BURKE, Elliot , SHRODE, Theodore
IPC分类号： G02B6/26
CPC分类号： G02B6/357 , G02B6/32 , G02B6/3512 , G02B6/3556 , G02B6/3582 , G02B6/3644 , G02B6/3664 , G02B6/3672
摘要： An optical switching core (100) is disclosed that includes a plurality of input optical tiles (200(i)) and output optical tiles (200(o)) for directing optical beams between various input and output ports coupled to optical fibers. Each of the optical tiles includes a collimating optics array (210) for transmitting a plurality of incoming optical beams and a transparent beam directing array (220) optically coupled to said collimating optics array for redirecting said plurality of incoming optical. Two or more optical tiles are rotated about an optical axis with respect to one another to provide a compact, modular design. Drive electronics (290) may be incorporated on the tile or off of a tile. A method for fabricating a compact, modular switching core is also disclosed that enables the independent fabrication and testing of collimating optics and beam directing arrays and passive alignment of the same on a frame.
摘要翻译：公开了一种光学切换核心（100），其包括多个输入光瓦片（200（i））和输出光瓦片（200（o）），用于将光束引导到耦合到光纤的各种输入和输出端口之间。每个光瓦片包括用于传输多个入射光束的准直光学阵列（210）和光耦合到所述准直光学器件阵列的透明光束定向阵列（220），用于重定向所述多个入射光学器件。两个或更多个光瓦相对于彼此围绕光轴旋转以提供紧凑的模块化设计。驱动电子器件（290）可以并入瓷砖或瓷砖上。还公开了一种用于制造紧凑型模块化开关芯的方法，其使得能够独立地制造和测试准直光学元件和光束定向阵列，并使其在框架上的被动对准。

4. 发明申请

WO2011068683A2 COMPACT NEAR EYE DISPLAY WITH SCANNED IMAGE GENERATION 审中-公开
标题翻译：紧凑的眼睛显示与扫描图像生成
公开(公告)号：WO2011068683A2
公开(公告)日：2011-06-09
申请号：PCT/US2010/057023
申请日：2010-11-17
申请人： VUZIX CORPORATION , BURKE, Elliot
发明人： BURKE, Elliot
IPC分类号： G02B27/22 , H04N13/00
CPC分类号： G02B27/0101 , G02B6/00 , G02B26/10 , G02B2027/015
摘要： A compact near eye display generates image segments for a first dimension of an intended image. Each of the image segments is transformed into angularly distinguished beamlets that converge through a first dimension pupil within an eyebox. A scanning optic angularly separates the angularly distinguished beamlets of different image segments for creating a second dimension pupil. The angularly distinguished and separated beamlets propagate along a waveguide in a form that minimizes the thickness of the display in front of a viewer's eye and limits the overall size of the optics required to support the projection of virtual images into the viewer's eye.
摘要翻译：紧凑的近眼显示器产生用于预期图像的第一维度的图像片段。每个图像段被转换成角度特异的子束，其通过眼箱内的第一尺寸光瞳会聚。扫描光学器角度地分离不同图像片段的角度明确的子束以产生第二尺寸光瞳。角度分辨和分离的子束沿着波导传播，其形式使得观察者眼睛前方的显示器的厚度最小化，并限制支持将虚拟图像投影到观察者的眼睛中所需的光学器件的总体尺寸。

5. 发明申请

WO2010114586A1 BEAM SEGMENTOR FOR ENLARGING VIEWING APERTURE OF MICRODISPLAY 审中-公开
标题翻译：用于放大观看MICRODISPLAY的光束的光束部分
公开(公告)号：WO2010114586A1
公开(公告)日：2010-10-07
申请号：PCT/US2009/069910
申请日：2009-12-31
申请人： VUZIX CORPORATION , BURKE, Elliot
发明人： BURKE, Elliot
IPC分类号： G02B27/02
CPC分类号： G02B27/0101 , G02B6/00 , G02B27/143 , G02B2027/012 , G02B2027/0125
摘要： A display platform orients a virtual image in alignment with a viewer's eye. A transmissive plate receives a light beam conveying the virtual image into the transmissive plate for propagation by internal reflection between inner and outer surfaces of the transmissive plate along the length of the transmissive plate. A plurality of reflective facets progressively interrupt the propagation of the light beam along the length of the transmissive plate for reflecting successive portions of the light beam in a direction for rendering the virtual image visible to the viewer.
摘要翻译：显示平台使虚拟图像与观看者的眼睛对齐。透射板接收将虚拟图像传送到透射板中的光束，用于沿着透射板的长度通过内部反射在透射板的内表面和外表面之间进行传播。多个反射小平面逐渐地中断沿着透射板的长度的光束的传播，用于反射光束的连续部分在使得虚拟图像可视化的方向上。

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