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    • 2. 发明申请
    • ZINC-BASED FILM MANIPULATION FOR AN OPTICAL FILTER
    • 用于光学滤波器的基于ZINC的电影操作
    • WO2007120177A1
    • 2007-10-25
    • PCT/US2006/035667
    • 2006-09-14
    • SOUTHWALL TECHNOLOGIES, INC.THIELSCH, RolandBOEHME, ThomasSTOESSEL, Chris, H.BOMAN, Lee
    • THIELSCH, RolandBOEHME, ThomasSTOESSEL, Chris, H.BOMAN, Lee
    • G02B5/20
    • G02B5/284C03C17/28G02B5/282
    • An optical filter is formed of a layer stack that includes metallic layers (106, 107, 108 and 109) and dielectric layers (101 , 102, 103, 104 and 105), with at least one dielectric layer being defined by more than one zinc-based film (112, 114, 118 and 120). These zinc-based films have different percentages of zinc. The selections of the percentages are based upon the positions of the films within the dielectric layer. An unexpectedly low sheet resistance is available if the zinc-based film that immediately precedes forming a metallic layer has a percentage of zinc in the range of 80 percent to 100 percent. Process stabilization and manufacturing cost are provided by placing the percentage of the lower zinc-based film closer to 50 percent (25-75 percent). Process stabilization is further enhanced by providing an indium-based film (110 and 116) within the dielectric layer adjacent to the metallic layer.
    • 滤光器由包括金属层(106,107,108和109)和电介质层(101,102,103,104和105)的层叠层形成,其中至少一个电介质层由多于一个的锌 (112,114,118和120)。 这些锌基膜具有不同的锌含量。 百分比的选择基于介电层内的膜的位置。 如果在形成金属层之前的锌基膜的百分比在80%至100%的范围内,则可获得意想不到的薄层电阻。 过程稳定性和制造成本通过将下层锌基膜的百分比置于50%(25-75%)之间来提供。 通过在与金属层相邻的电介质层内提供铟基膜(110和116)来进一步增强工艺稳定性。