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    • 2. 发明申请
    • METHOD AND DEVICE FOR CONTROLLING AND MEASURING THE THICKNESS OF LAYERS OF A MATERIAL
    • 用于控制和测量材料层厚度的方法和装置
    • WO1982003455A1
    • 1982-10-14
    • PCT/EP1982000069
    • 1982-03-29
    • BATTELLE INSTBEUTER KARL
    • BATTELLE INST
    • G01B17/02
    • G01B17/025G01S15/34
    • In the method for controlling and measuring the thickness of layers of a material, a frequency modulated, fixed ultrasonic signal is used which travels periodically a frequency band, and the resulting signal is processed. The width of the frequency band is selected so as to be a multiple of the interferential distance. The maxima or minima which occur periodically in the spectrum of the signal received are used. By using a fixed modulation ratio of the transmitted signal, a set relationship between the repetition frequency of the maxima or minima in the spectrum and the thickness of the layer to be tested is achieved. Thus, the repetition frequency increases when the thickness of the layer increases. Alternatively, the harmonic ratio corresponding to the thickness of the layer is used. The harmonics appear when the selected frequency band is sufficiently narrow to embrace only a portion of the interferential distance. The repetition frequency of the modulation is determined with respect to the desired measuring range.
    • 在用于控制和测量材料层厚度的方法中,使用频率调制的固定超声波信号,其周期性地移动频带,并且对所得到的信号进行处理。 选择频带的宽度,使其为干涉距离的倍数。 使用在所接收的信号的频谱中周期性出现的最大值或最小值。 通过使用发送信号的固定调制比,实现了频谱中最大值或最小值的重复频率与待测试层的厚度之间的集合关系。 因此,当层的厚度增加时,重复频率增加。 或者,使用与层的厚度对应的谐波比。 当所选频带足够窄以仅包含干扰距离的一部分时,出现谐波。 相对于期望的测量范围确定调制的重复频率。