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1. 发明申请

WO2012049110A2 IMPROVEMENTS IN AND RELATING TO ION GUNS 审中-公开
标题翻译：改进和相关于离子钥匙
公开(公告)号：WO2012049110A2
公开(公告)日：2012-04-19
申请号：PCT/EP2011/067626
申请日：2011-10-10
申请人： VG SYSTEMS LIMITED , BARNARD, Bryan
发明人： BARNARD, Bryan
IPC分类号： H01J37/08
CPC分类号： H01J37/08 , H01J27/026 , H01J37/05 , H01J37/3171 , H01J49/142 , H01J2237/057 , H01J2237/0812 , H01J2237/0827
摘要： A method of processing one or more surfaces is provided, comprising: providing a switchable ion gun which is switchable between a cluster mode setting for producing an ion beam substantially comprising ionised gas clusters for irradiating a surface and an atomic mode setting for producing an ion beam substantially comprising ionised gas atoms for irradiating a surface; and selectively operating the ion gun in the cluster mode by mass selecting ionised gas clusters using a variable mass selector thereby irradiating a surface substantially with ionised gas clusters or the atomic mode by mass selecting ionised gas atoms using a variable mass selector thereby irradiating a surface substantially with ionised gas atoms. Also provided is a switchable ion gun comprising: a gas expansion nozzle for producing gas clusters; an ionisation chamber for ionising the gas clusters and gas atoms; and a variable (preferably a magnetic sector) mass selector for mass selecting the ionised gas clusters and ionised gas atoms to produce an ion beam variable between substantially comprising ionised gas clusters and substantially comprising ionised gas atoms. Preferably, the gun comprises an electrically floating flight tube for adjusting the energy of the ions whilst within the mass selector.
摘要翻译：提供一种处理一个或多个表面的方法，包括：提供可切换离子枪，其可在用于产生基本上包括用于照射表面的电离气体簇的离子束的簇模式设置和用于产生离子束的原子模式设置之间切换基本上包括用于照射表面的电离气体原子; 并且通过使用可变质量选择器质量选择电离气体簇来选择性地操作离子枪，从而通过使用可变质量选择器大量选择电离气体原子而基本上用电离气体簇或原子模式照射表面，从而基本上照射表面具有电离气体原子。还提供了一种可切换离子枪，包括：用于产生气体团的气体膨胀喷嘴; 用于电离气团和气原子的电离室; 以及用于质量选择电离气体团簇和电离气体原子以产生基本上包含电离气体簇并且基本上包含电离气体原子的离子束可变的变量（优选磁性扇区）质量选择器。优选地，枪包括电浮动飞行管，用于在质量选择器内调节离子的能量。

2. 发明申请

WO2012049110A3 SWITCHABLE GAS CLUSTER AND ATOMIC ION GUN, AND METHOD OF SURFACE PROCESSING USING THE GUN 审中-公开
标题翻译：可切换气体组合和原子枪，以及使用枪的表面处理方法
公开(公告)号：WO2012049110A3
公开(公告)日：2012-06-28
申请号：PCT/EP2011067626
申请日：2011-10-10
申请人： VG SYSTEMS LTD , BARNARD BRYAN
发明人： BARNARD BRYAN
IPC分类号： H01J37/08
CPC分类号： H01J37/08 , H01J27/026 , H01J37/05 , H01J37/3171 , H01J49/142 , H01J2237/057 , H01J2237/0812 , H01J2237/0827
摘要： A method of processing one or more surfaces is provided, comprising: providing a switchable ion gun (1) which is switchable between a cluster mode setting for producing an ion beam substantially comprising ionised gas clusters for irradiating a surface and an atomic mode setting for producing an ion beam substantially comprising ionised gas atoms for irradiating a surface; and selectively operating the ion gun in the cluster mode by mass selecting ionised gas clusters using a variable mass selector thereby irradiating a surface substantially with ionised gas clusters or the atomic mode by mass selecting ionised gas atoms using a variable mass selector thereby irradiating a surface substantially with ionised gas atoms. Also provided is a switchable ion gun comprising: a gas expansion nozzle (4) for producing gas clusters; an ionisation chamber for ionising the gas clusters and gas atoms; and a variable (preferably a magnetic sector) mass selector (50) for mass selecting the ionised gas clusters and ionised gas atoms to produce an ion beam variable between substantially comprising ionised gas clusters and substantially comprising ionised gas atoms. Preferably, the gun comprises an electrically floating flight tube (52) for adjusting the energy of the ions whilst within the mass selector.
摘要翻译：提供了一种处理一个或多个表面的方法，包括：提供可切换离子枪（1），其可在用于产生基本上包括用于照射表面的电离气体簇的离子束的簇模式设置和用于产生辐射的原子模式设置之间切换基本上包含用于照射表面的电离气体原子的离子束; 并且通过使用可变质量选择器质量选择电离气体簇来选择性地操作离子枪，从而通过使用可变质量选择器大量选择电离气体原子而基本上用电离气体簇或原子模式照射表面，从而基本上照射表面具有电离气体原子。还提供了一种可切换离子枪，包括：用于产生气体团的气体膨胀喷嘴（4）用于电离气团和气原子的电离室; 以及用于质量选择电离气体团簇和电离气体原子以产生基本上包含电离气体团簇并且基本上包含电离气体原子的离子束可变的变量（优选磁性扇形体）质量选择器（50）。优选地，枪包括用于在质量选择器内调节离子的能量的电浮动飞行管（52）。

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