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    • 1. 发明申请
    • IMAGE PROCESSING APPARATUS
    • 图像处理设备
    • WO2002063566A2
    • 2002-08-15
    • PCT/GB2002/000446
    • 2002-02-01
    • TAYLOR HOBSON LIMITEDBANKHEAD, Andrew, DouglasSCOTT, Paul, James
    • BANKHEAD, Andrew, DouglasSCOTT, Paul, James
    • G06T7/60
    • G06T7/60
    • A measurement probe (2) obtains image data representing a part of a surface such as a cylinder bore surface and supplies it to a control apparatus (20) which is arranged to determine information about a predominant feature in the image. The control apparatus (20) has a frequency transformer (21) for obtaining a frequency transform of the image data, a processor (21) for processing the frequency transform to provide amplitude data representing amplitude values at different angles values, an identifier (21) for identifying the main peak or main peaks in the amplitude data, a position determiner (21) for determining position data for the or each main peak in the amplitude data; and a display (24) for supplying information derived from position data about the predominant feature to an operator.
    • 测量探针(2)获得表示诸如气缸孔表面的表面的一部分的图像数据,并将其提供给控制装置(20),控制装置(20)被布置成确定关于图像中的主要特征的信息。 控制装置(20)具有用于获得图像数据的频率变换的变频器(21),用于处理频率变换以提供表示不同角度值的振幅值的幅度数据的处理器(21),识别符(21) 用于识别振幅数据中的主峰值或主峰值的位置确定器(21),用于确定振幅数据中的每个主峰值的位置数据; 以及用于向操作者提供关于主要特征的位置数据的信息的显示器(24)。
    • 3. 发明申请
    • A SURFACE PROFILING APPARATUS
    • 表面型材设备
    • WO2004048886A1
    • 2004-06-10
    • PCT/GB2003/005080
    • 2003-11-21
    • TAYLOR HOBSON LIMITEDBANKHEAD, Andrew, DouglasLEE-BENNETT, IanMCDONNELL, Ivor
    • BANKHEAD, Andrew, DouglasLEE-BENNETT, IanMCDONNELL, Ivor
    • G01B9/02
    • G01B11/303G01B9/02057G01B9/02072G01B9/02089G01B9/0209
    • Light is directed along a sample path towards the sample surface and along a reference path towards a reference surface such that light reflected by the sample surface and light reflected by the reference surface interfere. Relative movement is effected between the sample surface and the reference surface along a measurement path and the light intensity resulting from interference between light reflected from the reference surface and regions of the sample surface is sensed at intervals along the measurement path to provide a number of sets of light intensity data values with each light intensity data value representing the sensed light intensity associated with a corresponding one of said regions. The sets of light intensity data are processed to determine a position along the measurement path at which a predetermined feature occurs in the light intensity data for each sensed region and to enhance image data representing the intensity data to facilitate the detection by a user of the interference fringes.
    • 光沿取样路径朝向样品表面并沿着参考路径被引向参考表面,使得由样品表面反射的光和被参考表面反射的光干涉。 沿着测量路径在样品表面和参考表面之间进行相对运动,并且沿着测量路径以间隔感测从参考表面反射的光与样品表面的区域之间的干涉产生的光强度,以提供多个组 的光强度数据值,其中每个光强数据值表示与所述区域中的相应一个相关联的感测光强度。 处理光强度数据集合以确定在每个感测区域的光强度数据中发生预定特征的测量路径的位置,并且增强表示强度数据的图像数据,以便于用户检测到干扰 条纹。
    • 4. 发明申请
    • SURFACE PROFILING APPARATUS
    • 表面型材设备
    • WO03078925A2
    • 2003-09-25
    • PCT/GB0301067
    • 2003-03-13
    • TAYLOR HOBSON LTDBANKHEAD ANDREW DOUGLASMCDONNELL IVOR
    • BANKHEAD ANDREW DOUGLASMCDONNELL IVOR
    • G01B9/02G01B11/02G01B11/24G01B11/00
    • G01B11/2441G01B9/02057G01B9/02069G01B9/02083G01B9/0209
    • Light from a broadband source (4) is directed along a sample path (SP) towards a region of a sample surface (7) and along a reference path (RP) towards a reference surface (6) such that light reflected by the region of the sample surface and light reflected by the reference surface interfere. A mover (11) effects relative movement along a scan path between the sample surface (7) and the reference surface (6). A detector (10) senses light intensity at intervals to provide a series of intensity values representing interference fringes produced by a region of a sample surface. A data processor has a concurrent processing section (34a;340) for carrying out processing on intensity values as the intensity values are received by the receiving means during a measurement operation to produce data indicating the position of a coherence peak, and a post-processing section (34b;350) for, after completion of a measurement operation, using the data produced by the concurrent section to obtain data indicative of a height of the surface region. One of the processing sections has a correlator (44;440) for correlating intensity values with correlation function data representing a correlation function to provide correlation data to enable a position of a coherence peak to be identified. The post-processing section has a surface topography determiner (35;350) for determining a height of a sample surface region from coherence peak position data.
    • 来自宽带源(4)的光沿着样本路径(SP)朝向样本表面(7)的区域并且沿着参考路径(RP)朝向参考表面(6)引导,使得由 样品表面和参考面反射的光线会干扰。 移动器(11)沿着样品表面(7)和参考表面(6)之间的扫描路径实现相对运动。 检测器(10)间隔地感测光强度以提供表示由样品表面的区域产生的干涉条纹的一系列强度值。 数据处理器具有并行处理部分(34a; 340),用于在测量操作期间由接收装置接收强度值以执行关于强度值的处理,以产生指示相干峰位置的数据,以及后处理 (34b; 350),用于在完成测量操作之后,使用并发部分产生的数据来获得表示表面区域的高度的数据。 处理部分之一具有相关器(44; 440),用于将强度值与表示相关函数的相关函数数据相关联,以提供相关数据以使相关峰的位置能够被识别。 后处理部分具有用于根据相干峰位置数据确定样品表面区域的高度的表面形貌确定器(35; 350)。
    • 6. 发明申请
    • IMAGE PROCESSING APPARATUS
    • 图像处理设备
    • WO02063566A3
    • 2003-05-15
    • PCT/GB0200446
    • 2002-02-01
    • TAYLOR HOBSON LTDBANKHEAD ANDREW DOUGLASSCOTT PAUL JAMES
    • BANKHEAD ANDREW DOUGLASSCOTT PAUL JAMES
    • G06T7/60G01N21/956
    • G06T7/60
    • A measurement probe (2) obtains image data representing a part of a surface such as a cylinder bore surface and supplies it to a control apparatus (20) which is arranged to determine information about a predominant feature in the image. The control apparatus (20) has a frequency transformer (21) for obtaining a frequency transform of the image data, a processor (21) for processing the frequency transform to provide amplitude data representing amplitude values at different angles values, an identifier (21) for identifying the main peak or main peaks in the amplitude data, a position determiner (21) for determining position data for the or each main peak in the amplitude data; and a display (24) for supplying information derived from position data about the predominant feature to an operator.
    • 测量探针(2)获得表示诸如气缸孔表面的表面的一部分的图像数据,并将其提供给控制装置(20),控制装置(20)被布置成确定关于图像中的主要特征的信息。 控制装置(20)具有用于获得图像数据的频率变换的变频器(21),用于处理频率变换以提供表示不同角度值的振幅值的幅度数据的处理器(21),识别符(21) 用于识别振幅数据中的主峰值或主峰值的位置确定器(21),用于确定振幅数据中的每个主峰值的位置数据; 以及用于向操作者提供关于主要特征的位置数据的信息的显示器(24)。
    • 7. 发明申请
    • SURFACE MEASUREMENT INSTRUMENT
    • 表面测量仪器
    • WO2007091087A3
    • 2007-10-25
    • PCT/GB2007000460
    • 2007-02-09
    • TAYLOR HOBSON LTDMCDONNELL IVORBANKHEAD ANDREW DOUGLASMANSFIELDS DANIEL IAN
    • MCDONNELL IVORBANKHEAD ANDREW DOUGLASMANSFIELDS DANIEL IAN
    • G01B11/24G01B11/06
    • G01B11/303G01B9/02057G01B9/0209G01B2290/65
    • A surface measurement instrument (1) for obtaining surface characteristic data of a sample surface (13) is described. Relative movement between a reference surface (11) and a sample support (15) is caused to occur while a sensor (16) senses light intensity at intervals along a scan path (SP) to provide a series of intensity values representing interference fringes produced by a region of a sample surface (13) during said relative movement and from which series of intensity values surface characteristic data can be derived. The sample support (15) is both translatable and tiltable in at least one direction perpendicular to a scan direction so that the sample support (15) can be both tilted to cause the scan path (SP) to be normal to the sample surface region and translated to compensate for translation movement due to the tilting.
    • 描述用于获得样品表面(13)的表面特征数据的表面测量仪器(1)。 当传感器(16)沿着扫描路径(SP)以一定间隔感测光强度时,引起在参考表面(11)和样品支撑件(15)之间发生相对运动,以提供一系列代表干涉条纹的强度值, 在所述相对移动期间的样本表面(13)的区域,并且可以从中导出一系列强度值表面特征数据。 样品支架(15)既可平移又可沿垂直于扫描方向的至少一个方向倾斜,使得样品支架(15)既可以倾斜以使扫描路径(SP)垂直于样品表面区域,并且 翻译以补偿由于倾斜引起的平移运动。
    • 8. 发明申请
    • SURFACE PROFILING APPARATUS
    • 表面型材设备
    • WO2004104517A1
    • 2004-12-02
    • PCT/GB2004/002159
    • 2004-05-20
    • TAYLOR HOBSON LIMITEDBANKHEAD, Andrew, DouglasLEE-BENNETT, Ian, MarkARMSTRONG, Joseph
    • BANKHEAD, Andrew, DouglasLEE-BENNETT, Ian, MarkARMSTRONG, Joseph
    • G01B11/30
    • G01B11/30
    • A broad band surface profiling apparatus has a reference calibrator for calibrating the apparatus to compensate for surface features of the reference surface. A user is instructed to conduct a number of calibration measurement operations using a calibration sample having a calibration surface to obtain calibration surface topography data for the calibration sample. At each calibration measurement operation, an image representing the calibration surface topography data is displayed to the user and the user has the option either to accept or reject the calibration surface topography data represented by the displayed image. The reference calibrator has a surface topography data processor (53) and a mean surface calculator (54) for calculating mean surface topography data using the processed calibration surface topography data accepted by the user to provide reference surface features data. A reference surface features remover (37) is provided for adjusting surface topography data obtained for a sample surface in accordance with the reference surface features data.
    • 宽带表面成形装置具有用于校准装置以补偿参考表面的表面特征的参考校准器。 指示用户使用具有校准表面的校准样品进行多次校准测量操作,以获得校准样品的校准表面形貌数据。 在每个校准测量操作中,向用户显示表示校准表面形貌数据的图像,并且用户可以选择接受或拒绝由显示图像表示的校准表面形貌数据。 参考校准器具有表面形貌数据处理器(53)和平均表面计算器(54),用于使用由用户接受的经处理的校准表面形貌数据来计算平均表面形貌数据,以提供参考表面特征数据。 提供了参考表面特征去除器(37),用于根据参考表面特征数据调整为样品表面获得的表面形貌数据。
    • 9. 发明申请
    • SURFACE PROFILING APPARATUS
    • WO2003078925A3
    • 2003-09-25
    • PCT/GB2003/001067
    • 2003-03-13
    • TAYLOR HOBSON LIMITEDBANKHEAD, Andrew, DouglasMCDONNELL, Ivor
    • BANKHEAD, Andrew, DouglasMCDONNELL, Ivor
    • G01B11/24
    • Light from a broadband source (4) is directed along a sample path (SP) towards a region of a sample surface (7) and along a reference path (RP) towards a reference surface (6) such that light reflected by the region of the sample surface and light reflected by the reference surface interfere. A mover (11) effects relative movement along a scan path between the sample surface (7) and the reference surface (6). A detector (10) senses light intensity at intervals to provide a series of intensity values representing interference fringes produced by a region of a sample surface. A data processor has a concurrent processing section (34a;340) for carrying out processing on intensity values as the intensity values are received by the receiving means during a measurement operation to produce data indicating the position of a coherence peak, and a post-processing section (34b;350) for, after completion of a measurement operation, using the data produced by the concurrent section to obtain data indicative of a height of the surface region. One of the processing sections has a correlator (44;440) for correlating intensity values with correlation function data representing a correlation function to provide correlation data to enable a position of a coherence peak to be identified. The post-processing section has a surface topography determiner (35;350) for determining a height of a sample surface region from coherence peak position data.