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    • 1. 发明申请
    • ATHERMAL ARRAYED WAVEGUIDE GRATING
    • 高温阵列波导光栅
    • WO2004001470A1
    • 2003-12-31
    • PCT/GB2003/002615
    • 2003-06-18
    • ALCATEL OPTRONICS UK LIMITEDHOEKSTRA, Tsjerk, HansMUNZNER, Roland
    • HOEKSTRA, Tsjerk, HansMUNZNER, Roland
    • G02B6/34
    • G02B6/12019G02B6/12028
    • An athermal mux/demux device comprising an AWG with a Mach-Zender apparatus optically coupled to an input side thereof. The Mach-Zender apparatus has first and second sides, the first side being optically coupled to an input waveguide of the device and the second side comprising two output ports optically coupled to an input side of the first slab waveguide of the AWG. The Mach-Zender apparatus is configured so that its temperature sensitivity substantially compensates for the temperature sensitivity of the AWG whereby the device is substantially athermal. In one embodiment one arm of the Mach-Zender has a portion of its length made of a polymer material, this portion being deigned such that the rate of change of effective refractive with temperature (dn eff /dT) of this polymer waveguide portion is of negative sign.
    • 一种无热复制/解复用器件,其包括具有光耦合到其输入侧的马赫 - 泽德设备的AWG。 Mach-Zender装置具有第一和第二侧,第一侧光耦合到装置的输入波导,第二侧包括光耦合到AWG的第一平板波导的输入侧的两个输出端口。 Mach-Zender装置被配置为使得其温度灵敏度基本上补偿AWG的温度灵敏度,由此该装置基本上是无热的。 在一个实施例中,Mach-Zender的一个臂具有由聚合物材料制成的长度的一部分,该部分被设计成使得该聚合物波导部分的有效折射率随温度变化率(dneff / dT)为负值 标志。
    • 8. 发明申请
    • AN OPTICAL ACTUATOR
    • 光学执行器
    • WO2003100492A1
    • 2003-12-04
    • PCT/GB2003/002260
    • 2003-05-23
    • ALCATEL OPTRONICS UK LIMITEDBLAIR, PaulPODLECKI, JeanMcMEEKIN, ScottBEGBIE, Mark, LawrenceBURGER, Gerardus, JohannesGARDENIERS, Han
    • BLAIR, PaulPODLECKI, JeanMcMEEKIN, ScottBEGBIE, Mark, LawrenceBURGER, Gerardus, JohannesGARDENIERS, Han
    • G02B6/35
    • G02B6/3584G02B6/3512G02B6/353
    • A method of manufacture of an optical actuator comprising an optically interacting element and an integral actuator, the method comprising the steps of (a) providing a wafer comprising a substrate, an insulating layer on the substrate and upper layer on the insulating layer; (b) depositing a first mask layer on the upper layer; (c) depositing a second mask layer on the upper layer; (d) etching the remaining exposed upper layer to a depth less than the thickness of the upper layer to reveal an actuator and a coplanar optically interacting element base portion; (e) removing the second mask layer; (f) further etching the upper layer to the depth of the insulating layer to reveal an optically interacting element upper portion extending upwardly from the optionally interacting element base portion out of the plane of the actuator; (g) etching the insulating layer beneath the upper layer so separating the optically interacting element and a rotor portion of the actuator from the insulating layer.
    • 一种制造光学致动器的方法,包括光学相互作用元件和整体致动器,所述方法包括以下步骤:(a)提供包括衬底,所述衬底上的绝缘层和所述绝缘层上的上层的晶片; (b)在上层上沉积第一掩模层; (c)在上层上沉积第二掩模层; (d)将剩余的暴露的上层蚀刻到小于上层的厚度的深度,以露出致动器和共面光学相互作用的元件基部; (e)去除所述第二掩模层; (f)进一步将所述上层蚀刻到所述绝缘层的深度,以露出从所述可执行地相互作用的元件基部向上延伸出所述致动器的平面的光学相互作用的元件上部; (g)蚀刻上层之下的绝缘层,从而将光学相互作用元件和致动器的转子部分与绝缘层分离。