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1. 发明申请

WO2015187202A1 BEAM FOCUSING AND BEAM COLLECTING OPTICS 审中-公开
标题翻译：光束聚焦和光束采集光学
公开(公告)号：WO2015187202A1
公开(公告)日：2015-12-10
申请号：PCT/US2015/000009
申请日：2015-01-20
申请人： J.A. WOOLLAM CO., INC.
发明人： LIPHARDT, Martin, M. , HALE, Jeffrey, S. , HE, Ping , PFEIFFER, Galen, L.
IPC分类号： G01J4/00
CPC分类号： G02B17/0621 , G01J1/0411 , G01J1/0414 , G01J4/00 , G01J4/04 , G01N21/21 , G02B19/0023 , G02B19/0076 , G02B27/0012 , G02B27/286
摘要： A reflective optics system (RFO) that preferably requires the presence of both convex (M3) and concave (M4) mirrors that have beam reflecting surfaces, the application of which achieves focusing of a beam of electromagnetic radiation onto a sample (OB), (which can be along a locus differing from that of an input beam (IB)), with minimized effects on a polarization state of an input beam state of polarization based on adjusted angles of incidence and reflections from the various mirrors involved (M1) (M2) (M3) (M4).
摘要翻译：反射光学系统（RFO）优选地需要存在具有光束反射表面的凸（M3）和凹（M4）反射镜，其应用实现将电磁辐射束聚焦到样品（OB）上，其可以沿着与输入光束（IB）不同的轨迹），基于调节的入射角和来自所涉及的各种反射镜（M1）（M2）的反射，对输入光束偏振态的偏振状态的影响最小化）（M3）（M4）。

2. 发明申请

WO2007120171A1 COMBINED USE OF OSCILLATING MEANS AND ELLIPSOMETRY TO DETERMINE UNCORRELATED EFFECTIVE THICKNESS AND OPTICAL CONSTANTS OF MATERIAL DEPOSITED FROM A FLUID 审中-公开
标题翻译：联合使用振动手段和测量方法来确定不相关的有效厚度和从流体中沉积的材料的光学常数
公开(公告)号：WO2007120171A1
公开(公告)日：2007-10-25
申请号：PCT/US2006/029667
申请日：2006-07-30
申请人： J.A. WOOLLAM CO., INC.
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01B11/0641
摘要： A combined ellipsometer and oscillator system applied to a chamber (CH) for containing fluid, and method of decorrelated determination of thickness and optical constants of depositable materials present in a fluid. In use the ellipsometer determines the product of thickness and optical constant, and the oscillator system changes frequency of oscillation proportional to the thickness of material deposited upon a surface of an element therein.
摘要翻译：应用于用于容纳流体的室（CH）的组合椭偏仪和振荡器系统，以及存在于流体中的可沉积材料的厚度和光学常数的去相关确定方法。在使用中，椭偏仪确定厚度和光学常数的乘积，并且振荡器系统改变与沉积在元件表面上的材料的厚度成比例的振荡频率。

3. 发明申请

WO2022164417A8 REFLECTOMETER, SPECTROPHOTOMETER, ELLIPSOMETER AND POLARIMETER SYSTEMS INCLUDING A WAVELENGTH MODIFIER 审中-公开
公开(公告)号：WO2022164417A8
公开(公告)日：2022-08-04
申请号：PCT/US2021/010069
申请日：2021-12-27
申请人： J.A. WOOLLAM CO., INC. , HALE, Jeffrey S.
发明人： HE, Ping , LIPHARDT, Martin M. , VAN DERSLICE, Jeremy A. , HERZINGER, Craig M. , GUENTHER, Brian D. , MEYER, Duane E. , SCHOECHE, Stefan , WELCH, James D.
IPC分类号： G01N21/21 , G01N21/35 , G01J3/00 , G01J3/12 , G01J4/00 , G02F1/35
摘要： Ellipsometer, polar imeter, reflactometer and spectrophotometer systems including one or more wavelength modifiers which convert wavelengths provided by a source of electromagnetic radiation to different wavelengths for use in investigating a sample, and/or which a detector thereof can detect.

4. 发明申请

WO2020190252A1 THETA-THETA SAMPLE POSITIONING STAGE WITH APPLICATION TO SAMPLE MAPPING USING A REFLECTOMETER, SPECTROPHOTOMETER OR ELLIPSOMETER SYSTEM 审中-公开
公开(公告)号：WO2020190252A1
公开(公告)日：2020-09-24
申请号：PCT/US2019/000030
申请日：2019-07-05
申请人： J.A. WOOLLAM CO., INC.
发明人： HOVORKA, Griffin A.P. , LIPHARDT, Martin, M. , PFEIFFER, Galen, L.
IPC分类号： G01N21/25
摘要： A sample positioning system having two rotation elements with offset therebetween, to the second of which rotation elements is affixed a sample supporting stage, The rotation axes of the two rotation element are parallel, or substantially so. The sample positioning system finds application in the mapping of samples by Metrology systems such as Reflectometer, Spectrophotometer and Ellipsometer systems.

5. 发明申请

WO2009136901A1 FAST SAMPLE HEIGHT, AOI AND POI ALIGNMENT IN MAPPING ELLIPSOMETER OR THE LIKE 审中-公开
标题翻译：快速样品高度，AOI和POI对齐在映射仪中或类似
公开(公告)号：WO2009136901A1
公开(公告)日：2009-11-12
申请号：PCT/US2008/012931
申请日：2008-11-20
申请人： J.A. WOOLLAM CO., INC.
发明人： HE, Ping , HALE, Jeffrey, S. , PFEIFFER, Galen, L. , LIPHARDT, Martin, M.
IPC分类号： G05B19/04
CPC分类号： G01N21/211 , G01J4/00 , G01N2021/213
摘要： A sample investigation system (ES) in functional combination with an alignment systen (AS), and methodology of enabling very fast, (eg. seconds), sample height, angle-of-incidence and plane-of -incidence adjustments, with application in mapping ellipsometer or the like systems.
摘要翻译：与对准系统（AS）的功能组合的样本调查系统（ES）以及启用非常快速（例如秒），样本高度，入射角和准确度调整的方法，应用于映射椭偏仪等。

6. 发明申请

WO2008082538A1 APPLICATION OF DIGITAL LIGHT PROCESSOR IN SCANNING SPECTROMETER AND IMAGING ELLIPSOMETER AND THE LIKE SYSTEMS 审中-公开
标题翻译：数字光处理器在扫描光谱仪中的应用和成像仪器和类似系统
公开(公告)号：WO2008082538A1
公开(公告)日：2008-07-10
申请号：PCT/US2007/025880
申请日：2007-12-18
申请人： J.A. WOOLLAM CO., INC
IPC分类号： G01J3/02
CPC分类号： G01J3/447 , G01J3/02 , G01J3/021 , G01J3/0224 , G01J3/0229 , G01J3/027 , G01J3/2823 , G01J3/457 , G01N21/211 , G01N2021/213
摘要： Application of digital light processor (DLP) systems in monochromotor, spectrophotometer or the like systems to mediate selection of individual wavelengths, and/or to image elected regions of a sample in an imaging ellipsometer, imaging polar imeter, imaging ref lectometer, imaging spectrophotometer r and/or to provide chopped beams.
摘要翻译：数字光处理器（DLP）系统在单色器，分光光度计或类似系统中的应用，以介导各个波长的选择，和/或在成像椭偏仪中成像选定的样品区域，成像极化仪，成像参考仪，成像分光光度计r 和/或提供短切光束。

7. 发明申请

WO2008008058A1 DISCRETE POLARIZATION STATE ROTATABLE COMPENSATOR SPECTROSCOPIC ELLIPSOMETER SYSTEM, AND METHOD OF CALIBRATION 审中-公开
标题翻译：离散偏振态可旋转补偿器光谱仪测量系统和校准方法
公开(公告)号：WO2008008058A1
公开(公告)日：2008-01-17
申请号：PCT/US2006/026928
申请日：2006-07-11
申请人： J.A. WOOLLAM CO., INC.
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01N21/274 , G01N2021/213
摘要： Disclosed are spectroscopic ellipsometer, and combined spectroscopic reflectometer/ellipsometer systems. The spectroscopic ellipsometer system portion includes polarizer (P) and analyzer (A) elements which remain fixed in position during data acquisition, and a step-wise rotatable compensator (DSP) electromagnetic beam transmitting means, which serves to enable imposing a plurality of sequentially discrete, rather than continuously varying, polarization states on said beam of electromagnetic radiation. Further disclosed is an operation procedure for said spectroscopic ellipsometer system portion of the invention which involves the gathering of, for each of a plurality of ellipsometrically distinct sample systems, spectroscopic data at a sequential plurality of discrete electromagnetic radiation beam polarization states, combined with providing of a mathematical model of the spectroscopic ellipsometer system and application of a mathematical regression procedure.
摘要翻译：公开了光谱椭偏仪和组合光谱反射计/椭偏仪系统。分光椭偏仪系统部分包括在数据采集期间保持固定在位的偏振器（P）和分析器（A）元件，以及逐步旋转补偿器（DSP）电磁束传输装置，其用于施加多个顺序离散的而不是在所述电磁辐射束上连续变化的极化状态。进一步公开的是本发明的所述分光椭偏仪系统部分的操作步骤，其涉及针对多个椭偏不同的采样系统中的每一个采集多个离散的电磁辐射束极化状态的光谱数据，光谱椭偏仪系统的数学模型和数学回归程序的应用。

8. 发明申请

WO2008115417A1 SYSTEM AND METHOD FOR CONTROLLING INTENSITY OF A BEAM OF ELECTROMAGNETIC RADIATION IN ELLIPSOMETERS AN POLARIMETERS 审中-公开
标题翻译：控制电磁辐射光束强度的系统和方法
公开(公告)号：WO2008115417A1
公开(公告)日：2008-09-25
申请号：PCT/US2008/003396
申请日：2008-03-14
申请人： J.A. WOOLLAM CO., INC.
IPC分类号： G01J4/00
CPC分类号： G01J3/10 , G01J3/447 , G01J4/00 , G01N21/211 , G01N2021/213
摘要： An ellipsometer or polarimeter system and method for controlling intensity of an electromagnetic beam over a spectrum of wavelengths by applying control (P2) and beam (P) polarizers, optionally in combination with an intervening and control compensator (C).
摘要翻译：一种用于通过施加控制（P2）和光束（P）偏振器，可选地与中间和控制补偿器（C）组合来控制波长范围上的电磁束的强度的椭圆计或偏振计系统和方法。

9. 发明申请

WO2008082506A1 APPLICATION OF DIGITAL LIGHT PROCESSOR IN SCANNING SPECTROMETER AND IMAGING ELLIPSOMETER AND THE LIKE SYSTEMS 审中-公开
标题翻译：数字光处理器在扫描光谱仪中的应用和成像仪器和类似系统
公开(公告)号：WO2008082506A1
公开(公告)日：2008-07-10
申请号：PCT/US2007/025805
申请日：2007-12-18
申请人： J.A. WOOLLAM CO., INC.
IPC分类号： G01J3/28
CPC分类号： G01J3/447 , G01J3/02 , G01J3/021 , G01J3/0224 , G01J3/0229 , G01J3/027 , G01J3/2823 , G01J3/457 , G01N21/211 , G01N2021/213
摘要： Application of digital light processor (DLP) systems in monochromotor, spectrophotometer or the like systems to mediate selection of individual wavelengths, and/or to image elected regions of a sample in an imaging ellipsometer, imaging polarlmeter, imaging ref lectometer, imaging spectrophotometer, and/or to provide chopped beams.
摘要翻译：数字光处理器（DLP）系统在单色机，分光光度计等系统中的应用，以介导各个波长的选择，和/或在成像椭偏仪，成像极化仪，成像参考仪，成像分光光度计和/或 /或提供切碎的梁。

10. 发明申请

WO2008048312A2 SYSTEM FOR AND METHOD OF INVESTIGATING THE EXACT SAME POINT ON A SAMPLE SUBSTRATE WITH MULTIPLE WAVELENGTHS 审中-公开
标题翻译：在具有多个波长的样品基板上检测精确相同点的系统和方法
公开(公告)号：WO2008048312A2
公开(公告)日：2008-04-24
申请号：PCT/US2006/047654
申请日：2006-12-14
申请人： J.A. WOOLLAM CO., INC.
发明人： LIPHARDT, Martin M. , JOHS, Blaine D. , HERZINGER, Craig M. , HE, Ping , GOEDEN, Christopher A. , WOLLAM, John A. , WELCH, James D.
IPC分类号： G01N21/55 , G01J4/00
CPC分类号： G01N21/211 , G01J3/0208 , G01N21/55 , G01N2021/213
摘要： Disclosed are system for and method of analyzing asample at substantially the exact same small spot point on a sample with a plurality of wavelengths.
摘要翻译：公开了在具有多个波长的样品上的基本上完全相同的小斑点处分析样品的系统和方法。

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