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    • 71. 发明申请
    • 走査型プローブ顕微鏡の探針走査制御方法および探針走査制御装置
    • 用于扫描探针显微镜的探测扫描控制方法和探测扫描控制装置
    • WO2006019130A1
    • 2006-02-23
    • PCT/JP2005/015057
    • 2005-08-18
    • 日立建機ファインテック株式会社榑沼 透見坊 行雄柳本 裕章黒田 浩史森本 高史
    • 榑沼 透見坊 行雄柳本 裕章黒田 浩史森本 高史
    • G01N13/10G01B21/30
    • G01Q10/065
    •  走査型プローブ顕微鏡は、試料12に対向する探針20を有するカンチレバー21と、探針と試料の間で生じる物理量を測定する測定部24と、探針と試料の位置関係を変化させて走査動作を行わせる移動機構11,29を備え、移動機構で探針が試料の表面を走査しながら測定部で試料の表面を測定する。この方法は、試料の表面に沿う方向に表面から離れた位置で探針を一定間隔で送るステップ、一定間隔で決まる複数の測定点の各々で、探針を試料に接近させ、測定を行って測定値を得、その後退避させるステップ、或る測定点での測定値と次の測定点での測定値との差が基準値よりも大きいとき、或る測定点と次の測定点の間の位置に測定点を設定し測定を行うステップを備える。
    • 扫描探针显微镜具有具有面向样品(12)的探针(20)的悬臂(21),用于测量探头和样品之间出现的物理量的测量部分(24)和移动机构(11,29) 用于通过改变探针和样品之间的位置关系来进行扫描操作。 测量部分测量样品的表面,同时移动机构通过探针对表面进行扫描。 该方法包括在沿着样品表面的方向上以远离表面的位置以恒定间隔发送探针的步骤,在由恒定间隔确定的每个测量位置处使探针 当测量点的测量值与下一个测量点的测量值之间的差值大于一个测量点时,进行测量以获得测量值,然后后退,以及设置测量点的步骤 标准值,在一个测量点和下一个测量点之间的位置,并进行测量。
    • 74. 发明申请
    • MEASUREMENT METHOD FOR CHARACTERISTICS OF A NEAR-SURFACE MAGNETIC FIELD USING A SCANNING PROBE MICROSCOPE
    • 使用扫描探针显微镜对近地表面磁场特性的测量方法
    • WO02048682A1
    • 2002-06-20
    • PCT/RU2001/000544
    • 2001-12-13
    • G01B7/34G01N27/82G01Q60/08G01Q60/50G01R33/038G01R33/12G01N13/10
    • G01Q60/50G01N27/82G01R33/0385
    • The inventive measurement method for characteristics of a near-surface magnetic field using a scanning probe microscope relates to scanning probe microscopy. The aim of the invention is to exclude the effect of phase heterogeneity during the measurement of the characteristics of the near-surface magnetic field. Said method consists in the following: oscillations of a probing device (1) are actuated at a first frequency, said probing device is brought forward towards the surface of a sample (2) until a predetermined value of the oscillation amplitude thereof is obtained, the surface of the sample (2) is scanned with the aid of the probe device (1) oscillated at the first frequency. The obtained signal is stored at the oscillation amplitude of the probing device (1) equal to the predetermined value. The scanning is carried out several times. During the second scanning, the oscillations are actuated by a potential difference having a constant and a variable in time voltage components. The value of the constant voltage component at each scanning point is chosen in such a way that the oscillation amplitude is reduced to the minimum thereof at a first harmonic of the second frequency. Afterward said value is stored. The additional scanning is carried out according to the same curve compensating the surface electrical potential. The deviation of the scanning device at the scanning points are recorded, whereby the characteristics of the magnetic field are obtained.
    • 使用扫描探针显微镜的本发明的近表面磁场特性的测量方法涉及扫描探针显微镜。 本发明的目的是排除近场表面磁场特性测量过程中相位异质性的影响。 所述方法包括:探测装置(1)的振荡以第一频率启动,所述探测装置朝向样品(2)的表面前进,直到获得其振荡幅度的预定值, 借助于以第一频率振荡的探针装置(1)扫描样品(2)的表面。 所获得的信号以探测装置(1)的振荡幅度存储在等于预定值。 扫描多次。 在第二扫描期间,通过具有恒定的电位差和时间电压分量可变的振荡来驱动振荡。 选择每个扫描点处的恒定电压分量的值,使得在第二频率的第一谐波处将振荡幅度减小到最小值。 之后所述的值被存储。 根据补偿表面电位的相同曲线进行附加扫描。 记录扫描装置在扫描点处的偏差,从而获得磁场的特性。
    • 75. 发明申请
    • APPARATUS AND METHOD FOR THE CHECKING OF FORCES
    • 装置和方法检查力
    • WO02006782A1
    • 2002-01-24
    • PCT/EP2001/007793
    • 2001-07-06
    • G01L5/00G01L5/16G01N13/10G01N13/22G11B21/21G11B5/48
    • G01L5/0057
    • An apparatus and a method for measuring the force (GL) applied by an elastically flexible element (5;71,71') undergoing a pre-set elastic deformation, more specifically an element that carries a slider (3) and includes a thrust device that applies a force to the flexible element. The thrust device includes, for instance, a pneumatic nozzle (27;57,57';28) for applying a force (R) to an intermediate portion (4) of the thin plate, at a thrust section (K). A position sensor (30;80) detects the height (z) of the slider - indicativeof the deformation of the flexible element. The value (MF) of the moment of the applied torque when the height (ZF) of the slider indicates the pre-set elastic deformation of the flexible element, is utilized for calculating the force to be measured according to the formula GL = MF / L where L is the distance separating the slider from the section of weakness.
    • 一种用于测量经受预设弹性变形的弹性柔性元件(5; 71,71')施加的力(GL)的装置和方法,更具体地说,是携带滑块(3)并包括推力装置 其向柔性元件施加力。 推力装置包括例如用于在推力部分(K)处向薄板的中间部分(4)施加力(R)的气动喷嘴(27; 57,57'; 28)。 位置传感器(30; 80)检测滑块的高度(z),表示柔性元件的变形。 当滑块的高度(ZF)表示柔性元件的预设弹性变形时,施加转矩的力矩的值(MF)用于根据公式GL = MF / L,其中L是将滑块与弱点分开的距离。
    • 78. 发明申请
    • METHOD FOR INVESTIGATING OR STRUCTURING A SURFACE LAYER
    • 程序对表面层或结构
    • WO99030130A2
    • 1999-06-17
    • PCT/EP1998/007597
    • 1998-11-25
    • G01N33/543G01B11/30G01N13/10G01N21/17G01N21/45G01N21/84G01N21/94G01N27/414G01N27/416H01L21/66G01N13/00
    • H01L22/24G01B11/30G01N21/94
    • The invention relates to a method for investigating the surface of an object for a topographical and/or chemical characteristic. According to said method, the surface of the object is subjected to the action of surface structure selective (for investigating a topographical characteristic) and/or chemoselective (for investigating a chemical characteristic) biocomponents and a nutrient- or osmotic protective medium in such a way that the biocomponents in the nutrient- or osmotic protective medium are in contact with the object surface or are at a distance from the object surface which is within their range of detection. The object surface is then investigated using the biocomponents in the nutrient- or osmotic protective medium and at least one investigation measuring value is determined. The investigation measuring value is then compared to a reference measuring value and the result of this comparison is used to draw conclusions as to the topographical and/or chemical characteristics of the object. The invention provides a simple, very precise method for investigating the surface of an object for a topographical and/or chemical characteristic.
    • 在用于检查与表面结构选择性和/或用于与化学选择性的生物成份,并用营养或渗透保护介质中的化学性质的检查地形特性的检查对象的表面上的物体表面的地形和/或化学属性,这是这样一种方法 施加是在营养或渗透保护介质与生物组分相接触布置在物体表面或小于所述物体表面的生物成份的检测范围间隔开。 接着,将对象表面与布置在营养物或渗透保护介质的生物成份通过确定至少一个测量值的调查研究。 然后,研究测量值与一个基准测量值,并从比较的结果推导出所述物体的地形和/或化学性质。 用方法,对象表面可以很容易地以高灵敏度分析,以地形和/或化学特性。