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    • 64. 发明申请
    • FLUXLESS SOLDERING PRETREATING SYSTEM AND METHOD USING FLUORINE-CONTAINING PLASMA
    • 无氟焊接预处理系统和使用含氟等离子体的方法
    • WO1995013896A1
    • 1995-05-26
    • PCT/US1994013371
    • 1994-11-16
    • MCNCBOBBIO, Stephen, M.KOOPMAN, Nicholas, GeorgeNANGALIA, Sundeep
    • MCNC
    • B23K01/20
    • B23K35/38B23K1/20B23K2101/36H05K3/3489
    • A method of soldering a copper layer without the use of fluxing agents by exposing the copper layer to a fluorine-containing plasma. Solder is then placed onto the surface of the copper layer and reflowed. Reflow can take place at low temperatures, atmospheric pressure and in an inert or oxidizing atmosphere using standard solder reflow equipment. A fluxless soldering sample pretreating system includes a sample chamber having an opening therein and a sample holder. A sample chamber extension extends outwardly from the opening to define a passageway from the sample chamber extension, through the opening, and into the sample chamber. A fluorine-containing gas is supplied into the sample chamber extension. An energy source such as a microwave oven surrounds the sample chamber extension. The microwave oven produces microwave energy in the sample chamber extension to form a plasma therein and dissociate the fluorine-containing gas into atomic fluorine. A perforated aluminum plate extends transversely across the passageway and blocks the plasma from traversing the passageway from the sample chamber extension into the sample chamber, while allowing the atomic fluorine to traverse the passageway from the sample chamber extension into the sample holder. A second chamber extension, gas supply and microwave oven may be added to improve uniformity for large samples.
    • 一种通过将铜层暴露于含氟等离子体而不使用助熔剂来焊接铜层的方法。 然后将焊料放置在铜层的表面上并回流。 回流可以使用标准的回流焊设备在低温,大气压和惰性或氧化性气氛中进行。 无助焊剂样品预处理系统包括其中具有开口的样品室和样品保持器。 样品室延伸部从开口向外延伸以限定从样品室延伸部穿过开口并进入样品室的通道。 向样品室延伸部供给含氟气体。 诸如微波炉的能源围绕样品室延伸。 微波炉在样品室延伸部中产生微波能量,在其中形成等离子体,并将含氟气体解离为原子氟。 穿孔铝板横向延伸穿过通道,并阻止等离子体横穿从样品室延伸部进入样品室的通道,同时允许原子氟穿过从样品室延伸部分进入样品架的通道。 可以添加第二室延伸,气体供应和微波炉以改善大样品的均匀性。