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    • 53. 发明申请
    • METHOD OF AN APPARATUS FOR INTERFEROMETRICALLY INSPECTING A SURFACE OF AN OBJECT
    • 用于间接检查物体表面的装置的方法
    • WO1994000733A1
    • 1994-01-06
    • PCT/GB1993001299
    • 1993-06-18
    • BRITISH TECHNOLOGY GROUP LTD.MONTGOMERY, Paul, ChristopherFILLARD, Jean-Pierre
    • BRITISH TECHNOLOGY GROUP LTD.
    • G01B11/30
    • G01B9/02083G01B9/02063G01B9/0209G01B11/303G01J3/453G01J9/02G01N2021/551
    • This invention provides apparatus for and a method of interferometrically inspecting a surface of an object. The invention is particularly well suited for inspecting semiconductor devices in the sub-micron range. A two beam interference microscope (102) obtains an image of an object (100) which is mounted on a piezo controlled sample table (104) and illuminated using a broadband light source. A CCD camera (100) obtains an image and the image is processed by using information derived from the interference fringes. The advantage is that large step heights can be measured and that a priori knowledge of the surface is not required. The invention can be adapted so that it can be used to simultaneously inspect and analyse an object, the latter being achieved by utilising data derived from a characteristic phase and/or spectral variation occurring in reflected light. This data can be manipulated mathematically e.g. by a Fourier Transform.
    • 本发明提供了用于干涉测量物体表面的装置和方法。 本发明特别适用于检测亚微米范围内的半导体器件。 双光束干涉显微镜(102)获得安装在压电控制样品台(104)上并使用宽带光源照射的物体(100)的图像。 CCD相机(100)获得图像,并且通过使用从干涉条纹导出的信息来处理图像。 优点是可以测量大的台阶高度,并且不需要对表面的先验知识。 本发明可以适用于可以同时检查和分析物体,后者通过利用从反射光中发生的特征相位和/或光谱变化导出的数据来实现。 该数据可以数学地操作,例如。 通过傅里叶变换。