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    • 52. 发明申请
    • METHOD AND DEVICE FOR MANUFACTURING SEMICONDUCTOR DEVICE
    • 用于制造半导体器件的方法和装置
    • WO1998007186A1
    • 1998-02-19
    • PCT/JP1997002731
    • 1997-08-06
    • HITACHI, LTD.SAITO, AkioOKA, HitoshiTAKAMATSU, AkiraYOSHIDA, TadanoriTANAKA, KatsuhikoFURUKAWA, Ryouichi
    • HITACHI, LTD.
    • H01L21/304
    • H01L21/3065
    • The contaminant which hinders the improvement of the yield of semiconductor devices becomes finer in size as the packing density of an integrated circuit formed on the surface of a substrate, such as the semiconductor wafer, etc., increases. In addition, it frequently occurs that adhering matters are formed on the internal surface of a film forming device, dry etching device, etc., and, when the matters come off the internal surface, adhere to the surface of a wafer as foreign matters. Therefore, it becomes necessary to clean the surface of the wafer and the internal surface of the device and this cleaning drops the throughput of the device. The above-mentioned problem is solved by controlling the temperatures of the wafer and internal surface of the device, the distribution of plasma, the flow rate and component of a gas, etc., so that the wafer and internal surface of the device can be cleaned simultaneously under the optimum condition.
    • 随着形成在诸如半导体晶片等的基板的表面上的集成电路的堆积密度的增加,妨碍半导体器件的产量提高的污染物的尺寸变得越来越细小。 此外,经常发生在成膜装置,干蚀刻装置等的内表面上形成附着物,并且当物质从内表面脱落时,作为异物附着在晶片的表面上。 因此,需要清洁晶片的表面和器件的内表面,并且这种清洁降低了器件的吞吐量。 通过控制晶片的温度和器件的内表面,等离子体的分布,气体的流量和分量等来解决上述问题,使得晶片和器件的内表面可以是 在最佳条件下同时清洁。
    • 54. 发明申请
    • POWER CONVERTER
    • 电源转换器
    • WO1998001940A1
    • 1998-01-15
    • PCT/JP1996001869
    • 1996-07-05
    • HITACHI, LTD.MIYAZAKI, HidekiSUZUKI, KatsunoriSUGIYAMA, Shigeru
    • HITACHI, LTD.
    • H02M07/48
    • H02M7/487H02M1/34H02M7/538H02M2001/346H03K17/08148H03K2217/0036Y02B70/1491
    • A power converter such that overvoltage at switching time is suppressed and the loss is lowered by means of a snubber circuit for a power semiconductor device and noise malfunction of the control circuit provided near the power semiconductor device due to high frequency current is suppressed. In the power converter in which first and second self-extinguishing semiconductor devices are connected in series between the terminals of a main power source in a bridge circuit, at least two capacitive elements are connected in series between one end of the bridge and the node of the semiconductor devices and a switching element which conducts when the capacitive elements shift to a charged state from a discharged state is provided in parallel with one of the capacitive elements. The other capacitive element is connected to both ends of the bridge through a resistance means.
    • 能够抑制开关时的过电压,通过用于功率半导体器件的缓冲电路来降低损耗的电力转换器,抑制由于高频电流而设置在功率半导体器件附近的控制电路的噪声故障。 在其中第一和第二自熄半导体器件串联连接在桥式电路中的主电源的端子之间的功率转换器中,至少两个电容元件串联连接在桥的一端和节点之间 半导体器件和当电容元件从放电状态转移到充电状态时导通的开关元件与电容元件中的一个并联设置。 另一个电容元件通过电阻装置连接到桥的两端。
    • 57. 发明申请
    • PARKING LOT AND PARKING CONTROLLING METHOD
    • 停车场和停车控制方法
    • WO1997047839A1
    • 1997-12-18
    • PCT/JP1996001638
    • 1996-06-14
    • HITACHI, LTD.
    • HITACHI, LTD.HASHIMOTO, NaotoNAKAJIMA, IchiroGOMI, KiyoshiSAGAWA, Toshiaki
    • E04H06/00
    • G07B15/04E04H6/42
    • In a car parking lot comprising a parking area for parking a car, entry and exit areas located in a direction perpendicular to the parking area, entry and exit openings for allowing the driver/passenger to get out of and into a car, an entry and/or exit lift for transporting a car between the entry and exit openings and the parking area and a passage for the driver/passenger connected to the entry and exit opening in the entry and exit areas, there are provided parking card issuing means provided at the entry opening for allowing the user to receive a parking change discount off the parking charge based on the amount of money spent for shopping, and parking charge settling means provided at the exit opening for settling the parking charge using the parking card, the parking card having a memory for storing data needed to calculate the parking charge and the amount of money spent for shopping inside the store.
    • 在停车场的停车场中,设有用于停车的停车场,与停车区域垂直的方向的入口和出口区域,用于允许驾驶员/乘客离开和进入汽车的入口和出口,入口和 /或出入口电梯,用于在进出口和停车场之间运输汽车,以及与入口和出口区域的入口和出口连接的司机/乘客的通道,设有停放卡发行装置, 进入开口,用于允许用户基于购物所花费的金额收取停车费的停车变更折扣;以及设置在出口处的停车收费结算装置,用于使用停车卡结算停车费,停车卡具有 用于存储用于计算停车收费所需的数据的存储器和用于在商店内购物所花费的金额。
    • 58. 发明申请
    • SWITCHING POWER SOURCE CIRCUIT
    • 切换电源电路
    • WO1997044884A1
    • 1997-11-27
    • PCT/JP1996001345
    • 1996-05-21
    • HITACHI, LTD.HATAFUKU, ShinyaHORIE, MasayukiSAKAI, Shuuichi
    • HITACHI, LTD.
    • H02M03/155
    • H02M3/1588H02M2001/007Y02B70/1466
    • A switching power source circuit including a small-sized MOSFET for small current and a large-sized MOSFET for large current both used as output MOSFETs which serve as a switching element for driving inductances such as a choke coil and a transformer. The MOSFETs are selectively operated in accordance with the output current. The MOSFETs which supply the driving current of the inductances are controlled by using one channel of a two-channel control IC and a MOSFET which transmits the counterelectromotive forces of the inductances to the load side is controlled by using the other channel of the IC. The oscillation frequency of the power source circuit is also varied in accordance with the output current.
    • 包括用于小电流的小尺寸MOSFET和用于大电流的大尺寸MOSFET的开关电源电路都用作输出MOSFET,其用作用于驱动诸如扼流线圈和变压器的电感的开关元件。 MOSFET根据输出电流选择性地工作。 通过使用双通道控制IC的一个通道来控制提供电感的驱动电流的MOSFET,并且通过使用IC的另一通道来控制将电感的反电动势传输到负载侧的MOSFET。 电源电路的振荡频率也根据输出电流而变化。
    • 59. 发明申请
    • INFORMATION PROCESSOR
    • 信息处理器
    • WO1997039423A1
    • 1997-10-23
    • PCT/JP1996001044
    • 1996-04-17
    • HITACHI, LTD.HATAYA, ShigekiASAMA, HajimeTOMITA, HiromiITO, JunYAMAUCHI, TsukasaNAKAJIMA, Akira
    • HITACHI, LTD.
    • G06K09/72
    • G06K9/00429
    • An information processor which recognizes characters handwritten on the surface of a tablet-like plate based on the handwriting and strokes and searches a dictionary for the characters and words as the notation to convert them into a mixed character string of KANA and KANJI. The information processor is provided with a same-shape character conversion dictionary (8) which stores the characters having shapes which are the same as or similar to that of the character recognized by a character recognizing means (2). When another character having the same or similar shape as or to the recognized character exists, the dictionary (8) is searched for the another character, and the searched another character and a character or word, as the notation, corresponding to the recognized character, are retrieved from a mixed writing conversion dictionary (7) by a same-shaped character collectively retrieving means. The information processor then converts the character or word retrieved by the retrieving means (5) into a KANA-KANJI mixed character string by means of a mixed writing converting means (3) and displays the character string on a displaying means (4).
    • 一种信息处理器,其基于手写和笔画识别在平板状平板的表面上手写的字符,并且搜索用于字符和单词的字典作为将其转换成KANA和KANJI的混合字符串的符号的信息处理器。 该信息处理器设置有相同形状的字符转换字典(8),其存储具有与由字符识别装置(2)识别的字符相同或类似的形状的字符。 当存在与识别字符相同或相似形状的另一个字符时,搜索字典(8)中的另一个字符,并且搜索到的另一个字符和与识别的字符对应的符号的字符或字, 通过相同字符集合检索装置从混合写入转换字典(7)中检索。 然后,信息处理器通过混合写入转换装置(3)将由检索装置(5)检索到的字符或字符转换成KANA-KANJI混合字符串,并将该字符串显示在显示装置(4)上。
    • 60. 发明申请
    • DISK DRIVE AND COMPUTER
    • 磁盘驱动器和计算机
    • WO1997038367A1
    • 1997-10-16
    • PCT/JP1997001204
    • 1997-04-09
    • HITACHI, LTD.HITACHI MICROCOMPUTER SYSTEM, LTD.HAGIWARA, MitsuoTAKAHASHI, HiromasaYAMATO, SatoshiSHIBASAKI, NobuoYOTSUTANI, MitsuoISHII, Tsutomu
    • HITACHI, LTD.HITACHI MICROCOMPUTER SYSTEM, LTD.
    • G06F09/06
    • G06F3/0614G06F3/0623G06F3/0632G06F3/0644G06F3/0658G06F3/0674G06F3/0676G06F3/0677G06F8/65G06F9/4401
    • A microcomputer (5) constituted in an integrated circuit including an electrically erasable programmable nonvolatile memory (56) and a central processing unit (51) is adopted for controlling a disk drive (2). The memory (56) stores an application program, such as a recorded information reproduction control program in an application program area (561) and a reboot program which is utilized to update the application program in a reboot program area (560). The processor (51) rewrites all or part of the application program by executing the reboot program according to an application program rewriting command supplied from the outisde. Therefore, all or part of the application program stored in the memory (56) can be rewritten even after the microcomputer (5) is mounted on a disk drive. Since the reboot program area is not rewritten, the reprogram of the application program area is restarted immediately after the reboot program is executed again even when the reprogramming of the nonvolatile memory is interrupted due to abnormality.
    • 采用包括电可擦除可编程非易失性存储器(56)和中央处理单元(51)的集成电路中的微计算机(5)来控制磁盘驱动器(2)。 存储器(56)将诸如记录信息再现控制程序之类的应用程序存储在应用程序区域(561)中,并且重新启动程序用于在重新启动程序区域(560)中更新应用程序。 处理器(51)通过根据从outisde提供的应用程序重写命令执行重新启动程序来重写应用程序的全部或部分。 因此,即使在微型计算机(5)安装在磁盘驱动器上之后,也可以重写存储在存储器(56)中的应用程序的全部或一部分。 由于重新启动程序区域不被重写,所以即使非易失性存储器的重新编程由于异常而被中断,也会立即重新启动应用程序区域的重新编程。