会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 44. 发明申请
    • POLISHING PAD COMPRISING PARTICULATE POLYMER AND CROSSLINKED POLYMER BINDER
    • 包含聚合物和交联聚合物粘合剂的抛光垫
    • WO02022309A1
    • 2002-03-21
    • PCT/US2001/028948
    • 2001-09-14
    • B24B37/24B24D3/32B24D13/12B24D13/14B24B37/04
    • B24B37/24B24D3/32B24D13/12
    • A polishing pad (6) is described as comprising, (a) particulate polymer selected from particulate thermoplastic polymer (20) (e.g., particulate thermoplastic polyurethane), particulate crosslinked polymer (e.g., particulate crosslinked polyurethane and/or particulate crosslinked polyepoxide) and mixtures thereof; and (b) crosslinked organic polymer binder (26) (e.g., crosslinked polyurethane binder and/or crosslinked polyepoxide binder), which binds the particulate polymer (20) together. The particulate polymer (20) and crosslinked organic polymer binder (26) are distributed substantially uniformly throughout the polishing pad (6), and the pad (6) has a percent pore volume of from 2 percent by volume to 50 percent by volume, based on the total volume of said polishing pad (6). Polishing pad (6) assemblies are also described.
    • 抛光垫(6)被描述为包括:(a)选自颗粒状热塑性聚合物(20)(例如颗粒状热塑性聚氨酯),颗粒状交联聚合物(例如,颗粒状交联聚氨酯和/或颗粒状交联聚环氧化物)和混合物 物; 和(b)将颗粒聚合物(20)结合在一起的交联的有机聚合物粘合剂(26)(例如,交联的聚氨酯粘合剂和/或交联的聚环氧化物粘合剂)。 颗粒聚合物(20)和交联的有机聚合物粘合剂(26)基本均匀地分布在整个抛光垫(6)中,并且垫(6)的孔体积百分比为2体积%至50体积% 关于所述抛光垫(6)的总体积。 还描述了抛光垫(6)组件。
    • 45. 发明申请
    • METHOD FOR GRINDING GLASS
    • 研磨玻璃的方法
    • WO00064631A1
    • 2000-11-02
    • PCT/US2000/010915
    • 2000-04-21
    • B24B7/24B24B21/00B24D3/32B24D3/34B24D11/00
    • B24B7/241B24D3/32B24D3/346B24D11/001
    • A method of grinding a glass or other workpiece is described comprising the steps of: contacting a grinding layer (22) of a flexible abrasive article (10) with the surface of a glass workpiece, the grinding layer comprising abrasive grit dispersed in a bonding matrix (15), the matrix (15) attached to a flexible backing (12); and moving the grinding layer (22) of the flexible abrasive article (10) and the surface of the glass workpiece relative to one another at a velocity of at least about 16.5 meters per second to provide a final surface roughness Ra less than about 0.030 micrometer.
    • 描述了一种研磨玻璃或其它工件的方法,其包括以下步骤:将柔性磨料制品(10)的研磨层(22)与玻璃工件的表面接触,研磨层包括分散在粘合基质中的磨粒 (15),所述基体(15)附接到柔性背衬(12)上; 以及以至少约16.5米/秒的速度相对于彼此移动所述柔性磨料制品(10)的研磨层(22)和所述玻璃工件的表面,以提供小于约0.030微米的最终表面粗糙度Ra 。
    • 46. 发明申请
    • POLISHING GRINDING WHEEL AND SUBSTRATE POLISHING METHOD WITH THIS GRINDING WHEEL
    • 抛光砂轮和抛光轮抛光方法
    • WO99055493A1
    • 1999-11-04
    • PCT/JP1999/002270
    • 1999-04-28
    • B24B1/00B24B37/04B24B37/24B24B53/017B24D3/32H01L21/304
    • B24B37/245B24B37/042B24B53/017B24D3/32H01L21/31053H01L21/3212
    • A grinding wheel capable of polishing only protruded parts and having a self-stop function so that the polishing is terminated automatically when irregularities have been eliminated by the polishing and a polishing method using the grinding wheel in the polishing of a semiconductor wafer having irregular patterns on its surface, the grinding wheel for polishing a substrate to flat- and mirror-shape comprising abrasive grains of 2 mu m or less in particle size and 90 % or more in purity, with an abrasive grain to binder composition ratio (volume ratio) of 1: 0.5 or more (the ratio of binder to abrasive grain is 0.5 or more to 1), and with an abrasive grain of 10 % or higher, a binder of 60 % or less, and pores of 10 to 40 %. A substrate polishing method wherein the substrate having a surface forming irregularities thereon is polished with a grinding wheel, comprising the steps of polishing, for a specified time, the polish surface of the substrate under the condition that liquid not containing abrasive grains is supplied to the polishing surface of the grinding wheel so as to eliminate the irregularities on the surface for smoothening and feeding abrasive grains to the smoothened polished surface of the substrate for further polishing the polished surface uniformly by a specified film thickness.
    • 一种能够仅抛光突出部分并且具有自动停止功能的研磨轮,使得当通过抛光消除不规则性时抛光被自动终止,以及在抛光具有不规则图案的半导体晶片的抛光方法的抛光方法 其表面,用于将基板研磨成平面和镜面形状的砂轮,其包括粒度为20μm以下的磨粒,纯度为90%以上,磨粒与粘合剂组成比(体积比) 1:0.5以上(粘合剂与磨粒的比例为0.5以上1),磨粒为10%以上,粘合剂为60%以下,孔为10〜40%。 一种衬底抛光方法,其中具有在其上形成凹凸的表面的衬底用研磨轮抛光,包括以下步骤:在不含磨料的液体被供应到所述衬底的条件下抛光所述衬底的抛光表面 研磨砂轮的抛光表面,以消除表面上的凹凸,使磨粒平滑并将磨料颗粒送入基板的平滑抛光表面,以进一步抛光抛光表面指定的膜厚度。