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    • 44. 发明申请
    • SYSTEMS AND METHODS OF PREPARING A COMPOSITION USED IN MULTIPLE PROCESSING TOOLS
    • 制备用于多种加工工具的组合物的系统和方法
    • WO2009042698A3
    • 2009-12-30
    • PCT/US2008077543
    • 2008-09-24
    • TRES ARK INCANDERSON GARY RFOWLER MATTTIMMONS TOM
    • ANDERSON GARY RFOWLER MATTTIMMONS TOM
    • G05D7/00G05D11/02
    • B01F15/0408B01F15/0441G05D11/131
    • There is disclosed a system and method of formulating a batch comprising at least two chemicals. An embodiment is disclosed wherein a feedforward algorithm can be used to control the target blend. Subsequently a feedback closed loop control loop algorithm is provided for a multivariant blend. Use of this approach allows for a continuously autoreplenished and controlled blend. Also disclosed is the ability to control via feedforward and feedback algorithms a fast responding control mode that allows for the elimination of a container. This approach will allow for 'one pass' blending with control. The controller implements an automated fault detection and correction system, thereby identifying necessary maintenance prior to failure. If failure does occur the signature recognition allows rapid analysis and correction thus maximizing tool availability.
    • 公开了一种配制包含至少两种化学品的批料的系统和方法。 公开了一种实施例,其中可以使用前馈算法来控制目标混合。 随后,为多变量混合提供了反馈闭环控制环路算法。 使用这种方法允许连续自动补偿和控制混合。 还公开了通过前馈和反馈算法控制允许消除容器的快速响应控制模式的能力。 这种方法将允许“一次通过”与控制混合。 控制器实现自动故障检测和校正系统,从而在故障之前识别必要的维护。 如果发生故障,则签名识别允许快速分析和校正,从而最大限度地提高工具可用性
    • 45. 发明申请
    • AN APPARATUS FOR DISPENSING PRECISE VOLUMES OF FLUID
    • 用于分配流体的精密体积的装置
    • WO2006039197A3
    • 2009-09-11
    • PCT/US2005034088
    • 2005-09-22
    • LAM RES CORPGARCIA JAMES P
    • GARCIA JAMES P
    • G05D7/00G05D11/02
    • B24B57/02B01F3/0803B01F15/00253B01F15/0441G05D11/132
    • A dispensing measuring system for dispensing a measure of fluid for use with a system to treat semiconductor workpieces is disclosed. The dispensing measuring system includes at least one feedline having a receiving tank having a volumetric capacity for receiving a measure of fluid. A sensor senses when the receiving tank has received the measure of fluid. A mix tank is attached to the at least one feedline for receiving the measure of fluid from the receiving tank to create a batch of fluid. A controller is electrically connected to the at least one feedline to control the flow of fluid through the at least one feedline. The controller is electrically connected to the mix tank. A connecting line is attached to the mix tank.
    • 公开了一种用于分配与用于处理半导体工件的系统一起使用的流体测量的分配测量系统。 所述分配测量系统包括至少一个馈线,所述馈线具有接收罐,所述接收罐具有用于接收流体测量的容积。 传感器感测接收罐何时已经接收到流体的测量。 混合罐附接到至少一个进料管线,用于接收来自接收罐的流体测量值以产生一批流体。 控制器电连接到至少一个馈线以控制通过至少一个馈线的流体流。 控制器电连接到混合罐。 连接线连接到混合罐。
    • 46. 发明申请
    • METHOD AND APPARATUS FOR QUASI-CONTINUOUS AND QUASI-SIMULTANEOUS DISPENSING
    • 准连续和同时分配的方法和装置
    • WO2004064989A2
    • 2004-08-05
    • PCT/US2004/001456
    • 2004-01-21
    • FQUBED
    • FEYGIN, IlyaNEWSAM, John, M.
    • B01F
    • B01F15/0404B01F13/1055B01F13/1072B01F15/0441B01F2215/0037B01J2219/00306B01J2219/0036B01L3/0293B01L2200/14C40B60/14
    • A system and method for creating multiple mixtures is disclosed. The illustrative system described herein includes dispensing elements that are moved into alignment with various receivers (or vice versa) to deliver ingredients. In some embodiments, the system requires only one dispensing element (e.g., valve, nozzle, orifice, etc.) per ingredient dispensed, irrespective of the number of receivers in the system. In accordance with the principles of this invention, the system is operated such that a plurality of ingredients are incrementally added to the receivers. Incremental addition is performed in such a way that, from the "perspective" of the mixture being formed, the ingredients are added quasi­ continuously (i.e., a near-continuous flow of an ingredient) or quasi­ simultaneously (i.e., all ingredients are added at nearly the same time), or both.
    • 公开了一种用于产生多种混合物的系统和方法。 本文描述的说明性系统包括分配元件,其移动成与各种接收器对准(或反之亦然)以输送成分。 在一些实施例中,不管系统中的接收器的数量如何,系统仅需要分配每种成分的一个分配元件(例如,阀,喷嘴,孔口等)。 根据本发明的原理,操作系统使得多个成分被递增地添加到接收器。 以这样的方式进行增量添加,即从形成的混合物的“角度”中,将成分准备加入(即,成分的近连续流动)或同时沉淀(即,将所有成分加入到几乎 同时)或两者兼而有之。
    • 50. 发明申请
    • PRECISION VOLUMETRIC MEASURING AND MIXING APPARATUS
    • 精密容积式测量和混合装置
    • WO9949962A3
    • 1999-12-23
    • PCT/US9905039
    • 1999-03-08
    • DU PONT
    • BLAIR HOWARD JRDICKERT JOHN MICHAELMAHONEY CLARENCE BERNARD JR
    • B01F3/08B01F15/02B01F15/04D01D5/096D06B23/20
    • B01F15/026B01F15/00422B01F15/0441B01F2015/0221D01D5/096D06B23/205Y10T137/2534Y10T137/7316Y10T137/8342Y10T137/8729Y10T137/87298
    • An apparatus for mixing a first liquid (22) with at least a second liquid (22) includes a tank (12) having a mixing chamber (12M) to which is connected a first (28A, 30A) and a second (28B, 30B) supply line from each of a first (22) and a second source (24) of liquid. A gross control valve (32, 36) disposed in each of the first supply lines (28A, 30A) and a fine control (34, 38) valve disposed in each of the second supply lines (28B, 30B). A noncontacting detector (44) measures the total volume of liquid present in the mixing chamber. A controller (48), operable in response to signals output from the detector (44) representative of the total volume within the mixing chamber (12M) as continuously measured by the detector (44), actuates in accordance with a predetermined sequence the gross (32, 36) and the fine (34, 38) control valves in the respective first and second supply lines from the first source and from the second source.
    • 一种用于将第一液体(22)与至少第二液体(22)混合的设备包括具有混合室(12M)的箱(12),混合室与第一液体(28A,30A)和第二液体(28B,30B) )来自液体的第一源(22)和第二源(24)中的每一个的供应管线。 总控制阀(32,36)设置在第一供给管线(28A,30A)中的每一个中,并且精细控制(34,38)阀设置在每个第二供给管线(28B,30B)中。 非接触式检测器(44)测量混合室中存在的液体的总体积。 响应于从检测器(44)输出的表示由检测器(44)连续测量的混合腔室(12M)内的总体积的信号而操作的控制器(48)根据预定顺序致动毛刺 所述第一和第二供应管线中的细(34,38)控制阀分别来自第一源和第二源。