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31. 发明申请

WO1997037064A1 METHOD AND APPARATUS FOR GROWING ORIENTED WHISKER ARRAYS 审中-公开
标题翻译：用于生长面向垫片阵列的方法和装置
公开(公告)号：WO1997037064A1
公开(公告)日：1997-10-09
申请号：PCT/RU1997000078
申请日：1997-03-24
申请人： GIVARGIZOV, Evgeny Invievich
IPC分类号： C30B11/12
CPC分类号： H01J9/025 , C30B11/12 , C30B25/005 , C30B29/06 , H01L21/02381 , H01L21/02532 , H01L21/02603 , H01L21/0262 , H01L21/02645 , H01L21/02653 , Y10T117/102
摘要： A method for growing of oriented whisker arrays on a single-crystalline substrate consists in vapor-phase transport of the material to be crystallized from a solid-state source body of the same composition as the whiskers to the substrate coated with liquid-phase particles that serve as nucleation/catalyzing centers for the whisker growth. The source body has a plane surface that is faced to the substrate and parallel to it so that a vectorly-uniform temperature field, whose gradient is perpendicular to both the substrate and the source, is created. The vectorly-uniform temperature field is realized by an apparatus with high-frequency heating of specially designed bodies that are arranged in a special position in respect to the high-frequency inductor. Laser and/or lamp heat sources can be also used either separately or in combinations with the high-frequency heater. In the apparatus, the material source is heated, while the substrate takes heat from the material source. In another case, the substrate is heated, while the material source takes heat from the substrate.
摘要翻译：用于在单晶衬底上生长定向晶须阵列的方法是将待结晶材料从与晶须相同组成的固态源体气相输送到涂有液相颗粒的基底上，作为晶须生长的成核/催化中心。源体具有面向衬底并平行于其的平面，从而产生其梯度垂直于衬底和源两者的矢量均匀的温度场。矢量均匀的温度场由具有高频加热的设备实现，该装置被设置在相对于高频电感器的特殊位置的专门设计的主体。激光和/或灯光源也可以单独使用或与高频加热器组合使用。在该装置中，材料源被加热，同时衬底从材料源吸收热量。在另一种情况下，衬底被加热，同时材料源从衬底吸收热量。

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