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    • 21. 发明申请
    • 흑체의 온도제어장치 및 그 제어방법
    • 用于控制黑体温度的装置和方法
    • WO2011056010A2
    • 2011-05-12
    • PCT/KR2010/007779
    • 2010-11-05
    • 한국기초과학지원연구원김건희이정민양순철장기수김효식양문섭
    • 김건희이정민양순철장기수김효식양문섭
    • G01J5/12G01K11/20
    • G01J5/522G05D23/1919G05D23/27
    • 본 발명은 흑체의 온도제어장치 및 그 제어방법에 관한 것이다. 본 발명은 적외선 영역의 복사 에너지를 방출하는 흑체; 상기 흑체에 인접하게 장착되어, 선택적으로 열을 방출하거나 열을 흡수하는 제1a면과 제1b면을 구비하는 제1펠티어 소자; 상기 제1b면에 인접한 구리판; 선택적으로 열을 방출하거나 열을 흡수하는 제2a면과 제2a면을 구비하고, 상기 제2b면이 상기 구리판에 인접하는 제2펠티어 소자; 상기 제2a면에 인접하게 설치되는 절곡면과 상기 흑체의 양단에 인접하게 연장되는 암을 구비하는 열 전달부재; 및 상기 제1a면이 열을 방출하면 상기 제2a면도 동시에 열을 방출하고, 상기 제1a면이 열을 흡수하면 상기 제2a면도 동시에 열을 흡수하도록 제어하는 제어부;를 포함하는 흑체의 온도제어장치를 제공한다. 따라서, 본 발명에 의하면 흑체의 온도 분포를 균일하게 조절할 수 있다.
    • 本发明涉及一种用于控制黑体温度的装置和方法。 本发明涉及一种用于控制黑体温度的装置,包括:发射红外区域的辐射能的黑体; 布置在黑体附近的第一珀耳帖元件,具有用于选择性地发出或吸收热量的1a表面和1b表面; 布置在1b表面附近的铜板; 第二珀耳帖元件,其具有用于选择性地发射或吸收热量的2a表面和2b表面,其中所述2b表面布置在所述铜板附近; 具有布置在2a表面附近的弯曲表面的传热构件和朝向黑体的两端延伸的臂; 以及控制单元,其控制第一珀耳帖元件和第二珀耳帖元件,使得当1a表面发热时,2a表面同时发出热量,并且当1a表面吸收热量时,2a表面同时吸收热量。 根据本发明,能够均匀地分布黑体的温度。
    • 22. 发明申请
    • HOME AUTOMATION SYSTEM
    • 家庭自动化系统
    • WO2008029987A1
    • 2008-03-13
    • PCT/KR2007/003314
    • 2007-07-09
    • METACHEM INC.LEE, Deok-Jae
    • LEE, Deok-Jae
    • G05D23/19
    • F24D19/1015F24D3/12F24F11/30F24F2110/10G05D23/1928G05D23/27
    • Disclosed is a home automation system in which precise controls of temperature and flow rate are enabled and optimal air conditioning is carried out. The system includes a heating device; a cooling device; a contact-less multipoint temperature sensor to divide a target area of the heating and cooling apparatus into a plurality of divisional zones and to detect temperatures of the respective divisional zones; and a controller to set temperature from the outside, to receive temperature values of divisional zones selected from the plurality of divisional zones, and to control the heating device or the cooling device based on the set temperature. The system adopts an automatic flow rate controller and an air curtain device.
    • 公开了一种家庭自动化系统,其中实现了温度和流量的精确控制并且实现了最佳空调。 该系统包括加热装置; 冷却装置; 无接点多点温度传感器,用于将加热和冷却装置的目标区域划分成多个分区,并检测相应分区的温度; 以及控制器,用于从外部设定温度,以接收从多个分区选择的分区的温度值,并且基于设定温度来控制加热装置或冷却装置。 系统采用自动流量控制器和气帘装置。
    • 23. 发明申请
    • METHOD AND APPARATUS FOR DETERMINING MEASUREMENT VALUES
    • 用于确定测量值的方法和装置
    • WO2008015658A2
    • 2008-02-07
    • PCT/IB2007/053077
    • 2007-08-03
    • MATTSON TECHNOLOGY, INC.MERKL, Christoph
    • MERKL, Christoph
    • G05D23/27G01J5/00H01L21/00
    • H01L21/67115G01J5/0003G01J5/06G05D23/1917G05D23/27H01L21/67248
    • The present invention describes a method and an apparatus for determining measurement values which relate to at least one parameter of an object in a rapid heating system, with which the measurement values are determined by means of at least one measurement measured over time in a measuring system, and with which prediction values for the measurement values are calculated in at least one model system. With the method a first measurement value is calculated by means of the at least one measurement which was recorded at a first point in time, a first prediction value for the measurement value is calculated at a first point in time, a second measurement value is calculated by means of the at least one measurement which was recorded at a second point in time, a second prediction value is calculated for the measurement value at the second point in time, the development over time between the first and second measurement value is compared with the development over time between the first and second prediction value, a corrected second measurement value is determined if the development over time between the first and second measurement value differs from the development over time between the first and second prediction value, and the corrected second measurement value is issued by the measuring system. In particular, the present invention relates here to in-situ methods for correcting temperature or radiation measurement values of objects the response function of which suddenly and unexpectedly deviates from the response function prediction by the model during a thermal treatment cycle. The present invention is therefore intended in particular for methods for the in-situ correction of temperature or radiation measurements of objects established in rapid heating installations, preferably substrates such as e.g. semiconductor wafers, with which the object is heated with radiation sources, preferably halogen lamps, in particular if the temperature radiation is measured by a detector and includes both radiation portions of the temperature radiation of the substrate and direct and indirect radiation portions of the active elements heating the substrate and of surrounding objects.
    • 本发明描述了一种用于确定与快速加热系统中的物体的至少一个参数相关的测量值的方法和装置,通过该测量值,测量值通过在测量系统中随时间测量的至少一个测量来确定 并且在至少一个模型系统中计算测量值的预测值。 利用该方法,通过在第一时间点记录的至少一个测量来计算第一测量值,在第一时间点计算测量值的第一预测值,计算第二测量值 通过在第二时间点记录的至少一个测量值,针对第二时间点的测量值计算第二预测值,将第一和第二测量值之间的时间间隔的开发与 在第一和第二预测值之间随着时间的推移,确定校正的第二测量值,如果第一和第二测量值之间的时间长短与第一和第二预测值之间随时间的变化不同,并且校正的第二测量值 由测量系统发出。 特别地,本发明涉及用于校正物体的温度或辐射测量值的现场方法,该反应函数在热处理循环期间突然意外地偏离模型的响应函数预测。 因此,本发明特别涉及用于在快速加热装置中建立的物体的温度或辐射测量的原位校正的方法,优选地例如基板例如。 半导体晶片,其中物体用辐射源,优选卤素灯加热,特别是如果温度辐射由检测器测量,并且包括衬底的温度辐射的辐射部分和有源元件的直接和间接辐射部分 加热基材和周围物体。
    • 24. 发明申请
    • INTEGRATED SEMICONDUCTOR TEMPERATURE DETECTION APPARATUS AND METHOD
    • 一体化半导体温度检测装置及方法
    • WO2007047013A2
    • 2007-04-26
    • PCT/US2006/036805
    • 2006-09-21
    • MOTOROLA, INC.BICKHAM, Richard, S.ANDERSON, Dale, R.
    • BICKHAM, Richard, S.ANDERSON, Dale, R.
    • H01L29/00
    • G01K11/006G01K1/026G05D23/1932G05D23/27H01L29/7322H01L29/7816
    • An integrated semiconductor apparatus (300) (such as, but not limited to, a radio frequency power device) is comprised of a plurality of active device cells (302, 303), a plurality of temperature detectors (304, 305), and a controller (308). The active device cells are preferably each comprised of a plurality of active devices having a common signal input and a common signal output. The temperature detectors are preferably configured and arranged such that each of the temperature detectors detects a temperature indicator (such as infrared radiation) as corresponds to at least one of the active device cells but not, at least in substantial measure, other of the active device cells. The controller preferably operably couples to these temperature detectors and receives their detected output and generates control signals that operate on the inputs to the active device cells in a manner that changes the relative active device cell temperatures.
    • 集成半导体装置(300)(例如但不限于射频功率器件)由多个有源器件单元(302,303),多个温度检测器(304,305)和 控制器(308)。 有源器件单元优选地每个都包括具有公共信号输入和公共信号输出的多个有源器件。 温度检测器优选地被配置和布置成使得每个温度检测器检测到对应于至少一个有源器件单元的温度指示器(例如红外辐射),但至少在实质上不检测其它有源器件 细胞。 控制器优选地可操作地耦合到这些温度检测器并且接收其检测到的输出并且以改变相对有源器件单元温度的方式生成对有源器件单元的输入进行操作的控制信号。
    • 27. 发明申请
    • A TEMPERATURE SETTING DEVICE
    • 温度设定装置
    • WO1996012220A1
    • 1996-04-25
    • PCT/SE1995001187
    • 1995-10-13
    • AB ELECTROLUXCASTWALL, Lennart, W.WISS, Christer, C., I.
    • AB ELECTROLUX
    • G05D23/27
    • G05D23/27
    • There is described an individual-temperature control device for use with a cooking range (10) or like utility which includes one or more electrically heated zones (12, 14, 16, 18). A cooking vessel (42) can be placed on these zones. The temperature control device includes a sensor module (36) which is intended to be mounted on an associated attachment element (32) above the zones and cooking vessel respectively. The sensor module includes means (46) for aligning the module with a desired point (39) on the surface of foodstuff in the cooking vessel or with a desired point on the surface of liquid contained therein. The sensor module (36) functions to sense heat radiated from this point and is connected electrically to an electronic control unit (44). The control unit controls the temperature in the proximity of the point (39) in accordance with the sensed radiation, with the aid of a temperature control value stored in the control unit.
    • 描述了一种用于烹饪范围(10)或类似用途的个体温度控制装置,其包括一个或多个电加热区(12,14,16,18)。 烹饪容器(42)可以放置在这些区域上。 温度控制装置包括传感器模块(36),其分别安装在区域和烹饪容器上方的相关联的附接元件(32)上。 传感器模块包括用于将模块与烹饪容器中的食物表面上的期望点(39)对准或者包含在其中的液体表面上的期望点的装置(46)。 传感器模块(36)用于感测从该点辐射的热并且电连接到电子控制单元(44)。 借助于存储在控制单元中的温度控制值,控制单元根据感测到的辐射来控制点(39)附近的温度。