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21. 发明申请

WO2013118909A1 IMAGE FORMING OPTICAL SYSTEM, IMAGING APPARATUS, PROFILE MEASURING APPARATUS, STRUCTURE MANUFACTURING SYSTEM AND STRUCTURE MANUFACTURING METHOD 审中-公开
标题翻译：图像成像光学系统，成像装置，轮廓测量装置，结构制造系统和结构制造方法
公开(公告)号：WO2013118909A1
公开(公告)日：2013-08-15
申请号：PCT/JP2013/053441
申请日：2013-02-06
申请人： NIKON CORPORATION , NIKON METROLOGY NV
发明人： KITAZAWA, Daisuke , BLANCKAERT, Patrick
IPC分类号： G01B11/24 , G02B27/00 , G02B7/00
CPC分类号： B29C37/00 , G01B11/24 , G02B13/24 , G02B27/00 , G02B27/0025
摘要： An image forming optical system (21) is an image forming optical system wherein an object plane (P1) and an image plane (P2) are inclined to each other in mutually opposite directions, with respect to a first axis (25) connecting a point in the object plane (P1) and a point in the image plane (P2) conjugate with the point in the object plane, in a flat plane which includes the first axis and which is perpendicular to an intersection line between a plane including the object plane and another plane including the image plane, the image forming optical system including a first optical member (51) which is non-coaxial with respect to the first axis in the flat plane. In a tilted-lens image forming optical system, it is possible to suppress the lowering of imaging performance.
摘要翻译：图像形成光学系统（21）是成像光学系统，其中物平面（P1）和像平面（P2）相对于连接点的第一轴线（25）彼此相反地相互倾斜在物平面（P1）中的与平面中的点共轭的图像平面（P2）中的点处于包括第一轴线并且垂直于包括对象平面的平面之间的交线的平面中和包括图像平面的另一平面，所述成像光学系统包括在平面中相对于第一轴线不同轴的第一光学构件（51）。在倾斜透镜成像光学系统中，可以抑制成像性能的降低。

22. 发明申请

WO2020198253A1 LASER RADAR 审中-公开
公开(公告)号：WO2020198253A1
公开(公告)日：2020-10-01
申请号：PCT/US2020/024505
申请日：2020-03-24
申请人： NIKON METROLOGY NV , NIKON CORPORATION
发明人： SLOTWINSKI, Anthony , CHAMSINE, Ghassan , HEDGES, Tom , LIGHTOWLER, Paul , SMITH, Daniel Gene , HIDAKA, Yasuhiro , ARAI, Masanori
IPC分类号： G01S7/481 , G01S7/484
摘要： Laser radar include two part objective lenses that are used for imaging a target and directing probe beams to the target. Portions of tracer beams that degrade target images are attenuated with dichroic filters that block central portions of tracer beams. Local oscillator beams can be produced with a mixing lens that directs probe beams through a polarizing beam splitter to focus at or on a waveplate so that portions are reflected from the waveplate as local oscillator beams. An imaging system that is confocal with a probe beam is coupled to provide target measurements or to establish a focus of the probe beam.

23. 发明申请

WO2016018508A3 THERMALLY COMPENSATED FIBER INTERFEROMOETER ASSEMBLY 审中-公开
标题翻译：热补偿纤维干燥器总成
公开(公告)号：WO2016018508A3
公开(公告)日：2016-08-04
申请号：PCT/US2015033828
申请日：2015-06-02
申请人： NIKON METROLOGY NV
发明人： SLOTWINSKI ANTHONY R , REZK MINA A , SLYUSAREV PAVEL
IPC分类号： G02B6/293 , G01B9/02 , G02B6/02
CPC分类号： G02B6/29398 , G01S7/484 , G01S7/486 , G02B6/02395 , G02B6/29346
摘要： An optical delay between a first fiber and a second fiber is temperature compensated by combining fibers with different thermal path length changes. In some examples, fibers with different buffer coatings exhibit different path length changes per unit length and temperature. Combining such fibers in a fiber array provides a path length difference that is substantially independent of temperature.
摘要翻译：通过组合具有不同热路径长度变化的光纤来对第一光纤和第二光纤之间的光学延迟进行温度补偿。在一些实例中，具有不同缓冲涂层的纤维在每单位长度和温度上表现出不同的路径长度变化。将这种纤维组合在纤维阵列中提供了基本上与温度无关的路径长度差。

24. 发明申请

WO2016023950A1 X-RAY BEAM COLLIMATOR 审中-公开
标题翻译： X射线束收缩机
公开(公告)号：WO2016023950A1
公开(公告)日：2016-02-18
申请号：PCT/EP2015/068559
申请日：2015-08-12
申请人： NIKON METROLOGY NV
发明人： FLETCHER, Stephen Martin
IPC分类号： G21K1/02
CPC分类号： G21K1/02 , H01J2235/087
摘要： Disclosed is an X-ray beam collimator. In one configuration, the collimator comprises an X-ray collimating portion having an X-ray transmission aperture formed therein. In one configuration, an electron absorbing portion is positioned in or arranged to overlie the X-ray transmission aperture. In one configuration, the X-ray collimating portion has a thickness in a direction through the aperture greater than a thickness in the same direction of the electron absorbing portion. In one configuration, the collimator comprises an x- ray collimating portion made of a conducting first material having an x-ray transmission aperture formed therein. In one configuration, an electron absorbing portion made of a conducting second material is arranged to plug or cover the x-ray transmission aperture. In one configuration, the first material is relatively more radiodense than the second material. Also disclosed is an x-ray beam apparatus, a method of reducing ozone generation and a structure manufacturing method using the disclosed collimator.
摘要翻译：公开了一种X射线束准直仪。在一种配置中，准直器包括其中形成有X射线透射孔的X射线准直部分。在一种配置中，电子吸收部分位于X射线透射孔或布置成覆盖X射线透射孔。在一种配置中，X射线准直部分具有穿过孔的方向上的厚度大于电子吸收部分的相同方向上的厚度。在一种配置中，准直器包括由导电第一材料制成的x射线准直部分，其中形成有X射线透射孔。在一种配置中，布置有由导电的第二材料制成的电子吸收部分以堵塞或覆盖X射线透射孔。在一种配置中，第一种材料比第二种材料相对更多的无偏差。还公开了一种x射线束装置，减少臭氧产生的方法和使用所公开的准直器的结构制造方法。

25. 发明申请

WO2014122218A1 ARTEFACT FOR EVALUATING THE PERFORMANCE OF AN X-RAY COMPUTED TOMOGRAPHY SYSTEM 审中-公开
标题翻译：评估X射线计算机图像系统性能的评估
公开(公告)号：WO2014122218A1
公开(公告)日：2014-08-14
申请号：PCT/EP2014/052344
申请日：2014-02-06
申请人： NIKON METROLOGY NV
发明人： HILTON, Daniel , PUNIN ALBARRACIN, Diego Alfredo
IPC分类号： G01B21/04 , A61B6/03 , A61B6/00 , G01B3/30 , G01N23/083
CPC分类号： A61B6/583 , A61B6/032 , G01B3/30 , G01B15/02 , G01B21/042 , G01N23/046 , G01N23/083 , G01N2223/3035
摘要： The invention provides a kit for assembly of an artefact for evaluating performance purposes of an X-ray CT metrology system. The artefact comprises one or more interconnectable, stackable support plates, onto which a plurality of spherical bodies is mounted. The lightweight stacked support plate structure allows for a plurality of different configurations, and can be disassembled for enhanced storage, and safe and compact transportation.
摘要翻译：本发明提供了用于组装用于评估X射线CT测量系统的性能目的的人造物的套件。人造物包括一个或多个可互连的可堆叠的支撑板，多个球体安装在支撑板上。轻量级的堆叠支撑板结构允许多种不同的构造，并且可以拆卸以增强存储，并且安全和紧凑的运输。

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